US5328555A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reducing particulate contamination during semiconductor device processing
Assignee: Applied Materials Inc
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Filing: 1992-11-24
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Granted: 1994-07-12
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Expires: 2012-11-24
Abstract
Abstract A process of removing particles from the surface of a substrate to be processed in a vacuum chamber comprising forming a plasma from an inert plasma precursor gas in said chamber, thereby lifting loosely adhered particles from the surface of the substrate, and increasing the flow of said inert gas without increasing the pressure in the vacuum chamber, thereby sweeping the particles beyond the surface of the substrate, where they can be removed by the vacuum chamber exhaust system. Particles having a particle size of about 0.1 micron or larger can be removed in this fashion.
Inventors
- 👤 Anand Gupta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:51
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/10; H10P70/12; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
68 words
A method of removing particles from the surface of a substrate to be processed in a vacuum chamber comprising the following steps in sequence; a) lifting loosely adhered particles from the surface of said substrate by turning on a plasma from an inert plasma precursor gas, and b) increasing the flow of said inert plasma precursor gas to sweep the lifted particles beyond the surface of said substrate.
Claim 2
Independent Claim
68 words
A method of removing particles from the surface of a substrate to be processed in a vacuum chamber comprising the following steps in sequence; a) lifting loosely adhered particles from the surface of said substrate by turning on a plasma from an inert plasma precursor gas, and b) increasing the flow of said inert plasma precursor gas to sweep the lifted particles beyond the surface of said substrate.
Claim 3
Dependent Claim
12 words
A method according to claim 1 wherein said precursor gas is argon.
Claim 4
Independent Claim
21 words
A method according to claim i wherein the pressure in said vacuum chamber is maintained at about 50 millitorr or less.
Claim 5
Independent Claim
74 words
A method of removing particles from the surface of a substrate to be processed in a vacuum chamber comprising the following steps in sequence; a) lifting loosely adhered particles from the surface of said substrate by turning on a plasma from an inert plasma precursor gas, and b) increasing the flow of said insert plasma precursor gas to sweep the lifted particles beyond the surface of said substrate and repeating steps a) and b).
Claim 6
Independent Claim
74 words
A method of removing particles from the surface of a substrate to be processed in a vacuum chamber comprising the following steps in sequence; a) lifting loosely adhered particles from the surface of said substrate by turning on a plasma from an inert plasma precursor gas, and b) increasing the flow of said insert plasma precursor gas to sweep the lifted particles beyond the surface of said substrate and repeating steps a) and b).
Claim 7
Dependent Claim
17 words
A method according to claim 1 wherein the particles range in size from 0.1 micron or more.
Claim 8
Dependent Claim
27 words
A method according to claim 1 wherein the particles are lifted in an argon flow of about 25 sccm in a chamber held at 25 millitorr pressure.
Claim 9
Dependent Claim
30 words
A method according to claim 6 wherein the argon flow is increased to 50-100 sccm so that the lifted particles can be swept away from the surface of the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-11 | 1998-01-10 | 1998-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-11 | 2002-01-10 | 2002-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-11 | 2006-01-10 | 2006-07-12 | $7700.00 | Window Closed / Lapsed |