Scanning type tunnel microscope

Abstract

Abstract PURPOSE:To observe even an opaque sample by arranging the objective optical member of an optical system for observing the surface of the sample at an observation position. CONSTITUTION:An observation area is selected visually through an optical microscope and then a revolver 16 is rotated without moving the XY stage nor the Z stage of a sample table to arrange a probe stylus scanning unit 24 above the sample. Then while a tunnel current flowing between the sample and a probe stylus 52 by applying a specific voltage between the both, a cylindri cal piezoelectric actuator 50 is lowered by an inch worm system and the probe stylus 52 is put closer to the sample until the value of the tunnel current reaches 5 nA. Then while a specific (z)-directional scanning signal is sent to an actuator 50 so that the tunnel current flowing between the probe stylus 52 and sample is held constant, an (xy)-directional scanning signal is sent to the actuator 50 to make the probe stylus 52 scan in an (xy) direction. At this time, a (z)- directional scanning signal is inputted to a computer in synchronism with the (xy)-directional scanning signal and after image processing, a scanning type tunnel microscope image is outputted on a CRT. etc.

Inventors

• 👤 Toshio Tazaki
• 👤 多崎　敏雄
• 👤 Shuzo Mishima
• 👤 周三 三島
• 👤 Tsugiko Takase
• 👤 つぎ子 高瀬
• 👤 Yasushi Miyamoto
• 👤 裕史 宮本
• 👤 Hiroko Ota
• 👤 大田　浩子
• 👤 Takao Okada
• 👤 孝夫 岡田

Bibliographic Details