US5331852A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electromagnetic rebalanced micromechanical transducer
Assignee: Charles Stark Draper Laboratory Inc
•
Filing: 1991-12-16
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Granted: 1994-07-26
•
Expires: 2011-12-16
Abstract
Abstract A method and apparatus for electromagnetically rebalancing a micromechanical transducer via a plurality of current carrying electrodes disposed beneath or above the transducer interacting with a current carrying conductor disposed on the transducer. In a first embodiment, the micromechanical transducer comprises a micromechanical accelerometer having electromagnetic rebalance of an asymmetric plate. In an alternative embodiment, the transducer comprises a micromechanical gyroscope having electromagnetic driving of an outer gimbal and electromagnetic rebalance of a sense gimbal.
Inventors
- 👤 Paul Greiff
- 👤 Burton Boxenhorn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 05:32
CPC Classifications
G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719; G01P; G01P15/00; G01P15/02; G01P15/08; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0831
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
122 words
A micromechanical transducer formed from a mass of semiconductor material, comprising: a displaceable transducer element having at least one planar surface; a current carrying conductor disposed on said at least one planar surface; a plurality of electrodes integral to said mass of semiconductor material and disposed proximate to said displaceable transducer element and proximate to said current carrying conductor; and at least one current generator providing a fixed current through said current carrying conductor, a first electrode current through one of said plurality of electrodes, and a second electrode current through another of said plurality of electrodes, magnetic fields formed by said first electrode current, said second electrode current and said fixed current, interacting to produce motion of said displaceable transducer element.
Claim 2
Dependent Claim
122 words
A micromechanical transducer formed from a mass of semiconductor material, comprising: a displaceable transducer element having at least one planar surface; a current carrying conductor disposed on said at least one planar surface; a plurality of electrodes integral to said mass of semiconductor material and disposed proximate to said displaceable transducer element and proximate to said current carrying conductor; and at least one current generator providing a fixed current through said current carrying conductor, a first electrode current through one of said plurality of electrodes, and a second electrode current through another of said plurality of electrodes, magnetic fields formed by said first electrode current, said second electrode current and said fixed current, interacting to produce motion of said displaceable transducer element.
Claim 3
Dependent Claim
16 words
The micromechanical transducer of claim 1 wherein said displaceable transducer element is selectively etched from silicon.
Claim 4
Dependent Claim
21 words
The micromechanical transducer of claim 1 wherein said displaceable transducer element and said plurality of electrodes are constructed in monolithic silicon.
Claim 5
Dependent Claim
44 words
The micromechanical transducer of claim 1 wherein said plurality of electrodes are P-type doped silicon electrodes integral to a monolithic mass of N-type silicon from which said displaceable transducer element is selectively etched and said plurality of electrodes are disposed beneath said transducer element.
Claim 6
Dependent Claim
35 words
The micromechanical transducer of claim 1 wherein said displaceable transducer is a substantially rectangular planar element fabricated from a mass of silicon and flexibly attached to said mass of silicon by a plurality of linkages.
Claim 7
Dependent Claim
24 words
The micromechanical transducer of claim 5 wherein said plurality of linkages comprises two flexures having a slot forming a tension relief beam proximate thereto.
Claim 8
Dependent Claim
26 words
The micromechanical transducer of claim 5 wherein said plurality of flexible linkages comprises two linkages between said mass of silicon and said substantially rectangular planar element.
Claim 9
Dependent Claim
54 words
The micromechanical transducer of claim 1 wherein said current carrying conductor comprises a first branch and a second branch, and wherein said first electric current flows through each of said first and second branch and said second and third electric currents flow through a first and a second one of said plurality of electrodes.
Claim 10
Dependent Claim
16 words
The micromechanical transducer of claim 8 wherein said first electric current is a fixed direct current.
Claim 11
Dependent Claim
26 words
The micromechanical transducer of claim 1 wherein said displaceable transducer element is an asymmetric plate flexibly attached to a frame by at least one flexible linkage.
Claim 12
Dependent Claim
28 words
The micromechanical transducer of claim 10 wherein said asymmetric plate has a first end and a second end and said first end is longer than said second end.
Claim 13
Dependent Claim
54 words
The micromechanical transducer of claim 11 wherein said first end comprises a layer of polysilicon disposed on an insulating layer which is disposed on said displaceable transducer element, said polysilicon layer serving to shift a center of gravity of said displaceable transducer element upwardly to decrease cross axis sensitivity of said displaceable transducer element.
Claim 14
Dependent Claim
31 words
The micromechanical transducer of claim 10 wherein said asymmetric plate has a first end and a second end of substantially equal length and said first end has a mass disposed thereon.
Claim 15
Dependent Claim
35 words
The micromechanical transducer of claim 1 wherein said displaceable transducer element is a gyroscopic transducer which comprises an outer gimbal flexibly attached to a frame and an inner gimbal flexibly attached to said outer gimbal.
Claim 16
Dependent Claim
17 words
The micromechanical transducer of claim 14 wherein said current carrying conductor is disposed on said outer gimbal.
Claim 17
Dependent Claim
17 words
The micromechanical transducer of claim 14 wherein said current carrying conductor is disposed on said inner gimbal.
Claim 18
Dependent Claim
15 words
The micromechanical transducer of claim 1 wherein said current carrying conductor is a coil configuration.
Claim 19
Dependent Claim
23 words
The micromechanical transducer of claim 1 wherein said plurality of electrodes comprises at least two bridge electrodes disposed above said displaceable transducer element.
Claim 20
Dependent Claim
23 words
The micromechanical transducer of claim 1 wherein said plurality of electrodes includes at least two buried electrodes disposed beneath said displaceable transducer element.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-25 | 1998-01-24 | 1998-07-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-25 | 2002-01-24 | 2002-07-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-25 | 2006-01-24 | 2006-07-26 | $7700.00 | Window Closed / Lapsed |