US5323535A — Electrical connecting member and method of manufa…

Claim 1

Independent Claim 199 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; developing said photosensitive resin to form a plurality of apertures in said photosensitive resin, thereby exposing said base body; leaving said photosensitive resin through which said base body has been exposed in a heated atmosphere and/or a negative pressure atmosphere for a predetermined time; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 2

Independent Claim 199 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; developing said photosensitive resin to form a plurality of apertures in said photosensitive resin, thereby exposing said base body; leaving said photosensitive resin through which said base body has been exposed in a heated atmosphere and/or a negative pressure atmosphere for a predetermined time; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 3

Dependent Claim 39 words

A method according to claim 1, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 4

Dependent Claim 23 words

A method according to claim 1, wherein a wiring pattern is formed on one or each of the surfaces of said holding member.

Claim 5

Dependent Claim 106 words

A method according to claim 1, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 .

Claim 6

Dependent Claim 56 words

A method according to claim 4, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material by the use of plating having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereto.

Claim 7

Dependent Claim 96 words

A method according to claim 1, wherein the step of filling said apertures and said recesses with said electrically conductive material is a step which satisfies at least one of the condition that plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating.

Claim 8

Independent Claim 190 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; intermittently injecting developing liquid to the surface of said photosensitive resin while rotating and/or revolving said photosensitive resin, to thereby forming a plurality of apertures through which the surface of said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 9

Independent Claim 190 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; intermittently injecting developing liquid to the surface of said photosensitive resin while rotating and/or revolving said photosensitive resin, to thereby forming a plurality of apertures through which the surface of said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 10

Dependent Claim 39 words

A method according to claim 7, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 11

Dependent Claim 23 words

A method according to claim 7, wherein a wiring pattern is formed on one or each of the surfaces of said holding member.

Claim 12

Dependent Claim 97 words

A method according to claim 7, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or less than 5 mA/cm 2 .

Claim 13

Dependent Claim 57 words

A method according to claim 10, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrical conductive material by the use of plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereof.

Claim 14

Dependent Claim 96 words

A method according to claim 7, wherein the step of filling said apertures and said recesses with said electrically conductive material is a step which satisfies at least one of the condition that plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating.

Claim 15

Independent Claim 189 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulating material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; injecting developing liquid and gas to the surface of said photosensitive resin at a time or alternately to thereby form a plurality of apertures through which the surface of said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 16

Independent Claim 189 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulating material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; injecting developing liquid and gas to the surface of said photosensitive resin at a time or alternately to thereby form a plurality of apertures through which the surface of said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 17

Dependent Claim 39 words

A method according to claim 13, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 18

Dependent Claim 23 words

A method according to claim 13, wherein a wiring pattern is formed on one or each of the surfaces of said base body.

Claim 19

Dependent Claim 106 words

A method according to claim 13, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 .

Claim 20

Dependent Claim 57 words

A method according to claim 16, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material by the use of plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereof.

Claim 21

Dependent Claim 96 words

A method according to claim 13, wherein the step of filling said apertures and said recesses with said electrically conductive material is a step which satisfies at least one of the condition that plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating.

Claim 22

Independent Claim 187 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other surface of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 23

Independent Claim 187 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other surface of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members; and removing the remaining portions of said base body.

Claim 24

Dependent Claim 26 words

A method according to claim 19, wherein said ultrasonic wave is equal to or greater than 20 KHz and equal to or less than 10 MHz.

Claim 25

Dependent Claim 39 words

A method according to claim 19, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 26

Dependent Claim 23 words

A method according to claim 19, wherein a wiring pattern is formed on one or each of the surfaces of said holding member.

Claim 27

Dependent Claim 106 words

A method according to claim 19, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 .

Claim 28

Dependent Claim 57 words

A method according to claim 23, wherein the step of filling said apertures and said recesses with said electrically conductive material is the step of electroplating said electrically conductive material by the use of plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereto.

Claim 29

Dependent Claim 96 words

A method according to claim 19, wherein the step of filling said apertures and said recesses with said electrically conductive material is a step which satisfies at least one of the condition that plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating.

Claim 30

Independent Claim 274 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 ; and removing the remaining portions of said base body.

Claim 31

Independent Claim 274 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 ; and removing the remaining portions of said base body.

Claim 32

Dependent Claim 39 words

A method according to claim 26, wherein the step of electroplating said electrically conductive material uses plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereto.

Claim 33

Dependent Claim 39 words

A method according to claim 26, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 34

Dependent Claim 23 words

A method according to claim 26, wherein a wiring pattern is formed on one or each of the surfaces of said holding member.

Claim 35

Independent Claim 264 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being a step which satisfies at least one of the condition that plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating; and removing the remaining portions of said base body.

Claim 36

Independent Claim 264 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being a step which satisfies at least one of the condition that plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating; and removing the remaining portions of said base body.

Claim 37

Dependent Claim 27 words

A method according to claim 30, wherein said exposed photosensitive resin has its surface facing downward, and the developing liquid is injected from below said photosensitive resin.

Claim 38

Dependent Claim 39 words

A method according to claim 30, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 39

Dependent Claim 23 words

A method according to claim 30, wherein a wiring pattern is formed on one or each of the surfaces of said holding member.

Claim 40

Independent Claim 299 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being the step of effecting electroplating by the use of plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereto with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to the plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 ; and removing the remaining portions of said base body.

Claim 41

Independent Claim 299 words

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of: providing photosensitive resin which provides said holding member on a base body; applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light; propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed; etching the exposed portions of said base body to thereby form recesses communicating with said apertures; filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being the step of effecting electroplating by the use of plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereto with the diameter of said apertures being equal to or greater than 10 μm and equal to or less than 150 μm, the Reynolds number of liquid flow imparted to the plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm 2 and equal to or less than 5 mA/cm 2 ; and removing the remaining portions of said base body.

Claim 42

Dependent Claim 39 words

A method according to claim 34, wherein said electrically conductive members constitute electrical connecting portions to be connected to the connecting portions of electric circuit parts, and said connecting portions and said electrical connecting portions are metallurgically connected together.

Claim 43

Dependent Claim 23 words

A method according to claim 34, wherein a wiring pattern is formed on one or each of the surfaces of said holding member.

Claim 44

Dependent Claim 97 words

A method according to claim 34, wherein the step of filling said apertures and said recesses with said electrically conductive material is a step which satisfies at least one of the condition that the plating liquid shall be at 0° C. to 40° C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1997-06-27	1997-12-27	1998-06-28	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2001-06-27	2001-12-27	2002-06-28	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2005-06-27	2005-12-27	2006-06-28	$7700.00	Window Closed / Lapsed

Electrical connecting member and method of manufacturing the same

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