EP0421355A2
Expired / Lapsed
EP
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Scanning tunneling microscope
Assignee: Olympus Corp
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Filing: 1990-10-02
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Granted: —
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Expires: 2010-10-02
Abstract
Abstract A scanning tunneling microscope has an STM unit (14) including a probe (30) for scanning the surface of an object (28). The STM unit (14) has at its outer peripheral surface a cylindrical enclosing member (34) extending towards an object table. When the object is observed, the object table (20) is elevated or the STM unit (14) is lowered, so that the enclosing member (34) is urged upon the table (20). The table (20) and the STM unit (14) constitute one body. As a result, relative movement between the object (28) and the probe (30) can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member (34) isolates the object (28) and the probe (30) from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.
Inventors
- 👤 Shuzo Mishima
- 👤 Takao Okada
- 👤 Tsugiko Takase
- 👤 Hiroko Ota
- 👤 Hirofumi Miyamoto
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 06:37
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G01Q30/00; G01Q30/02; G01Q30/025; G01Q30/08; G01Q30/18; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/869
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
145 words
A scanning tunneling microscope for investigating the surface of an object, comprising: an STM unit (14) having a probe (30) for detecting a tunnel current, movement means (32) for supporting and moving the probe along the surface of the object (28); hold means (10, 16) for holding the STM unit (14) such that the axis of the probe (30) intersects the surface of the object (28) at right angles; a table (20) for mounting the object (28) thereon, characterized in that said STM unit (14) further comprises an enclosing member (34) disposed surround the probe (30) and the movement means (32); and characterized by further comprising means (18) for at least one of the STM unit (14) and the table (20) so that the table (20) contacts with the enclosing member (34) to provide a closed space surrounding the object (28) and the probe (30).
Claim 2
Dependent Claim
145 words
A scanning tunneling microscope for investigating the surface of an object, comprising: an STM unit (14) having a probe (30) for detecting a tunnel current, movement means (32) for supporting and moving the probe along the surface of the object (28); hold means (10, 16) for holding the STM unit (14) such that the axis of the probe (30) intersects the surface of the object (28) at right angles; a table (20) for mounting the object (28) thereon, characterized in that said STM unit (14) further comprises an enclosing member (34) disposed surround the probe (30) and the movement means (32); and characterized by further comprising means (18) for at least one of the STM unit (14) and the table (20) so that the table (20) contacts with the enclosing member (34) to provide a closed space surrounding the object (28) and the probe (30).
Claim 3
Dependent Claim
73 words
The microscope according to claim 1, characterized by further comprising an optical system including an objective lens (12) for observing the surface of the object (28), characterized in that said hold means (10, 16) includes a rotatable revolver (16) holding at least the objective lens (12) and the STM unit (14), said revolver (16) being rotated to direct one of the objective lens (12) and the STM unit (14) to the object (28).
Claim 4
Dependent Claim
42 words
The microscope according to claim 1 or 2, characterized in that said enclosing member (34) is an electrically conductive cylindrical member having a tapered end portion (60), and the table (20) has a portion (62) which engages the tapered end portion (60).
Claim 5
Dependent Claim
34 words
The microscope according to claim 1, 2 or 3, characterized in that said hold means has an elastic member (58, 68), and the STM unit (14) is supported via the elastic member (58, 68).
Claim 6
Dependent Claim
53 words
The microscope according to claim 1, 2 or 3, characterized in that said table (20) has a stage (26) supported by an elastic member (70, 72), the object (28) is placed on the stage (26), and an end portion of the enclosing member (34) is brought into contact with the object stage (26).
Claim 7
Dependent Claim
60 words
The microscope according to claim 1, 2 or 3, characterized in that said enclosing member (34) has a threaded end portion, and the table (20) has a stage (26) for mounting the object (28) thereon and a member (74) having in its inner peripheral wall a threaded portion to be engaged with the threaded portion of the enclosing member (34).
Claim 8
Dependent Claim
58 words
The microscope according to claim 1, characterized in that said movement means has a cylindrical piezoelectric actuator (32) and an optically transparent member (84) for supporting the probe (30), said transparent member (84) being provided at an end portion of the cylindrical piezoelectric actuator (32), and said objective lens (12) is disposed within the cylindrical piezoelectric actuator (32).
Claim 9
Dependent Claim
80 words
The microscope according to claim 1, comprising a detection circuit (106) for detecting a tunnel current, characterized in that said enclosing member (34) has at its end portion a first electrode (94) electrically connected to the probe (30), and said table (20) has a second electrode (100) electrically connected to said detection circuit (106), said first and second electrodes (94, 100) being electrically connected to each other when said enclosing member (34) is brought into contact with the table (20).
References Cited (Backward Citations)
No citation records indexed.
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