US5332650A
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Radiation-sensitive composition
Assignee: G T ENTERPRISES Ltd
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Filing: 1992-09-04
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Granted: 1994-07-26
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Expires: 2012-09-04
Abstract
Abstract A radiation-sensitive composition comprising (A) a polymer having a recurring unit represented by formula (1): ##STR1## wherein R 1 represents a substituted methyl group, a substituted ethyl group, a silyl group, a germyl group or an alkoxycarbonyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a hydrogen atom, a straight-chain alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, a substituted methyl group, a substituted ethyl group, a silyl group, a germyl group or an alkoxycarbonyl group, and R 4 and R 5 which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid forming agent. Said radiation-sensitive composition can be suitably used as a resist composition which enables reliable fine processing, which has high sensitivity and high resolution degree, and which is superior in dry etching resistance, developability, adhesiveness, heat resistance and yield of residual film thickness.
Inventors
- 👤 Makoto Murata
- 👤 Mikio Yamachika
- 👤 Yoshiji Yumoto
- 👤 Takao Miura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 13:49
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/04; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111; Y10S430/114; Y10S430/12; Y10S430/121; Y10S430/122; Y10S430/126
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
120 words
A radiation-sensitive composition comprising (A) a polymer having a recurring unit represented by formula (1): ##STR21## wherein R 1 represents a silyl group selected from the group consisting of a trimethylsilyl group, a triethylsilyl group, a tert-butyldimethylsilyl group, an isopropyldimethylsilyl group and a phenyldimethylsilyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a silyl group selected from the group consisting of a trimethylsilyl group, a triethylsilyl group, a tert-butylsilyl group, an isopropyldimethylsilyl group and a phenyldimethylsilyl group, and R 4 and R 5 , which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.
Claim 2
Dependent Claim
120 words
A radiation-sensitive composition comprising (A) a polymer having a recurring unit represented by formula (1): ##STR21## wherein R 1 represents a silyl group selected from the group consisting of a trimethylsilyl group, a triethylsilyl group, a tert-butyldimethylsilyl group, an isopropyldimethylsilyl group and a phenyldimethylsilyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a silyl group selected from the group consisting of a trimethylsilyl group, a triethylsilyl group, a tert-butylsilyl group, an isopropyldimethylsilyl group and a phenyldimethylsilyl group, and R 4 and R 5 , which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.
Claim 3
Dependent Claim
120 words
A radiation-sensitive composition comprising (A) a polymer having a recurring unit represented by formula (1): ##STR22## wherein R 1 represents a germyl group selected from the group consisting of a trimethylgermyl group, a triethylgermyl group, a tert-butyldimethylgermyl group, an isopropyldimethylgermyl group and a phenyldimethylgermyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a germyl group selected from the group consisting of a trimethylgermyl group, a triethylgermyl group, a tert-butyldimethylgermyl group, an isopropyldimethylgermyl group and a phenyldimethylgermyl group, and R 4 and R 5 , which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.
Claim 4
Dependent Claim
120 words
A radiation-sensitive composition comprising (A) a polymer having a recurring unit represented by formula (1): ##STR22## wherein R 1 represents a germyl group selected from the group consisting of a trimethylgermyl group, a triethylgermyl group, a tert-butyldimethylgermyl group, an isopropyldimethylgermyl group and a phenyldimethylgermyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a germyl group selected from the group consisting of a trimethylgermyl group, a triethylgermyl group, a tert-butyldimethylgermyl group, an isopropyldimethylgermyl group and a phenyldimethylgermyl group, and R 4 and R 5 , which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.
Claim 5
Dependent Claim
122 words
A radiation-sensitive composition comprising (A) a polymer consisting only of a recurring unit represented by formula (1): ##STR23## wherein R 1 represents a substituted methyl group, a substituted ethyl group, a silyl group, a germyl group or an alkoxycarbonyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a hydrogen atom, a straight-chain alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, a substituted methyl group, a substituted ethyl group, a silyl group or an alkoxycarbonyl group, and R 4 and R 5 , which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.
Claim 6
Dependent Claim
122 words
A radiation-sensitive composition comprising (A) a polymer consisting only of a recurring unit represented by formula (1): ##STR23## wherein R 1 represents a substituted methyl group, a substituted ethyl group, a silyl group, a germyl group or an alkoxycarbonyl group, and R 2 represents --OR 3 or --NR 4 R 5 in which R 3 is a hydrogen atom, a straight-chain alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, a substituted methyl group, a substituted ethyl group, a silyl group or an alkoxycarbonyl group, and R 4 and R 5 , which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.
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