EP0344720A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of producing electrical connection members
Assignee: Canon Inc
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Filing: 1989-05-30
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Granted: —
•
Expires: 2009-05-30
Abstract
Abstract A method of producing electrical connection members comprises the steps of forming a carrier (505) on a first electrically conductive member (501); forming holes (142) in predetermined portions of the carrier by exposure and etching, thereby partially exposing a surface of the first electrically conductive member in the holes; etching the portions of the first electrically conductive member which are exposed in the respective holes, thereby forming recesses (502) in the first electrically conductive member so that each of the recesses has a diameter larger than the diameter of a corresponding one of the holes; filling the respective holes formed in the carrier with second electrically conductive members (150); and eliminating the first electrically conductive member from the carrier. With this method, it is possible to easily produce electrical connection members in which electrical connecting portions can be provided in a high density and in which the reliability of electrical connection can be improved, as well as from which electrically conductive members do not easily come away.
Inventors
- 👤 Tetsuno Yoshizawa
- 👤 Yoshimi Terayama
- 👤 Hiroshi Kondo
- 👤 Takashi Sakaki
- 👤 Shunichi Haga
- 👤 Yasuteru Ichida
- 👤 Masaki Konishi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 13:28
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W70/01; H10W70/05; H10W70/095; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49204; Y10T29/49208
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
71 words
A method of producing electrical connection members, comprising the steps of: forming a carrier containing a light-sensitive resin on a first electrically conductive member; forming holes in predetermined portions of said carrier by patterning, thereby partially exposing a surface of said first electrically conductive member in said holes; filling said respective holes formed in said carrier with second electrically conductive members; and eliminating said first electrically conductive member from said carrier.
Claim 2
Independent Claim
71 words
A method of producing electrical connection members, comprising the steps of: forming a carrier containing a light-sensitive resin on a first electrically conductive member; forming holes in predetermined portions of said carrier by patterning, thereby partially exposing a surface of said first electrically conductive member in said holes; filling said respective holes formed in said carrier with second electrically conductive members; and eliminating said first electrically conductive member from said carrier.
Claim 3
Dependent Claim
60 words
A method according to claim 1, further comprising the step of etching the portions of said first electrically conductive member which are exposed in said respective holes formed in said carrier, thereby forming recesses in said first electrically conductive member so that each of said recesses has a diameter larger than the diameter of a corresponding one of said holes.
Claim 4
Dependent Claim
26 words
A method according to claim 1, further comprising the step of forming a wiring pattern on at least one of the opposite surfaces of said carrier.
Claim 5
Dependent Claim
30 words
A method according to claim 1, wherein each of said second electrically conductive members is formed to have a bump-like configuration which projects above a corresponding surface of said carrier.
Claim 6
Dependent Claim
41 words
A method according to claim 2, wherein said second electrically conductive members are filled into said respective recesses formed in said first electrically conductive member, thereby forming bumps which have protruding configurations and which constitute part of an electrical connection member.
Claim 7
Dependent Claim
69 words
A method according to claim 1, wherein said second electrically conductive members which are exposed at said carrier constitute electrical connecting portions to be connected to respective connecting portions of an electrical circuit part, said connecting portions being connected to said respective electrical connecting portions by means of a metal and/or a metallic alloy formed by fusing the contacting surfaces of said connecting portions and said electrical connecting portions.
Claim 8
Dependent Claim
69 words
A method according to claim 1, wherein said second electrically conductive members which are exposed at said carrier constitute electrical connecting portions which are to be connected to respective connecting portions of an electrical circuit member constituting a probe card, as well as electrical connecting portions which are used to measure the electrical characteristics of a member to be measured in contact with respective connecting portions of said member.
Claim 9
Dependent Claim
26 words
A method according to claim 1, wherein the formation of said metal and/or said metallic alloy by fusion is conducted with internal heating and/or external heating.
Claim 10
Independent Claim
118 words
A method of producing electrical connection members, comprising the steps of: forming a carrier on a first electrically conductive member; forming holes in predetermined portions of said carrier by exposure and etching, thereby partially exposing a surface of said first electrically conductive member in said holes; etching the portions of said first electrically conductive member which are exposed in said respective holes formed in said carrier, thereby forming recesses in said first electrically conductive member so that each of said recesses has a diameter larger than the diameter of a corresponding one of said holes; filling said respective holes formed in said carrier with second electrically conductive members; and eliminating said first electrically conductive member from said carrier.
Claim 11
Independent Claim
118 words
A method of producing electrical connection members, comprising the steps of: forming a carrier on a first electrically conductive member; forming holes in predetermined portions of said carrier by exposure and etching, thereby partially exposing a surface of said first electrically conductive member in said holes; etching the portions of said first electrically conductive member which are exposed in said respective holes formed in said carrier, thereby forming recesses in said first electrically conductive member so that each of said recesses has a diameter larger than the diameter of a corresponding one of said holes; filling said respective holes formed in said carrier with second electrically conductive members; and eliminating said first electrically conductive member from said carrier.
Claim 12
Dependent Claim
26 words
A method according to claim 9, wherein said carrier is made of a material which contains a resin which varies in hardness when illuminated with light.
Claim 13
Dependent Claim
26 words
A method according to claim 9, further comprising the step of forming a wiring pattern on at least one of the opposite surfaces of said carrier.
Claim 14
Dependent Claim
30 words
A method according to claim 9, wherein each of said second electrically conductive members is formed to have a bump-like configuration which projects above a corresponding surface of said carrier.
Claim 15
Dependent Claim
41 words
A method according to claim 9, wherein said second electrically conductive members are filled into said respective recesses formed in said first electrically conductive member, thereby forming bumps which have protruding configurations and which constitute part of an electrical connection member.
Claim 16
Dependent Claim
69 words
A method according to claim 9, wherein said second electrically conductive members which are exposed at said carrier constitute electrical connecting portions to be connected to respective connecting portions of an electrical circuit part, said connecting portions being connected to said respective electrical connecting portions by means of a metal and/or a metallic alloy formed by fusing the contacting surfaces of said connecting portions and said electrical connecting portions.
Claim 17
Dependent Claim
69 words
A method according to claim 9, wherein said second electrically conductive members which are exposed at said carrier constitute electrical connecting portions which are to be connected to respective connecting portions of an electrical circuit member constituting a probe card, as well as electrical connecting portions which are used to measure the electrical characteristics of a member to be measured in contact with respective connecting portions of said member.
Claim 18
Dependent Claim
26 words
A method according to claim 14, wherein the formation of said metal and/or said metallic alloy by fusion is conducted with internal heating and/or external heating.
Claim 19
Independent Claim
145 words
A method of producing electrical connection members, comprising the steps of: a) forming a first carrier containing a light-sensitive resin on a first electrically conductive member; b) forming holes in predetermined portions of said first carrier by patterning, thereby partially exposing a surface of said first electrically conductive member in said holes; c) filling said respective holes formed in said first carrier with second electrically conductive members; d) forming a second carrier containing a light-sensitive resin on said first electrically conductive member having said holes filled with said second electrically conductive members; e) forming holes in predetermined portions of said second carrier by patterning, thereby partially exposing a surface of said second electrically conductive member in said holes; f) filling said respective holes formed in said second carrier with third electrically conductive members; and g) eliminating said first electrically conductive member from said first carrier.
Claim 20
Independent Claim
145 words
A method of producing electrical connection members, comprising the steps of: a) forming a first carrier containing a light-sensitive resin on a first electrically conductive member; b) forming holes in predetermined portions of said first carrier by patterning, thereby partially exposing a surface of said first electrically conductive member in said holes; c) filling said respective holes formed in said first carrier with second electrically conductive members; d) forming a second carrier containing a light-sensitive resin on said first electrically conductive member having said holes filled with said second electrically conductive members; e) forming holes in predetermined portions of said second carrier by patterning, thereby partially exposing a surface of said second electrically conductive member in said holes; f) filling said respective holes formed in said second carrier with third electrically conductive members; and g) eliminating said first electrically conductive member from said first carrier.
Claim 21
Dependent Claim
61 words
A method according to claim 17, further comprising the step of etching the portions of said first electrically conductive member which are exposed in said respective holes formed in said first carrier, thereby forming recesses in said first electrically conductive member so that each of said recesses has a diameter larger than the diameter of a corresponding one of said holes.
Claim 22
Dependent Claim
38 words
A method according to claim 17, further comprising the step of forming a wiring pattern on the surface of said first carrier and/or said second electrically conductive member which is not provided with said first electrically conductive member.
Claim 23
Dependent Claim
42 words
A method according to claim 17, wherein each of said second electrically conductive members and third electrically conductive members is formed to have a bump-like configuration which projects above a corresponding surface of a carrier composed of said first and second carriers.
Claim 24
Dependent Claim
41 words
A method according to claim 18, wherein said second electrically conductive members are filled into said respective recesses formed in said first electrically conductive member, thereby forming bumps which have protruding configurations and which constitute part of an electrical connection member.
Claim 25
Dependent Claim
95 words
A method according to claim 17, wherein said second electrically conductive members which are exposed at one surface of said carrier composed of said first and second carriers and said third electrically conductive members which are exposed at the other surface of said carrier constitute electrical connecting portions to be connected to respective connecting portions of an electrical circuit part, said connecting portions being connected to said respective electrical connecting portions by means of a metal and/or a metallic alloy formed by fusing the contacting surfaces of said connecting portions and said electrical connecting portions.
Claim 26
Dependent Claim
93 words
A method according to claim 17, wherein said third electrically conductive members which are exposed at one surface of a carrier composed of said first and second carriers constitute electrical connecting portions which are to be connected to respective connecting portions of an electrical circuit member constituting a probe card, while said second electrically conductive members which are exposed at said other surface of said carrier constitute electrical connecting portions which are used to measure the electrical characteristics of a member to be measured in contact with respective connecting portions of said member.
Claim 27
Dependent Claim
26 words
A method according to claim 22, wherein the formation of said metal and/or said metallic alloy by fusion is conducted with internal heating and/or external heating.
Claim 28
Dependent Claim
18 words
A method according to claim 17, wherein said step d), e), and f) are performed at least once.
Claim 29
Independent Claim
190 words
A method of producing electrical connection members, comprising the steps of: I) forming a first carrier on a first electrically conductive member; II) forming holes in predetermined portions of said first carrier by patterning, thereby partially exposing a surface of said first electrically conductive member in said holes; III) etching the portions of said first electrically conductive member which are exposed in said respective holes formed in said carrier, thereby forming recesses in said first electrically conductive member so that each of said recesses has a diameter larger than the diameter of a corresponding one of said holes; IV) filling said respective holes formed in said first carrier with second electrically conductive members; V) forming a second carrier containing a light-sensitive resin on said first electrically conductive member having said holes filled with said second electrically conductive members; VI) forming holes in predetermined portions of said second carrier by patterning, thereby partially exposing a surface of said second electrically conductive member in said holes; VII) filling said respective holes formed in said second carrier with third electrically conductive members; VIII) eliminating said first electrically conductive member from said first carrier.
Claim 30
Independent Claim
190 words
A method of producing electrical connection members, comprising the steps of: I) forming a first carrier on a first electrically conductive member; II) forming holes in predetermined portions of said first carrier by patterning, thereby partially exposing a surface of said first electrically conductive member in said holes; III) etching the portions of said first electrically conductive member which are exposed in said respective holes formed in said carrier, thereby forming recesses in said first electrically conductive member so that each of said recesses has a diameter larger than the diameter of a corresponding one of said holes; IV) filling said respective holes formed in said first carrier with second electrically conductive members; V) forming a second carrier containing a light-sensitive resin on said first electrically conductive member having said holes filled with said second electrically conductive members; VI) forming holes in predetermined portions of said second carrier by patterning, thereby partially exposing a surface of said second electrically conductive member in said holes; VII) filling said respective holes formed in said second carrier with third electrically conductive members; VIII) eliminating said first electrically conductive member from said first carrier.
Claim 31
Dependent Claim
26 words
A method according to claim 26, wherein said carrier is made of a material which contains a resin which varies in hardness when illuminated with light.
Claim 32
Dependent Claim
38 words
A method according to claim 26, further comprising the step of forming a wiring pattern on the surface of said first carrier and/or said second electrically conductive member which is not provided with said first electrically conductive member.
Claim 33
Dependent Claim
42 words
A method according to claim 26, wherein each of said second electrically conductive members and third electrically conductive members is formed to have a bump-like configuration which projects above a corresponding surface of a carrier composed of said first and second carriers.
Claim 34
Dependent Claim
41 words
A method according to claim 26, wherein said second electrically conductive members are filled into said respective recesses formed in said first electrically conductive member, thereby forming bumps which have protruding configurations and which constitute part of an electrical connection member.
Claim 35
Dependent Claim
95 words
A method according to claim 26, wherein said second electrically conductive members which are exposed at one surface of said carrier composed of said first and second carriers and said third electrically conductive members which are exposed at the other surface of said carrier constitute electrical connecting portions to be connected to respective connecting portions of an electrical circuit part, said connecting portions being connected to said respective electrical connecting portions by means of a metal and/or a metallic alloy formed by fusing the contacting surfaces of said connecting portions and said electrical connecting portions.
Claim 36
Dependent Claim
93 words
A method according to claim 26, wherein said third electrically conductive members which are exposed at one surface of a carrier composed of said first and second carriers constitute electrical connecting portions which are to be connected to respective connecting portions of an electrical circuit member constituting a probe card, while said second electrically conductive members which are exposed at said other surface of said carrier constitute electrical connecting portions which are used to measure the electrical characteristics of a member to be measured in contact with respective connecting portions of said member.
Claim 37
Dependent Claim
26 words
A method according to claim 31, wherein the formation of said metal and/or said metallic alloy by fusion is conducted with internal heating and/or external heating.
Claim 38
Dependent Claim
18 words
A method according to claim 26, wherein said steps V), VI), and VII) are performed at least once.
References Cited (Backward Citations)
No citation records indexed.
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