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US5338948A Expired / Lapsed US ⏱️ 0.0 years remaining

Charge-coupled device with open gate structure

Assignee: Roper Technologies Inc
•
Filing: 1993-03-16
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Granted: 1994-08-16
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Expires: 2013-03-16
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Abstract

Abstract The light gathering capability or quantum efficiency of a charge-coupled device is improved by the configuration of the multi-phase gate structure to leave large surface areas of the semiconductor substrate uncovered. Each of the electrodes of the multi-phase gate structure is configured as a series of shallow H-shaped geometries, only the vertical elements of which overlap to ensure that multi-phase operation can be achieved.

Inventors

  • 👤 Gary R. Sims

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 03:11
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/605; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/153

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 130 words
A charge-coupled device comprising a semiconductor substrate of a first conductivity type and having an implant of the opposite conductivity type at a surface region of said substrate, said device including an electrically-insulating layer on said surface, said device also including a multi-phase electrode structure formed on said insulating layer, said electrode structure comprising a plurality of electrical conductors each comprising a series of H-shaped geometries, each of said H-shaped geometries comprising a horizontal and two vertical elements, like-positioned ones of said vertical elements of adjacent electrical conductors overlapping each other in a manner to generate therebeneath a pattern of potential wells, said pattern moving to a succession of positions beneath said vertical elements for moving charge quanta therealong in response to a multi-phase pulse sequence on said electrical conductors.
Claim 2
Dependent Claim 130 words
A charge-coupled device comprising a semiconductor substrate of a first conductivity type and having an implant of the opposite conductivity type at a surface region of said substrate, said device including an electrically-insulating layer on said surface, said device also including a multi-phase electrode structure formed on said insulating layer, said electrode structure comprising a plurality of electrical conductors each comprising a series of H-shaped geometries, each of said H-shaped geometries comprising a horizontal and two vertical elements, like-positioned ones of said vertical elements of adjacent electrical conductors overlapping each other in a manner to generate therebeneath a pattern of potential wells, said pattern moving to a succession of positions beneath said vertical elements for moving charge quanta therealong in response to a multi-phase pulse sequence on said electrical conductors.
Claim 3
Dependent Claim 29 words
A device as set forth in claim 1 wherein said substrate comprises P-type semiconductor material, said surface implant comprising N-type semiconductor material, and said insulating material comprises silicon dioxide.
Claim 4
Dependent Claim 53 words
A charge-coupled device as set forth in claim 2 also including channel stops oriented vertically with respect to the axes of said electrical conductors and positioned between associated H-shaped geometries of said plurality of electrical conductors, said channel stops being defined in said substrate and positioned at the space between adjacent H-shaped geometries.
Claim 5
Dependent Claim 26 words
A charge-coupled device as set forth in claim 3 also including a Boron implant in said substrate in areas between adjacent ones of said H-shaped geometries.
Claim 6
Dependent Claim 24 words
A charge-coupled device as set forth in claim 4 also including an anti-reflecting coating in said areas between adjacent ones of said H-shaped geometries.
Claim 7
Dependent Claim 26 words
A charge-coupled device as set forth in claim 3 including a Phosphorous implant only in the areas of said substrate in which said vertical elements overlap.
Claim 8
Dependent Claim 16 words
A charge-coupled device as set forth in claim 3 wherein said multi-phase electrode structure comprises Polysilicon.
Claim 9
Dependent Claim 26 words
A charge-coupled device as set forth in claim 3 wherein each of said channel stops is sufficiently wide to overlap adjacent ones of said vertical elements.
Claim 10
Dependent Claim 26 words
A charge-coupled device as set forth in claim 4 wherein each of said channel stops is sufficiently wide to overlap adjacent ones of said vertical elements.
Claim 11
Dependent Claim 26 words
A charge-coupled device as set forth in claim 6 wherein each of said channel stops is sufficiently wide to overlap adjacent ones of said vertical elements.

References Cited (Backward Citations)

US3961355A Cited
US4663771A Cited
JPS5898961A Cited
JPS59113661A Cited
US4757365A Cited
JPS59159564A Cited
US4805026A Cited
JPS62293762A Cited
US4970567A Cited
US5043819A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-08-15 1998-02-14 1998-08-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-08-15 2002-02-14 2002-08-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-08-15 2006-02-14 2006-08-16 $7700.00 Window Closed / Lapsed

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