Patent US5316579A successfully refreshed from Google Patents.
US5316579A
Expired / Lapsed
US
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Apparatus for forming a thin film with a mist forming means
Assignee: Symetrix Corp
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Filing: 1992-05-04
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Granted: 1994-05-31
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Expires: 2012-05-04
Abstract
Abstract A method and apparatus are disclosed for generating fine mists of liquids using a rotating turbine blade disposed within an enclosure. A mixture of a liquid and a carrier gas are flowed into the enclosure such that it immediately impacts on the rotating turbine blade disposed near a lower end of the enclosure, and the resulting mist is withdrawn under vacuum near an upper end of the enclosure. A method and apparatus are also disclosed for chemical vapor deposition of thin films of complex chemical compounds using the discussed mists.
Inventors
- 👤 Larry D. McMillan
- 👤 Carlos A. Paz de Araujo
- 👤 Tom L. Roberts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 15:12
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; B; B05; B05D; B05D1/00; B05D1/60; B05D3/00; B05D3/04; B05D3/0493; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; C23C16/448; C23C16/4486; C23C16/455; C23C16/45561; C23C16/45563; C23C16/4558; C23C16/46; C23C16/48; C23C16/482; C23C16/52; C23C26/00; C23C26/02; C30; C30B; C30B29/00; C30B29/60; C30B29/68; C30B7/00; H01; H01C; H01C7/00; H01C7/10; H01C7/1013; H10B; H10B12/00; H10B12/30; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10D1/684; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076; H05; H05K; H05K3/00; H05K3/10; H05K3/105; H10P14/65; H10P14/6516; H10P14/6536; H10P14/6538; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/734; Y10S505/739; Y10S505/741; Y10S505/786; Y10S505/825; Y10S505/826
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
114 words
Apparatus for forming a ferroelectric, super-conducting, or high dielectric constant thin film, said apparatus comprising: a source of a liquid, said liquid comprising one or more chemical elements; an enclosure; liquid introduction means for introducing liquid from said liquid source into said enclosure; rotating blade means in said enclosure for turning said liquid into a mist; and thin film forming means for utilizing said mist to form a ferroelectric, super-conducting, or high dielectric constant thin film comprising said one or more chemical elements, said thin film forming means including vacuum means for creating a vacuum to withdraw said mist from said enclosure and for drawing said liquid into said enclosure through said introduction means.
Claim 2
Dependent Claim
114 words
Apparatus for forming a ferroelectric, super-conducting, or high dielectric constant thin film, said apparatus comprising: a source of a liquid, said liquid comprising one or more chemical elements; an enclosure; liquid introduction means for introducing liquid from said liquid source into said enclosure; rotating blade means in said enclosure for turning said liquid into a mist; and thin film forming means for utilizing said mist to form a ferroelectric, super-conducting, or high dielectric constant thin film comprising said one or more chemical elements, said thin film forming means including vacuum means for creating a vacuum to withdraw said mist from said enclosure and for drawing said liquid into said enclosure through said introduction means.
Claim 3
Dependent Claim
25 words
Apparatus as in claim 1 wherein said liquid introduction means comprises means for impacting said liquid onto said blade immediately after it enters said enclosure.
Claim 4
Dependent Claim
23 words
Apparatus as in claim 1 wherein said thin film forming means comprises a mist outlet located in an upper portion of said enclosure.
Claim 5
Dependent Claim
15 words
Apparatus as in claim 1 wherein said vacuum is between 500 torr and 700 torr.
Claim 6
Dependent Claim
27 words
Apparatus as in claim 1 wherein said liquid introduction means comprises a gas source and combining means for combining said liquid with gas from said gas source.
Claim 7
Dependent Claim
36 words
Apparatus as in claim 5 wherein said combining means comprises means for providing a regulated stream of gas from said gas source and means for adding a controlled quantity of said liquid to said gas stream.
Claim 8
Dependent Claim
36 words
Apparatus as in claim 1 wherein rotating blade means comprises a blade and a rotation means for rotating said blade, and wherein said blade rotates at between 750 rounds per minute and 1500 rounds per minute.
Claim 9
Dependent Claim
29 words
Apparatus as in claim 1 wherein said apparatus is capable of using a liquid solution selected from the group comprising sol-gel solutions and MOD type solutions as said liquid.
References Cited (Backward Citations)
US888444A
Cited
US2023061A
Cited
US3880112A
Cited
US4290384A
Cited
US4521462A
Cited
US4783006A
Cited
US5041420A
Cited
US5106828A
Cited
US5034372A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-30 | 1997-11-29 | 1998-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-30 | 2001-11-29 | 2002-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-30 | 2005-11-29 | 2006-05-31 | $7700.00 | Window Closed / Lapsed |