Method for fabricating a semiconductor memory device having storage node overlap with bit line

Claim 1

A method for fabricating a semiconductor memory device, including: providing a substrate; forming a plurality of active regions on the substrate, each active region formed by successively forming a field oxide for isolating the active region from adjacent active regions, a gate, a laterally spaced source and drain region, and a first oxide film which covers the gate; filling a doped polysilicon film over each source region to form a source contact connection layer; forming a second oxide film over the gates and the source and drain regions; removing the second oxide film over the drain regions; filling a second doped polysilicon film over each drain region to form drain contact connection layers; forming a refractory metal bit line over each drain contact connection layer; forming an insulating film for leveling the surface over each bit line; forming a refractory metal side wall at each side of each bit line and insulating film for levelling the surfaces, the refractory metal of the bit lines and the refractory metal of the side walls being the same material; depositing a third oxide film over the whole surface; removing the second and third oxide films from over the source contact connection layers; and forming a capacitor above each source region, each capacitor including a storage node overlapping a corresponding bit line, a dielectric film and a plate.

Claim 2

A method for fabricating a semiconductor memory device, including: providing a substrate; forming a plurality of active regions on the substrate, each active region formed by successively forming a field oxide for isolating the active region from adjacent active regions, a gate, a laterally spaced source and drain region, and a first oxide film which covers the gate; filling a doped polysilicon film over each source region to form a source contact connection layer; forming a second oxide film over the gates and the source and drain regions; removing the second oxide film over the drain regions; filling a second doped polysilicon film over each drain region to form drain contact connection layers; forming a refractory metal bit line over each drain contact connection layer; forming an insulating film for leveling the surface over each bit line; forming a refractory metal side wall at each side of each bit line and insulating film for levelling the surfaces, the refractory metal of the bit lines and the refractory metal of the side walls being the same material; depositing a third oxide film over the whole surface; removing the second and third oxide films from over the source contact connection layers; and forming a capacitor above each source region, each capacitor including a storage node overlapping a corresponding bit line, a dielectric film and a plate.

Claim 4

A method for fabricating a semiconductor memory device, including: providing a substrate; forming a plurality of active regions on the substrate, each active region formed by successively forming a field oxide for isolating the active region from adjacent active regions, a gate, a laterally spaced source and drain region, and a first oxide film which covers the gate; depositing a first nitride film over the active regions; depositing a second oxide film over the first nitride film; removing the second oxide film and first nitride film over the drain regions to form bit line contact regions; forming first side walls of polysilicon film on sides of the first nitride film and second oxide film at each bit line contact region; successively depositing over each active region a bit line, an insulating film for leveling the surface, and a second nitride film; removing portions of the bit lines, insulating film, and second nitride film from capacitor contact regions above each source region; forming second side walls of the nitride film on sides of the bit line, insulating film and second nitride film over the second oxide film; removing exposed portions of the second oxide film not covered by the second side walls; removing exposed portions of the first and second nitride films and the second side walls; forming a third side wall of an oxide film on sides of the bit line and insulating film; and forming a capacitor above each source region, each capacitor including a storage node overlapping a corresponding bit line, a dielectric film and a plate.

Claim 5

A method for fabricating a semiconductor memory device, including: providing a substrate; forming a plurality of active regions on the substrate, each active region formed by successively forming a field oxide for isolating the active region from adjacent active regions, a gate, a laterally spaced source and drain region, and a first oxide film which covers the gate; depositing a first nitride film over the active regions; depositing a second oxide film over the first nitride film; removing the second oxide film and first nitride film over the drain regions to form bit line contact regions; forming first side walls of polysilicon film on sides of the first nitride film and second oxide film at each bit line contact region; successively depositing over each active region a bit line, an insulating film for leveling the surface, and a second nitride film; removing portions of the bit lines, insulating film, and second nitride film from capacitor contact regions above each source region; forming second side walls of the nitride film on sides of the bit line, insulating film and second nitride film over the second oxide film; removing exposed portions of the second oxide film not covered by the second side walls; removing exposed portions of the first and second nitride films and the second side walls; forming a third side wall of an oxide film on sides of the bit line and insulating film; and forming a capacitor above each source region, each capacitor including a storage node overlapping a corresponding bit line, a dielectric film and a plate.