US5334273A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer bonding using trapped oxidizing vapor
Assignee: Intersil Corp
•
Filing: 1993-10-14
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Granted: 1994-08-02
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Expires: 2013-10-14
Abstract
Abstract A bonding method including pressing a pair of slices together with a liquid oxidant therebetween and subjecting the pair of slices to a temperature to bond the slices together. Preferably a liquid oxidant is applied to one of the slices before they are pressed together and then dried. The heating step for bonding is carried out at a sufficiently high temperature of at least 1100° C. to make the slices pliable so as to comply with each other during the bonding step.
Inventors
- 👤 John P. Short
- 👤 Craig J. McLachlan
- 👤 George V. Rouse
- 👤 James R. Zibrida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:34
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/10; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10W10/061; H10W10/181; Y; Y10; Y10S; Y10S148/00; Y10S148/135
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
37 words
A method of forming bonded wafers from two slices comprising: pressing a pair of slices together at bonding surfaces with a predetermined quantity of oxidant therebetween; and heating said pair of slices to bond said slices together.
Claim 2
Independent Claim
37 words
A method of forming bonded wafers from two slices comprising: pressing a pair of slices together at bonding surfaces with a predetermined quantity of oxidant therebetween; and heating said pair of slices to bond said slices together.
Claim 3
Dependent Claim
11 words
A method according to claim 1, wherein said oxidant is water.
Claim 4
Dependent Claim
25 words
A method according to claim 2 including treating said bonding surfaces of said slices with an acid to produce hydroxyl groups before applying said oxidant.
Claim 5
Dependent Claim
17 words
A method according to claim 1, wherein said oxidant is a mixture of water and hydrogen peroxide.
Claim 6
Dependent Claim
29 words
A method according to claim 1 including applying between 0.8 to 8.0 microliters per square inch of oxidant to a bonding surface of one of said slices before pressing.
Claim 7
Dependent Claim
15 words
A method according to claim 1 including drying said pressed pair of slices before heating.
Claim 8
Dependent Claim
14 words
A method according to claim 6 wherein said drying is performed in pure oxygen.
Claim 9
Dependent Claim
14 words
A method according to claim 6 wherein said drying is performed at room temperature.
Claim 10
Dependent Claim
25 words
A method according to claim 6 wherein said drying is performed until the predetermined quantity of oxidant has partially evaporated from between said bonding surface.
Claim 11
Dependent Claim
15 words
A method according to claim 1 wherein said heating is performed in an oxidizing atmosphere.
Claim 12
Dependent Claim
19 words
A method according to claim 1 wherein said heating is performed at a temperature of at least 1100° C.
Claim 13
Dependent Claim
36 words
A method according to claim 1 wherein one of said bonding surface of one of said slices is an oxidized surface and said bonding surface of the other slice is substantially non-oxidized prior to pressing together.
Claim 14
Independent Claim
67 words
A method of forming a bonded wafer from a pair of slices comprising: applying a predetermined quantity of oxidant to a bonding surface of one of said slices; pressing said pair of slices together at said bonding surface with said oxidant therebetween; and heating said pair of slices at a temperature sufficient to make the slices pliable and for a sufficient time to bond the slices together.
Claim 15
Independent Claim
67 words
A method of forming a bonded wafer from a pair of slices comprising: applying a predetermined quantity of oxidant to a bonding surface of one of said slices; pressing said pair of slices together at said bonding surface with said oxidant therebetween; and heating said pair of slices at a temperature sufficient to make the slices pliable and for a sufficient time to bond the slices together.
Claim 16
Dependent Claim
10 words
A method according to claim 13, wherein said oxidant water.
Claim 17
Dependent Claim
25 words
A method according to claim 13 including treating said bonding surfaces of said slices with an acid to produce hydroxyl groups before applying said oxidant.
Claim 18
Dependent Claim
17 words
A method according to claim 13, wherein said oxidant is a mixture of water and hydrogen peroxide.
Claim 19
Dependent Claim
29 words
A method according to claim 13 including applying between 0.8 to 8.0 microliters per square inch of oxidant to a bonding surface of one of said slices before pressing.
Claim 20
Dependent Claim
15 words
A method according to claim 13 including drying said pressed pair of slices before heating.
Claim 21
Dependent Claim
14 words
A method according to claim 18 wherein said drying is performed in pure oxygen.
Claim 22
Dependent Claim
14 words
A method according to claim 18 wherein said drying is performed at room temperature.
Claim 23
Dependent Claim
15 words
A method according to claim 13 wherein said heating is performed in an oxidizing atmosphere.
Claim 24
Dependent Claim
19 words
A method according to claim 13 wherein said heating is performed at a temperature of at least 1100° C.
Claim 25
Dependent Claim
36 words
A method according to claim 13 wherein one of said bonding surface of one of said slices is an oxidized surface and said bonding surface of the other slice is substantially non-oxidized prior to pressing together.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-01 | 1998-01-31 | 1998-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-01 | 2002-01-31 | 2002-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-01 | 2006-01-31 | 2006-08-02 | $7700.00 | Window Closed / Lapsed |