CCD image sensor with substantially identical integration regions

Claim 2

A charge coupled image sensor device for receiving a radiation image and converting it into an electrical signal, said device consisting essentially of; a semiconductor body having a major surface, said semiconductor body having a plurality of charge transfer channels therein adjoining the major surface, said charge transfer channels being substantially parallel to and separated from each other by separation regions in the semiconductor body; an insulating layer on the major surface of the semiconductor body; and a system of electrodes on the insulating layer; characterized in that the electrode system consists essentially of: a first group of electrodes extending transverse to the charge transfer channels, said electrodes being pervious to light of a first wavelength range, said electrodes being separated from each other to define gaps therebetween; a second group of electrodes, each electrode of the second group extending between pairs of electrodes of the first group over alternate gaps between the electrodes of the first group, said electrodes of the second group being electrically insulated from electrodes of the first group, each electrode of the second group having a base portion extending transverse to the charge transfer channels, each electrode of the second group having projecting portions extending over each charge transfer channel, said projecting portions being separated from each other to form gaps therebetween, said electrodes being pervious to light of a first wavelength range; a third group of electrodes, each electrode of the third group extending between pairs of electrodes of the first group over alternate gaps between the electrodes of the first group which are not bridged by electrodes of the second group, said electrodes of the third group being electrically insulated from electrodes of the first and second groups, each electrode of the third group having a base portion extending transverse to the charge transfer channels, each electrode of the third group having projecting portions extending over each charge transfer channel, said projecting portions being separated from each other to form gaps therebetween, said third electrodes being pervious to light of a first wavelength range; wherein the gaps between the electrodes of the first group overlap the gaps between the projecting portions of the electrodes of the second and third groups to form windows which are pervious to light of a second wavelength range which is larger than the first wavelength range, said windows being arranged above separation regions only.

Claim 3

A device as claimed in claim 1, characterized in that each electrode of the second and third groups is comb-shaped, the teeth of the comb extending over the charge transfer channels.

Claim 4

A device as claimed in claim 1, characterized in that the electrode system can be used for four phase charge transport.

Claim 5

A device as claimed in claim 1, characterized in that each electrode of the first group is coupled to one adjoining electrode of the second or third groups by way of a voltage source.

Claim 6

A device as claimed in claim 1, characterized in that the windows are openings in the electrodes of the second and third groups.

Claim 7

A device as claimed in claim 5, characterized in that the electrodes of the second and third groups are substantially identical to each other.

Claim 8

A device as claimed in claim 6, characterized in that the electrode system can be used for two phase charge transport.

Claim 9

A device as claimed in claim 6, characterized in that the device further comprises a control circuit and a signal processing circuit.

Claim 10

A device as claimed in claim 8, characterized in that the control circuit and the signal processing circuit are formed in the semiconductor body.

Claim 11

A charge coupled image sensor device of the frame transfer type comprising a semiconductor body in which at a major surface a plurality of mutually separated substantially parallel charge transfer channels are defined, forming an image section for collecting a radiation image and converting it into electrical signals, and a storage section in which said electrical signals after one integration period may be transferred and stored in behalf of read-out, wherein the image section comprises an electrode system comprising: a first group of electrodes which extend in a direction transverse to the plurality of charge transfer channels, and are located at a distance from each other, thus defining a gap therebetween; a second group of electrodes, filling alternately gaps between the electrodes of the first group, each electrode of the second group having a base portion extending in a direction transverse to the plurality of charge transfer channels, and projecting portions extending from the base portion above and parallel to the charge transfer channels, each projecting portion extending substantially above the whole width of the associated charge transfer channel, said base portion together with said projecting portions extending over the whole gap between adjacent electrodes of the first group, overlapping these electrodes, and being insulated therefrom by an intermediate insulating layer; a third group of electrodes filling the remaining gaps between the electrodes of the first group, each electrode of the third group having a base portion extending in a direction transverse to the plurality of charge transfer channels, and projecting portions extending from the base portion above and parallel to the charge transfer channels, each projecting portion extending substantially above the whole width of the associated charge transfer channel, said base portion together with said projecting portions extending over the whole gap between adjacent electrodes of the first group, overlapping these electrodes and being insulated therefrom by an intermediate insulating layer, the electrodes of the third group being electrically insulated also from the electrodes of the second group; wherein said gaps between the electrodes of the first group, the base portions and the projecting portions of the electrodes of the second and third groups have such dimensions that in the electrode system windows are formed at the area of which the surface of the semiconductor body is left free from material forming the electrode system, whereby radiation and more paticularly short-wave light can easily penetrate through the windows into the semiconductor body to produce therein charge carriers.

Claim 12

A charge coupled image sensor device of the frame transfer type comprising a semiconductor body in which at a major surface a plurality of mutually separated substantially parallel charge transfer channels are defined, forming an image section for collecting a radiation image and converting it into electrical signals, and a storage section in which said electrical signals after one integration period may be transferred and stored in behalf of read-out, wherein the image section comprises an electrode system comprising: a first group of electrodes which extend in a direction transverse to the plurality of charge transfer channels, and are located at a distance from each other, thus defining a gap therebetween; a second group of electrodes, filling alternately gaps between the electrodes of the first group, each electrode of the second group having a base portion extending in a direction transverse to the plurality of charge transfer channels, and projecting portions extending from the base portion above and parallel to the charge transfer channels, each projecting portion extending substantially above the whole width of the associated charge transfer channel, said base portion together with said projecting portions extending over the whole gap between adjacent electrodes of the first group, overlapping these electrodes, and being insulated therefrom by an intermediate insulating layer; a third group of electrodes filling the remaining gaps between the electrodes of the first group, each electrode of the third group having a base portion extending in a direction transverse to the plurality of charge transfer channels, and projecting portions extending from the base portion above and parallel to the charge transfer channels, each projecting portion extending substantially above the whole width of the associated charge transfer channel, said base portion together with said projecting portions extending over the whole gap between adjacent electrodes of the first group, overlapping these electrodes and being insulated therefrom by an intermediate insulating layer, the electrodes of the third group being electrically insulated also from the electrodes of the second group; wherein said gaps between the electrodes of the first group, the base portions and the projecting portions of the electrodes of the second and third groups have such dimensions that in the electrode system windows are formed at the area of which the surface of the semiconductor body is left free from material forming the electrode system, whereby radiation and more paticularly short-wave light can easily penetrate through the windows into the semiconductor body to produce therein charge carriers.