US5345292A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Illumination device for projection exposure apparatus
Assignee: Canon Inc
•
Filing: 1993-03-31
•
Granted: 1994-09-06
•
Expires: 2013-03-31
Abstract
Abstract An illumination device, includes a secondary light source forming system having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Inventors
- 👤 Takahisa Shiozawa
- 👤 Masato Muraki
- 👤 Hiroyuki Ishii
- 👤 Shigeru Hayata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 02:52
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70091; G03F7/70108; G03F7/70216; G03F7/70241
Claims Analysis
Total Claims: 71
Claim 1
Independent Claim
79 words
An illumination device, comprising: secondary light source forming means having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, said secondary light source forming means forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Claim 2
Dependent Claim
79 words
An illumination device, comprising: secondary light source forming means having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, said secondary light source forming means forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Claim 3
Dependent Claim
91 words
A device according to claim 1, wherein said secondary light source forming means comprises a light source, reflecting means for reflecting the light from said light source and for forming an image of said light source, an optical integrator, and an imaging optical system for re-imaging the light source image, wherein said imaging optical system includes parallelizing means for transforming the light from the light source image into substantially parallel light, and collecting means for collecting the ring-like light from said deflecting member substantially into a ring-like shape upon said integrator.
Claim 4
Dependent Claim
21 words
A device according to claim 2, wherein said deflecting member is demountably mounted to the path of light to be received.
Claim 5
Dependent Claim
20 words
A device according to claim 3, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 6
Dependent Claim
27 words
A device according to claim 3, further comprising means for moving said deflecting member in a direction intersecting with the optical axis of said imaging optical system.
Claim 7
Dependent Claim
18 words
A device according to claim 3, further comprising means for rotating said deflecting member about the optical axis.
Claim 8
Dependent Claim
26 words
A device according to claim 3, further comprising a second light deflecting member for reducing the angle of incidence of the ring-like light upon said integrator.
Claim 9
Dependent Claim
21 words
A device according to claim 7, wherein said second light deflecting member comprises a prism having a conical light deflecting surface.
Claim 10
Dependent Claim
16 words
A device according to claim 7, wherein said second light deflecting member comprises a field lens.
Claim 11
Dependent Claim
90 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: secondary light source forming means having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, said secondary light source forming means forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Claim 12
Dependent Claim
90 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: secondary light source forming means having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, said secondary light source forming means forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Claim 13
Dependent Claim
90 words
An apparatus according to claim 10, wherein said secondary light source forming means comprises a light source, reflecting means for reflecting the light from said light source and for forming an image of said light source, an optical integrator, and an imaging optical system for re-imaging the light source image, wherein said imaging optical system includes parallelizing means for transforming the light from the light source image into substantially parallel light, and collecting means for collecting the ring-like light from said deflecting member substantially into a ring-like shape upon integrator.
Claim 14
Dependent Claim
21 words
An apparatus according to claim 11, wherein said deflecting member is demountably mounted to the path of light to be received.
Claim 15
Dependent Claim
20 words
An apparatus according to claim 12, wherein said image optical system comprises an optical system having a variable imaging magnification.
Claim 16
Dependent Claim
27 words
An apparatus according to claim 12, further comprising means for moving said deflecting member in a direction intersecting with the optical axis of said imaging optical system.
Claim 17
Dependent Claim
18 words
An apparatus according to claim 14, further comprising means for rotating said deflecting member about the optical axis.
Claim 18
Dependent Claim
26 words
An apparatus according to claim 14, further comprising a second light deflecting member for reducing the angle on incidence of the ring-like light upon said integrator.
Claim 19
Dependent Claim
21 words
An apparatus according to claim 16, wherein said second light deflecting member comprises a prism having a conical light deflecting surface.
Claim 20
Dependent Claim
16 words
An apparatus according to claim 16, wherein said second light deflecting member comprises a field lens.
Claim 21
Dependent Claim
19 words
An apparatus according to claim 10, further comprising means for imaging a pattern of the mask onto the substrate.
Claim 22
Independent Claim
70 words
A device manufacturing method including a step of exposing a workpiece to a mask, said method comprising the steps of: projecting light onto a light deflecting surface of conical shape to produce substantially ring-like light; forming a secondary light source by using the ring-like light; projecting lights from portions of the secondary light source obliquely onto the mask so that the lights are superposed one upon another on the mask.
Claim 23
Independent Claim
70 words
A device manufacturing method including a step of exposing a workpiece to a mask, said method comprising the steps of: projecting light onto a light deflecting surface of conical shape to produce substantially ring-like light; forming a secondary light source by using the ring-like light; projecting lights from portions of the secondary light source obliquely onto the mask so that the lights are superposed one upon another on the mask.
Claim 24
Dependent Claim
17 words
A method according to claim 20, wherein a pattern of the mask is imaged on the workpiece.
Claim 25
Dependent Claim
151 words
An illumination device, comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing a positional relationship between an apex of said light deflecting surface and the optical axis.
Claim 26
Dependent Claim
151 words
An illumination device, comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing a positional relationship between an apex of said light deflecting surface and the optical axis.
Claim 27
Dependent Claim
22 words
A device according to claim 22, wherein said deflecting member is demountably mounted to the path of light from said light source.
Claim 28
Dependent Claim
20 words
A device according to claim 23, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 29
Dependent Claim
18 words
A device according to claim 23, further comprising means for rotating said deflecting member about the optical axis.
Claim 30
Dependent Claim
30 words
A device to claim 23, further comprising a second light deflecting member for reducing the angle of incidence of the ring-like light or the plurality of lights upon said integrator.
Claim 31
Dependent Claim
21 words
A device according to claim 26, wherein said second light deflecting member comprises a prism having a conical light deflecting surface.
Claim 32
Dependent Claim
16 words
A device according to claim 26, wherein said second light deflecting member comprises a field lens.
Claim 33
Dependent Claim
162 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing a positional relationship between an apex of said light deflecting surface and the optical axis.
Claim 34
Dependent Claim
162 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing a positional relationship between an apex of said light deflecting surface and the optical axis.
Claim 35
Dependent Claim
59 words
An apparatus according to claim 29, wherein said imaging optical system comprises first image forming means for reflecting light from said light source and for forming an image of said light source, and second image means for re-imaging the light source image, wherein said second image forming means includes said parallelizing means, said deflecting member and said collecting means.
Claim 36
Dependent Claim
22 words
An apparatus according to claim 29, wherein said deflecting member is demountably mounted to the path of light from said light source.
Claim 37
Dependent Claim
20 words
An apparatus according to claim 29, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 38
Dependent Claim
18 words
An apparatus according to claim 29, further comprising means for rotating said deflecting member about the optical axis.
Claim 39
Dependent Claim
31 words
An apparatus according to claim 29, further comprising a second light deflecting member for reducing the angle of incidence of the ring-like light or the plurality of lights upon said integrator.
Claim 40
Dependent Claim
21 words
An apparatus according to claim 34, wherein said second light deflecting member comprises a prism having a conical light deflecting surface.
Claim 41
Dependent Claim
16 words
An apparatus according to claim 34, wherein said second light deflecting member comprises a field lens.
Claim 42
Dependent Claim
19 words
An apparatus according to claim 29, further comprising means for imaging a pattern of the mask onto the substrate.
Claim 43
Independent Claim
127 words
A device manufacturing method including a step of exposing a workpiece to a mask with a light, said method comprising the steps of: projecting light to a light deflecting surface of conical shape or pyramidal shape to form ring-like light or a plurality of lights; forming a secondary light source by using the ring-like light or the plurality of lights; wherein, in said projecting step and said secondary light source forming step, the positional relationship between an apex of the light deflecting surface and the optical axis is changed to provide the secondary light source of a desired intensity distribution; and projecting divergent lights from portions of the secondary light source obliquely upon the mask so that the lights are superposed one upon another on the mask.
Claim 44
Independent Claim
127 words
A device manufacturing method including a step of exposing a workpiece to a mask with a light, said method comprising the steps of: projecting light to a light deflecting surface of conical shape or pyramidal shape to form ring-like light or a plurality of lights; forming a secondary light source by using the ring-like light or the plurality of lights; wherein, in said projecting step and said secondary light source forming step, the positional relationship between an apex of the light deflecting surface and the optical axis is changed to provide the secondary light source of a desired intensity distribution; and projecting divergent lights from portions of the secondary light source obliquely upon the mask so that the lights are superposed one upon another on the mask.
Claim 45
Dependent Claim
17 words
A method according to claim 38, wherein a pattern of the mask is imaged on the workpiece.
Claim 46
Dependent Claim
184 words
An illumination device, comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; and an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said integrator of the ring-like light or of the plurality of lights; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 47
Dependent Claim
184 words
An illumination device, comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; and an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said integrator of the ring-like light or of the plurality of lights; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 48
Dependent Claim
20 words
A device according to claim 40, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 49
Dependent Claim
28 words
A device according to claim 40, further comprising means for moving said first deflecting member in a direction intersecting with the optical axis of said imaging optical system.
Claim 50
Dependent Claim
19 words
A device according to claim 40, further comprising means for rotating said first deflecting member about the optical axis.
Claim 51
Dependent Claim
24 words
A device according to claim 40, wherein each of said first and second deflecting members comprise a prism having a conical light deflecting surface.
Claim 52
Dependent Claim
24 words
A device according to claim 40, wherein each of said first and second deflecting members comprise a prism having a pyramidal light deflecting surface.
Claim 53
Dependent Claim
15 words
A device according to claim 40, wherein said second deflecting member comprises a field lens.
Claim 54
Dependent Claim
60 words
A device according to claim 40, wherein said imaging optical system comprises first image forming means for reflecting light from said light source and for forming an image of said light source, and second image forming means for re-imaging the light source image, wherein said second image forming means includes said parallelizing means, said deflecting member and said collecting means.
Claim 55
Dependent Claim
195 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; and an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said integrator of the ring-like light or of the plurality of lights; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 56
Dependent Claim
195 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; and an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said integrator of the ring-like light or of the plurality of lights; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 57
Dependent Claim
20 words
An apparatus according to claim 48, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 58
Dependent Claim
28 words
An apparatus according to claim 48, further comprising means for moving said first deflecting member in a direction intersecting with the optical axis of said imaging optical system.
Claim 59
Dependent Claim
19 words
An apparatus according to claim 48, further comprising means for rotating said first deflecting member about the optical axis.
Claim 60
Dependent Claim
24 words
An apparatus according to claim 48, wherein each of said first and second deflecting members comprise a prism having a conical light deflecting surface.
Claim 61
Dependent Claim
24 words
An apparatus according to claim 48, wherein each of said first and second deflecting members comprise a prism having a pyramidal light deflecting surface.
Claim 62
Dependent Claim
15 words
An apparatus according to claim 48, wherein said second deflecting member comprises a field lens.
Claim 63
Dependent Claim
60 words
An apparatus according to claim 48, wherein said imaging optical system comprises first image forming means for reflecting light from said light source and for forming an image of said light source, and second image forming means for re-imaging the light source image, wherein said second image forming means includes said parallelizing means, said deflecting member and said collecting means.
Claim 64
Dependent Claim
19 words
An apparatus according to claim 48, further comprising means for imaging a pattern of the mask on the substrate.
Claim 65
Independent Claim
158 words
A device manufacturing method including a step of exposing a workpiece to a mask, said method comprising the steps of: projecting parallel light on a first deflecting surface of conical shape or pyramidal shape to produce ring-like light or a plurality of lights; projecting the ring-like light or the plurality of lights to form a secondary light source; wherein in said secondary light source forming step, the ring-like light or the plurality of lights are deflected by a second deflecting surface to reduce the angle of incidence thereof upon the plane; and projecting divergent lights from portions of the secondary light source obliquely onto the mask so that the lights are superposed one upon another on the mask; wherein the first and second deflecting surfaces are provided in a pair demountably mounted; and wherein the parallel light can be projected to an approximately central portion of the plane, when the first and second deflecting surfaces are not present.
Claim 66
Independent Claim
158 words
A device manufacturing method including a step of exposing a workpiece to a mask, said method comprising the steps of: projecting parallel light on a first deflecting surface of conical shape or pyramidal shape to produce ring-like light or a plurality of lights; projecting the ring-like light or the plurality of lights to form a secondary light source; wherein in said secondary light source forming step, the ring-like light or the plurality of lights are deflected by a second deflecting surface to reduce the angle of incidence thereof upon the plane; and projecting divergent lights from portions of the secondary light source obliquely onto the mask so that the lights are superposed one upon another on the mask; wherein the first and second deflecting surfaces are provided in a pair demountably mounted; and wherein the parallel light can be projected to an approximately central portion of the plane, when the first and second deflecting surfaces are not present.
Claim 67
Dependent Claim
17 words
A method according to claim 57, wherein a pattern of the mask is imaged on the workpiece.
Claim 68
Dependent Claim
147 words
An illumination device, comprising: a light source; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing the positional relationship between an apex of said deflecting surface and the optical axis.
Claim 69
Dependent Claim
147 words
An illumination device, comprising: a light source; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing the positional relationship between an apex of said deflecting surface and the optical axis.
Claim 70
Dependent Claim
183 words
An illumination device, comprising: a light source; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon a plane; and an optical system for projecting lights from portions of a secondary light source formed by the light from said first deflecting member, obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said plane of the light from said first deflecting surface; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 71
Dependent Claim
183 words
An illumination device, comprising: a light source; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon a plane; and an optical system for projecting lights from portions of a secondary light source formed by the light from said first deflecting member, obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said plane of the light from said first deflecting surface; and wherein said first and second deflecting members are provided in a pair demountably mounted.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-05 | 1998-03-07 | 1998-09-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-05 | 2002-03-07 | 2002-09-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-05 | 2006-03-07 | 2006-09-06 | $7700.00 | Window Closed / Lapsed |