Patent US5321977A successfully refreshed from Google Patents.
US5321977A
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Integrated tip strain sensor for use in combination with a single axis atomic force microscope
Assignee: GlobalFoundries Inc
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Filing: 1992-12-31
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Granted: 1994-06-21
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Expires: 2012-12-31
Abstract
Abstract An integrated tip strain sensor is combination with a single axis atomic force microscope (AFM) for determining the profile of a surface in three dimensions. A cantilever beam carries an integrated tip stem on which is deposited a piezoelectric film strain sensor. A high-resolution direct electron beam (e-beam) deposition process is used to grow a sharp tip onto the silicon (Si) cantilever structure. The direct e-beam deposition process permits the controllable fabrication of high-aspect ratio, nanometer-scale tip structures. A piezoelectric jacket with four superimposed elements is deposited on the tip stem. The piezoelectric sensors function in a plane perpendicular to that of a probe in the AFM; that is, any tip contact with the linewidth surface will cause tip deflection with a corresponding proportional electrical signal output. This tip strain sensor, coupled to a standard single axis AFM tip, allows for three-dimensional metrology with a much simpler approach while avoiding catastrophic tip "crashes". Two-dimensional edge detection of the sidewalls is used to calculate the absolute value or the linewidth of overlay, independent of the AFM principle. The technique works on any linewidth surface material, whether conductive, non-conductive or semiconductive.
Inventors
- 👤 Joachim Clabes
- 👤 Henri A. Khoury
- 👤 Laszlo Landstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:22
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/24; G01Q60/38; B; B82; B82Y; B82Y35/00; G01B; G01B7/00; G01B7/004; G01B7/008; G01B7/012; G01Q20/00; G01Q20/04; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/852; Y10S977/86; Y10S977/875; Y10S977/878
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
123 words
An integrated tip strain sensor in combination with an atomic force microscope (AFM) for profiling a surface in three dimensions comprising: a cantilever beam carrying a tip stem having a tip, said tip stem being an integrated tip stem; a piezoelectric film strain sensor on said integrated tip stem for sensing strain; and control means for selectively vibrating said cantilever in a first direction, said piezoelectric film strain sensor producing electrical signals in response to deflections of said tip due to contact of said tip with a surface feature, wherein said piezoelectric film strain sensor comprises a plurality of portions about said tip stem and means electrically connected to each of said portions for providing a feedback control signal to said control means.
Claim 2
Dependent Claim
123 words
An integrated tip strain sensor in combination with an atomic force microscope (AFM) for profiling a surface in three dimensions comprising: a cantilever beam carrying a tip stem having a tip, said tip stem being an integrated tip stem; a piezoelectric film strain sensor on said integrated tip stem for sensing strain; and control means for selectively vibrating said cantilever in a first direction, said piezoelectric film strain sensor producing electrical signals in response to deflections of said tip due to contact of said tip with a surface feature, wherein said piezoelectric film strain sensor comprises a plurality of portions about said tip stem and means electrically connected to each of said portions for providing a feedback control signal to said control means.
Claim 3
Dependent Claim
24 words
The integrated tip strain sensor as recited in claim 1 wherein said piezoelectric film strain sensor comprises four quadrant portions about said tip stem.
Claim 4
Dependent Claim
40 words
The integrated tip strain sensor as recited in claim 2 wherein said cantilever beam and tip stem are made of silicon and a high-resolution direct electron beam (e-beam) deposition process is used to grow said tip onto said tip stem.
Claim 5
Dependent Claim
25 words
An integrated tip strain sensor as recited in claim 1, wherein said atomic force microscope comprises an atomic force microscope having at least one axis.
Claim 6
Dependent Claim
86 words
An integrated tip strain sensor as recited in claim 1, wherein said control means includes means for vibrating said cantilever in a z direction, said AFM including means for detecting cantilever vibrations to measure a distance in said z direction to a first surface feature, said control means thereafter stopping cantilever vibrations and relatively moving said tip with respect to said surface, said piezoelectric film strain sensor including means for producing electrical signals in response to deflections of said tip due to a second surface feature.
Claim 7
Dependent Claim
56 words
The integrated tip strain sensor recited in claim 5 wherein said control means includes threshold means for comparing said electrical signals generated by said piezoelectric film strain sensor in response to deflections of said tip, said threshold means stopping relative movement of said tip with respect to said surface to avoid a "crash" of said tip.
Claim 8
Dependent Claim
35 words
An integrated tip strain sensor as recited in claim 5, wherein said means for producing electrical signals includes metallized contacts electrically connected to each of said plurality of portions of said piezoelectric film strain sensor.
Claim 9
Dependent Claim
26 words
An integrated tip strain sensor as recited in claim 7, wherein said metallized contacts include means for providing a feedback control signal to said control means.
Claim 10
Dependent Claim
117 words
A probe for a metrology tool for measuring critical dimensions in a sample comprising: a tip stem on which is grown a tip, said tip stem being an integrated tip stem, wherein said integrated tip stem includes a piezoelectric film strain sensor, said piezoelectric film strain sensor having a plurality of portions and including means for generating electrical signals in response to respective deflections of said plurality of portions; control means for moving said tip with respect to said surface; and feedback means including said control means responsive to said electrical signals generated in response to said respective deflections of said plurality of portions of said piezoelectric film strain sensor for controlling the movement of said tip.
Claim 11
Dependent Claim
117 words
A probe for a metrology tool for measuring critical dimensions in a sample comprising: a tip stem on which is grown a tip, said tip stem being an integrated tip stem, wherein said integrated tip stem includes a piezoelectric film strain sensor, said piezoelectric film strain sensor having a plurality of portions and including means for generating electrical signals in response to respective deflections of said plurality of portions; control means for moving said tip with respect to said surface; and feedback means including said control means responsive to said electrical signals generated in response to said respective deflections of said plurality of portions of said piezoelectric film strain sensor for controlling the movement of said tip.
Claim 12
Dependent Claim
53 words
The probe recited in claim 9 wherein said control means includes threshold means for comparing said electrical signals generated by said piezoelectric film strain sensor in response to deflections of said tip, said threshold means stopping relative movement of said tip with respect to said surface to avoid a "crash" of said tip.
Claim 13
Dependent Claim
25 words
The probe recited in claim 9 further comprising strain sensor means for sensing deflection of said tip, said feedback means including said strain sensor means.
Claim 14
Dependent Claim
29 words
The probe recited in claim 11, wherein said strain sensor means includes said piezoelectric film strain sensor, said piezoelectric film strain sensor being deposited on said integrated tip stem.
Claim 15
Dependent Claim
144 words
An integrated tip strain sensor in combination with an atomic force microscope (AFM) for profiling a surface in three dimensions comprising: a cantilever beam carrying a tip stem having a tip, said tip stem being an integrated tip stem; and a piezoelectric film strain sensor on said integrated tip stem for sensing strain; control means for vibrating said cantilever in a z direction, said AFM detecting cantilever vibrations to measure a distance in said z direction to a first surface feature, said control means thereafter stopping cantilever vibrations and relatively moving said tip with respect to said surface, said piezoelectric film strain sensor producing electrical signals in response to deflections of said tip due to said second surface feature, said control means x and y coordinates for said second feature, wherein said piezoelectric film strain sensor comprises four quadrant portions about said tip stem.
Claim 16
Dependent Claim
144 words
An integrated tip strain sensor in combination with an atomic force microscope (AFM) for profiling a surface in three dimensions comprising: a cantilever beam carrying a tip stem having a tip, said tip stem being an integrated tip stem; and a piezoelectric film strain sensor on said integrated tip stem for sensing strain; control means for vibrating said cantilever in a z direction, said AFM detecting cantilever vibrations to measure a distance in said z direction to a first surface feature, said control means thereafter stopping cantilever vibrations and relatively moving said tip with respect to said surface, said piezoelectric film strain sensor producing electrical signals in response to deflections of said tip due to said second surface feature, said control means x and y coordinates for said second feature, wherein said piezoelectric film strain sensor comprises four quadrant portions about said tip stem.
Claim 17
Dependent Claim
61 words
The integrated tip strain sensor as recited in claim 13, further comprising metallized contacts electrically connected to each of said quadrants and providing a feedback control signal to said control means, said cantilever beam and tip stem are made of silicon and a high-resolution direct electron beam (e-beam) deposition process is used to grow said sharp tip onto said tip stem.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-20 | 1997-12-20 | 1998-06-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-20 | 2001-12-20 | 2002-06-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-20 | 2005-12-20 | 2006-06-21 | $7700.00 | Window Closed / Lapsed |