Method of making alternate metal/source virtual ground flash EPROM cell array

Claim 1

A method of fabricating an alternate source virtual ground flash EPROM array in a silicon substrate of P-type conductivity, the EPROM array including a plurality of cross-point EPROM cells, the method comprising: forming a layer of first insulating material on the silicon substrate; forming a first layer of polysilicon (poly1) on the layer of first insulating material; forming a layer of second insulating material on the first layer of poly1; forming a poly1 mask to define, in the array area, parallel lines of the second insulating material and underlying first layer of poly1; etching exposed portions of the second insulating material and underlying first layer of poly1 to define, in the array area, a plurality of spaced-apart, parallel vertical strips of second insulating material and underlying poly1; after removing the poly1 mask, introducing N-type dopant into the silicon substrate between the parallel vertical strips of second insulating material and underlying poly1 to form spaced-apart, parallel N+ bit lines; using the second insulating material as a mask to prevent introduction of N-type dopant outside of the array area; implanting alternate N+ bit lines with additional N+ dopant to form graded source lines that alternate with buried N+ drain lines; performing a differential oxidation step to form additional oxide on the second insulating material of the vertical strips while simultaneously forming oxide over the graded source lines and the N+ drain lines; removing the second insulating material in selected areas outside of the array to allow formation of transistors in the periphery. forming a second layer of polysilicon (poly2) over the structure formed in the preceding steps; forming a layer of tungsten silicide over the second layer of poly2; forming a poly2mask on the layer of tungsten silicide; etching the tungsten silicide and the underlying poly2to form, in the array area, poly2word lines perpendicular to the strips of second insulating material and underlying poly1 but separated from the poly1 by the second insulating material and to form access transistor gates and, out of the array, gates for peripheral transistors; forming another resist mask over and without removing the poly2resist mask; and utilizing the poly2word lines in a self-aligned etch step to define poly1 floating gates of the cross-point EPROM cells of the array without affecting peripheral or access transistors.

Claim 2

A method of fabricating an alternate source virtual ground flash EPROM array in a silicon substrate of P-type conductivity, the EPROM array including a plurality of cross-point EPROM cells, the method comprising: forming a layer of first insulating material on the silicon substrate; forming a first layer of polysilicon (poly1) on the layer of first insulating material; forming a layer of second insulating material on the first layer of poly1; forming a poly1 mask to define, in the array area, parallel lines of the second insulating material and underlying first layer of poly1; etching exposed portions of the second insulating material and underlying first layer of poly1 to define, in the array area, a plurality of spaced-apart, parallel vertical strips of second insulating material and underlying poly1; after removing the poly1 mask, introducing N-type dopant into the silicon substrate between the parallel vertical strips of second insulating material and underlying poly1 to form spaced-apart, parallel N+ bit lines; using the second insulating material as a mask to prevent introduction of N-type dopant outside of the array area; implanting alternate N+ bit lines with additional N+ dopant to form graded source lines that alternate with buried N+ drain lines; performing a differential oxidation step to form additional oxide on the second insulating material of the vertical strips while simultaneously forming oxide over the graded source lines and the N+ drain lines; removing the second insulating material in selected areas outside of the array to allow formation of transistors in the periphery. forming a second layer of polysilicon (poly2) over the structure formed in the preceding steps; forming a layer of tungsten silicide over the second layer of poly2; forming a poly2mask on the layer of tungsten silicide; etching the tungsten silicide and the underlying poly2to form, in the array area, poly2word lines perpendicular to the strips of second insulating material and underlying poly1 but separated from the poly1 by the second insulating material and to form access transistor gates and, out of the array, gates for peripheral transistors; forming another resist mask over and without removing the poly2resist mask; and utilizing the poly2word lines in a self-aligned etch step to define poly1 floating gates of the cross-point EPROM cells of the array without affecting peripheral or access transistors.