US3880112A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for the preparation of thin films
Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
•
Filing: 1973-04-17
•
Granted: 1975-04-29
•
Expires: 1993-04-17
Abstract
Abstract Thin films of metal, metallic compounds or other materials are prepared by ultrasonic atomization of a solution which is intended to form the material to be deposited, the aerosol which is thus produced being transported by a carrier gas and deposited on a heated substrate.
Inventors
- 👤 Jean Spitz
- 👤 Jean-Claude Viguie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:21
CPC Classifications
B; B01; B01J; B01J19/00; B01J19/08; B01J19/10; B01J37/00; B01J37/02; B01J37/0215
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
142 words
A device for the preparation of a thin film of metal or of a metallic compound comprising an aerosol generator, a deposition chamber, means in said chamber for heating a substrate and means for circulating a carrier gas from said generator to said chamber, means for controlling the flow rate of said carrier gas, wherein said generator comprises an ultrasonic wave emitter acting on a solution forming droplets of the material to be deposited on the substrate in said chamber to atomize said solution means for controlling the power of the ultrasonic wave and means for controlling the frequency of the ultrasonic wave, the quantity of the aerosol being regulated by the power of the ultrasonic wave, the size of the droplets being regulated by the ultrasonic frequency and the quantity of aerosol being regulated by the flow rate of carrier gas.
Claim 2
Independent Claim
142 words
A device for the preparation of a thin film of metal or of a metallic compound comprising an aerosol generator, a deposition chamber, means in said chamber for heating a substrate and means for circulating a carrier gas from said generator to said chamber, means for controlling the flow rate of said carrier gas, wherein said generator comprises an ultrasonic wave emitter acting on a solution forming droplets of the material to be deposited on the substrate in said chamber to atomize said solution means for controlling the power of the ultrasonic wave and means for controlling the frequency of the ultrasonic wave, the quantity of the aerosol being regulated by the power of the ultrasonic wave, the size of the droplets being regulated by the ultrasonic frequency and the quantity of aerosol being regulated by the flow rate of carrier gas.
Claim 3
Dependent Claim
22 words
A device according to Claim 1 including means for carrying out a displacement of the substrate at a uniform rate during deposition.
Claim 4
Dependent Claim
41 words
A device according to claim 1 said deposition chamber including a nozzle and means for displacing the nozzle on a closed path during which said nozzle directs a jet of carrier gas loaded with aerosols towards different zones of the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-04-28 | 1978-10-28 | 1979-04-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-04-28 | 1982-10-28 | 1983-04-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-04-28 | 1986-10-28 | 1987-04-29 | $7700.00 | Window Closed / Lapsed |