Patent US1069693A successfully refreshed from Google Patents.
Patent US5317153A successfully refreshed from Google Patents.
US5317153A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning probe microscope
Assignee: Nikon Corp
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Filing: 1992-07-31
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Granted: 1994-05-31
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Expires: 2012-07-31
Abstract
Abstract A scanning probe microscope, capable of achieving a resolving power of atomic level, is provided with a probe microscope unit 5, 6, 17 for measuring a fine constitution of sample surface with a probe 5, and with an optical microscope unit 8, 10-16 for observing an optical image of sample, in which the probe microscope unit is encased in a box 9 shielded against external noises and electromagnetic waves. The box has a shape of a cone such as triangular cone, which is placed on a triangular surface plate.
Inventors
- 👤 Hiroyuki Matsushiro
- 👤 Tetsuji Onuki
- 👤 Masaya Miyazaki
- 👤 Yasushi Fukutomi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:23
CPC Classifications
G; G01; G01Q; G01Q30/00; G01Q30/18; B; B82; B82Y; B82Y35/00; H; H01; H01J; H01J37/00; H01J37/02; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/869; Y10S977/871
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
96 words
A scanning probe microscope comprising: a surface plate; a probe microscope unit disposed on said surface plate for electrically processing information obtained by a relative scan of a probe to a sample to measure a fine constitution of a surface of said sample; an optical microscope unit disposed on said surface plate spatially independently of said probe microscope unit for observing an optical image of said sample; and a box having side faces arranged in a conic form, and encasing said probe microscope unit for shielding said probe microscope unit against external noises and electromagnetic waves.
Claim 2
Dependent Claim
96 words
A scanning probe microscope comprising: a surface plate; a probe microscope unit disposed on said surface plate for electrically processing information obtained by a relative scan of a probe to a sample to measure a fine constitution of a surface of said sample; an optical microscope unit disposed on said surface plate spatially independently of said probe microscope unit for observing an optical image of said sample; and a box having side faces arranged in a conic form, and encasing said probe microscope unit for shielding said probe microscope unit against external noises and electromagnetic waves.
Claim 3
Dependent Claim
37 words
A scanning probe microscope according to claim 1, wherein said box is formed of a material with a high conductivity and a high permeability, and wherein a sound absorbing material is provided on an interior surface thereof.
Claim 4
Dependent Claim
23 words
A scanning probe microscope according to claim 1, wherein said side faces of box are arranged in a form of a triangular cone.
Claim 5
Dependent Claim
45 words
A scanning probe microscope according to claim 3, wherein said surface plate supports said probe microscope unit, said optical microscope unit, and said box, and wherein said surface plate has a triangular mount plane corresponding to a shape of said box in a plan view.
Claim 6
Dependent Claim
40 words
A scanning probe microscope according to claim 1, further comprising a column disposed inside said box without contact therewith, wherein said optical microscope unit is supported by said box, and wherein said probe microscope unit is supported by said column.
Claim 7
Dependent Claim
49 words
A scanning probe microscope comprising: a surface plate having a mount plane of polygon shape with paired edges adjacent to each other but not perpendicular to each other; and a probe microscope unit disposed on said mount plane for measuring a fine constitution of a surface of a sample.
Claim 8
Dependent Claim
49 words
A scanning probe microscope comprising: a surface plate having a mount plane of polygon shape with paired edges adjacent to each other but not perpendicular to each other; and a probe microscope unit disposed on said mount plane for measuring a fine constitution of a surface of a sample.
Claim 9
Dependent Claim
21 words
A scanning probe microscope according to claim 6, wherein said adjacent paired edges form an angle of less than 90 degrees.
Claim 10
Dependent Claim
14 words
A scanning probe microscope according to claim 7, wherein said polygon is a triangle.
Claim 11
Dependent Claim
38 words
A scanning probe microscope according to claim 8, wherein at least one of two base angles of said triangle is between 59 and 64 degrees, and said triangle has a height of 75 to 90% of base length.
Claim 12
Dependent Claim
14 words
A scanning probe microscope according to claim 7, wherein said polygon is a trapezoid.
Claim 13
Dependent Claim
38 words
A scanning probe microscope according to claim 10, wherein at least one of two base angles of said trapezoid is between 59 and 64 degrees, and said trapezoid has a height of 75 to 90% of base length.
Claim 14
Dependent Claim
47 words
A scanning probe microscope according to claim 6, wherein said mount plane comprises three edges respectively corresponding to three edges of a virtual triangle, and each of said three edges of the mount plane constitutes at least a part of a corresponding edge of said virtual triangle.
Claim 15
Dependent Claim
25 words
A scanning probe microscope according to claim 12, wherein an outer periphery of said mount plane is a hexagon with alternate longer and shorter edges.
Claim 16
Dependent Claim
20 words
A scanning probe microscope according to claim 12, further comprising a frame member supporting said surface plate at three points.
Claim 17
Dependent Claim
48 words
A scanning probe microscope assembly comprising: a base; a scanning probe microscope mounted on said base; and means for shielding the scanning probe microscope against vibration and electromagnetic radiation, said shielding means including a box having side faces arranged in a conic form and encasing said probe microscope.
Claim 18
Dependent Claim
48 words
A scanning probe microscope assembly comprising: a base; a scanning probe microscope mounted on said base; and means for shielding the scanning probe microscope against vibration and electromagnetic radiation, said shielding means including a box having side faces arranged in a conic form and encasing said probe microscope.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-30 | 1997-11-29 | 1998-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-30 | 2001-11-29 | 2002-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-30 | 2005-11-29 | 2006-05-31 | $7700.00 | Window Closed / Lapsed |