US5068168A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Styrene/maleates terpolymers
Assignee: Hercules LLC
•
Filing: 1990-12-20
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Granted: 1991-11-26
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Expires: 2010-12-20
Abstract
Abstract Terpolymers of styrene, mono-iso-butyl maleate and mono-2-(n-butoxy)ethyl maleate wherein the ratio of styrene units to maleate units is in the range of about 1:1 to about 1.6:1 and the ratio of mono-iso-butyl maleate units to mono-2-(n-butoxy)ethyl maleate is in the range of about 3:2 to about 1:3. The terpolymers are useful as alkali soluble binders for photoresist compositions.
Inventors
- 👤 Kang I. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 19:32
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/033; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
63 words
A terpolymer of styrene, mono-isobutyl maleate and mono-2-(n-butoxy)ethyl maleate wherein the ratio of styrene units to maleate units is in the range of about 1:1 to about 1.6:1 and wherein the ratio of mono-isobutyl maleate units to mono-2-(n-butoxy)ethyl maleate units is in the range of about 3:2 to about 1:3 and wherein the weight average molecular weight is greater than about 100,000 daltons.
Claim 2
Dependent Claim
63 words
A terpolymer of styrene, mono-isobutyl maleate and mono-2-(n-butoxy)ethyl maleate wherein the ratio of styrene units to maleate units is in the range of about 1:1 to about 1.6:1 and wherein the ratio of mono-isobutyl maleate units to mono-2-(n-butoxy)ethyl maleate units is in the range of about 3:2 to about 1:3 and wherein the weight average molecular weight is greater than about 100,000 daltons.
Claim 3
Dependent Claim
46 words
The terpolymer of claim 1 wherein the ratio of styrene units to maleate units is in the range of about 1.1:1 to about 1.3:1 and wherein the ratio of mono-isobutyl maleate units to mono-2-(nbutoxy)ethyl maleate units is in the range of about 5.5:4.5 to about 3.3:6.7.
Claim 4
Dependent Claim
32 words
The terpolymer of claim 1 wherein the ratio of styrene units to maleate units is about 1.2 and the ratio of mono-isobutyl maleate units to mono-2-(n-butoxy) ethyl maleate units is about 1:1.
Claim 5
Dependent Claim
27 words
A photoresist composition comprising either a photochemically active agent or photochemically active monomer, oligomer or polymer and the terpolymer of claim 1 as an alkali soluble binder.
Claim 6
Dependent Claim
27 words
A photoresist composition comprising either a photochemically active agent or photochemically active monomer, oligomer or polymer and the terpolymer of claim 2 as an alkali soluble binder.
Claim 7
Dependent Claim
27 words
A photoresist composition comprising either a photochemically active agent or photochemically active monomer, oligomer or polymer and the terpolymer of claim 3 as an alkali soluble binder.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-25 | 1995-05-27 | 1995-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-25 | 1999-05-27 | 1999-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-25 | 2003-05-27 | 2003-11-26 | $7700.00 | Window Closed / Lapsed |