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US5328872A
Expired / Lapsed
US
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Method of integrated circuit manufacturing using deposited oxide
Assignee: Nokia Bell Labs
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Filing: 1989-12-29
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Granted: 1994-07-12
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Expires: 2009-12-29
Abstract
Abstract Contamination of LPCVDBP TEOS films is reduced by preventing volatile compounds, resulting from reactions of the residue in the outlet of the furnace from reaching the deposition portion of the furnace where they would otherwise react with the deposition gases to produce chemically generated particles which contaminate the dielectric film.
Inventors
- 👤 Ajit S. Manocha
- 👤 Virendra V. S. Rana
- 👤 James F. Roberts
- 👤 Ankineedu Velaga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 11:54
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/4412
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
64 words
A method of integrated circuit manufacture comprising the step of depositing a dielectric on wafers in a furnace by chemical vapor deposition, said dielectric comprising BPTEOS, comprising the further step of preventing the deposition of unwanted chemically generated particles on said dielectric in the deposition furnace, said preventing is by using a load locked chamber when wafers are loaded or unloaded from the furnace.
Claim 2
Independent Claim
64 words
A method of integrated circuit manufacture comprising the step of depositing a dielectric on wafers in a furnace by chemical vapor deposition, said dielectric comprising BPTEOS, comprising the further step of preventing the deposition of unwanted chemically generated particles on said dielectric in the deposition furnace, said preventing is by using a load locked chamber when wafers are loaded or unloaded from the furnace.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-11 | 1998-01-10 | 1998-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-11 | 2002-01-10 | 2002-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-11 | 2006-01-10 | 2006-07-12 | $7700.00 | Window Closed / Lapsed |