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Multilayer magnetic structure wherein the magnitude of the structure magnetoresistance is a function of nonmagnetic layer thickness

Assignee: HGST Netherlands BV
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Filing: 1993-05-06
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Granted: 1994-08-23
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Expires: 2013-05-06
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Abstract

Abstract A multilayer magnetoresistive (MR) sensor formed on a substrate includes alternating layers of a ferromagnetic material and a non-magnetic metallic material. The ferromagnetic material and the non-magnetic material form bilayers which exhibit the property that the magnetoresistance of the multilayered structure oscillates as a function of thickness of the non-magnetic material. A current flow is produced through the MR sensor, and the variations in the resistivity of the MR sensor are sensed as a function of the magnetic field being sensed.

Inventors

  • 👤 Stuart S. P. Parkin
  • 👤 Kevin P. Roche

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 09:26
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/39; G11B5/3903; G01; G01R; G01R33/00; G01R33/02; G01R33/06; G01R33/09; G01R33/093; B; B82; B82Y; B82Y10/00; B82Y25/00; H; H01; H01F; H01F10/00; H01F10/32; H01F10/324; H10; H10N; H10N50/00; H10N50/80; H10N50/85; G11B2005/3996; Y; Y10; Y10S; Y10S428/00; Y10S428/90

Claims Analysis

Total Claims: 35
Claim 1
Independent Claim 77 words
A multilayered magnetic structure comprising: at least two bilayers, each bilayer comprising a layer of a ferromagnetic material and a layer of a nonmagnetic metallic material having a predetermined thickness, the value of the magnetoresistance of said multilayered structure exhibiting the property that its magnitude oscillates as a function of thickness of said layer of nonmagnetic metallic material, the thickness of said layer of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 2
Dependent Claim 77 words
A multilayered magnetic structure comprising: at least two bilayers, each bilayer comprising a layer of a ferromagnetic material and a layer of a nonmagnetic metallic material having a predetermined thickness, the value of the magnetoresistance of said multilayered structure exhibiting the property that its magnitude oscillates as a function of thickness of said layer of nonmagnetic metallic material, the thickness of said layer of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 3
Dependent Claim 29 words
A multilayered magnetic structure as in claim 1 wherein said oscillatory function comprises at least a first and a second peak value for the magnetoresistance of said multilayered structure.
Claim 4
Dependent Claim 28 words
A multilayered magnetic structure as in claim 2 wherein the thickness of said nonmagnetic metallic layer is selected to correspond to said first peak of said oscillatory function.
Claim 5
Dependent Claim 28 words
A multilayered magnetic structure as in claim 1 wherein the thickness of said nonmagnetic metallic layer is selected to correspond to said second peak of said oscillatory function.
Claim 6
Dependent Claim 33 words
A multilayered magnetic structure as in claim 1 wherein said layer of nonmagnetic metallic material is formed of a material selected from the group consisting of copper, chromium, ruthenium, iridium, rhenium and rhodium.
Claim 7
Dependent Claim 19 words
A multilayered magnetic structure as in claim 5 wherein said layer of nonmagnetic metallic material is formed of copper.
Claim 8
Dependent Claim 29 words
A multilayered magnetic structure as in claim 6 wherein said layer of ferromagnetic material is formed of a material selected from the group consisting of cobalt, nickel-iron and nickel-cobalt.
Claim 9
Dependent Claim 19 words
A multilayered magnetic structure as in claim 5 wherein said layer of nonmagnetic metallic material is formed of ruthenium.
Claim 10
Dependent Claim 31 words
A multilayered magnetic structure as in claim 8 wherein said layer of ferromagnetic material is formed of a material selected from the group consisting of iron, nickel, cobalt, nickel-iron and nickel-cobalt.
Claim 11
Dependent Claim 93 words
A multilayered magnetic structure comprising: at least two quadlayers, each quadlayer comprising a layer of a first ferromagnetic material, a first layer of a nonmagnetic metallic material, a layer of a second ferromagnetic material and a second layer of a nonmagnetic metallic material, the value of the magnetoresistance of said multilayered structure exhibiting the property that its value oscillates as a function of thickness of said layers of nonmagnetic metallic material, the thicknesses of said first and second layers of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 12
Dependent Claim 93 words
A multilayered magnetic structure comprising: at least two quadlayers, each quadlayer comprising a layer of a first ferromagnetic material, a first layer of a nonmagnetic metallic material, a layer of a second ferromagnetic material and a second layer of a nonmagnetic metallic material, the value of the magnetoresistance of said multilayered structure exhibiting the property that its value oscillates as a function of thickness of said layers of nonmagnetic metallic material, the thicknesses of said first and second layers of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 13
Dependent Claim 29 words
A multilayered magnetic structure as in claim 10 wherein said oscillatory function comprises at least a first and a second peak value for the magnetoresistance of said multilayered structure.
Claim 14
Dependent Claim 28 words
A multilayered magnetic structure as in claim 11 wherein the thickness of said nonmagnetic metallic layer is selected to correspond to said first peak of said oscillatory function.
Claim 15
Dependent Claim 28 words
A multilayered magnetic structure as in claim 11 wherein the thickness of said nonmagnetic metallic layer is selected to correspond to said second peak of said oscillatory function.
Claim 16
Dependent Claim 33 words
A multilayered magnetic structure as in claim 10 wherein said layer of nonmagnetic metallic material is formed of a material selected from the group consisting of copper, chromium, ruthenium, iridium, rhenium and rhodium.
Claim 17
Dependent Claim 19 words
A multilayered magnetic structure as in claim 14 wherein said layers of nonmagnetic metallic material are formed of copper.
Claim 18
Dependent Claim 41 words
A multilayered magnetic structure as in claim 15 wherein said first and second layers of ferromagnetic material are formed, respectively, of materials selected from the group consisting of cobalt and nickel, cobalt and iron, cobalt and nickel-iron and cobalt and nickel-cobalt.
Claim 19
Dependent Claim 31 words
A multilayered magnetic structure as in claim 14 wherein said layers of nonmagnetic metallic material are formed of a material selected from the group consisting of ruthenium, iridium, rhenium and rhodium.
Claim 20
Dependent Claim 41 words
A multilayered magnetic structure as in claim 17 wherein said first and second layers of ferromagnetic material are formed, respectively, of materials selected from the group consisting of cobalt and iron, cobalt and nickel, cobalt and nickel-iron, and nickel and iron.
Claim 21
Dependent Claim 91 words
A magnetoresistive sensor comprising: a substrate; and a magnetoresistive layer formed on said substrate, said magnetoresistive layer comprising a plurality of N bilayers, each bilayer comprising a layer of a ferromagnetic material and a layer of a nonmagnetic metallic material having a predetermined thickness, the value of the magnetoresistance of said multilayered structure exhibiting the property that its magnitude oscillates as a function of thickness of said layer of nonmagnetic metallic material, the thickness of said layer of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 22
Dependent Claim 91 words
A magnetoresistive sensor comprising: a substrate; and a magnetoresistive layer formed on said substrate, said magnetoresistive layer comprising a plurality of N bilayers, each bilayer comprising a layer of a ferromagnetic material and a layer of a nonmagnetic metallic material having a predetermined thickness, the value of the magnetoresistance of said multilayered structure exhibiting the property that its magnitude oscillates as a function of thickness of said layer of nonmagnetic metallic material, the thickness of said layer of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 23
Dependent Claim 23 words
The magnetoresistive sensor of claim 19 further comprising a buffer layer formed on said substrate disposed between said substrate and said magnetoresistive layer.
Claim 24
Dependent Claim 29 words
The magnetoresistive sensor of claim 20 wherein said buffer layer is formed of a material selected from the group consisting of iron, copper, chromium, ruthenium, rhodium, iridium and rhenium.
Claim 25
Dependent Claim 17 words
The magnetoresistive sensor of claim 19 further comprising a capping layer overlaying and covering said magnetoresistive layer.
Claim 26
Dependent Claim 21 words
The magnetoresistive sensor of claim 22 wherein said capping layer is formed of a material having a relatively high electrical resistivity.
Claim 27
Dependent Claim 21 words
The magnetoresistive sensor of claim 19 wherein the number N of said bilayers is in the range of forty to sixty.
Claim 28
Dependent Claim 19 words
The magnetoresistive sensor of claim 19 wherein said magnetoresistive layer comprises twenty said bilayers formed on said buffer layer.
Claim 29
Dependent Claim 107 words
A magnetoresistive sensor comprising: a substrate; and a magnetoresistive layer formed on said substrate, said magnetoresistive layer comprising a plurality of N quadlayers, each quadlayer comprising a layer of a first ferromagnetic material, a first layer of a nonmagnetic metallic material, a layer of a second ferromagnetic material and a second layer of a nonmagnetic metallic material, the value of the magnetoresistance of said multilayered structure exhibiting the property that its value oscillates as a function of thickness of said layers of nonmagnetic metallic material, the thicknesses of said first and second layers of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 30
Dependent Claim 107 words
A magnetoresistive sensor comprising: a substrate; and a magnetoresistive layer formed on said substrate, said magnetoresistive layer comprising a plurality of N quadlayers, each quadlayer comprising a layer of a first ferromagnetic material, a first layer of a nonmagnetic metallic material, a layer of a second ferromagnetic material and a second layer of a nonmagnetic metallic material, the value of the magnetoresistance of said multilayered structure exhibiting the property that its value oscillates as a function of thickness of said layers of nonmagnetic metallic material, the thicknesses of said first and second layers of nonmagnetic metallic material selected to correspond to a peak of said oscillatory function.
Claim 31
Dependent Claim 22 words
The magnetoresistive sensor of claim 26 further comprising a buffer layer formed on said substrate between said substrate and said magnetoresistive layer.
Claim 32
Dependent Claim 29 words
The magnetoresistive sensor of claim 27 wherein said buffer layer is formed of a material selected from the group consisting of iron, copper, chromium, ruthenium, rhodium, iridium and rhenium.
Claim 33
Dependent Claim 19 words
The magnetoresistive sensor of claim 26 wherein said magnetoresistive layer comprises ten said quadlayers formed on said buffer layer.
Claim 34
Dependent Claim 17 words
The magnetoresistive sensor of claim 26 further comprising a capping layer overlaying and covering said magnetoresistive layer.
Claim 35
Dependent Claim 21 words
The magnetoresistive sensor of claim 30 wherein said capping layer is formed of a material having a relatively high electrical resistivity.

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