US5313451A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Information recording/reproducing apparatus with STM cantilever probe having a strain gauge
Assignee: Canon Inc
•
Filing: 1992-09-10
•
Granted: 1994-05-17
•
Expires: 2012-09-10
Abstract
Abstract An apparatus for relatively moving a probe facing an information carrier and recording information on and/or reproducing information from the information carrier with the probe provided with a detector for detecting an error in the probe.
Inventors
- 👤 Takayuki Yagi
- 👤 Toshiyuki Komatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:17
CPC Classifications
G; G01; G01D; G01D9/00; G11; G11B; G11B11/00; G11B11/08; G11B21/00; G11B21/02; G11B21/16; G11B21/20; G11B21/21; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; B; B82; B82Y; B82Y10/00; G01Q; G01Q20/00; G01Q20/04; Y; Y10; Y10S; Y10S977/00; Y10S977/902; Y10S977/932; Y10S977/943; Y10S977/947
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
130 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information from the recording medium, comprising: a substrate; a cantilever which is displaceable and is formed by etching said substrate; a probe electrode supported on a free end of said cantilever; a piezoelectric film formed on said cantilever by film formation; detection means for detecting deformation amount of said cantilever on the basis of a charge amount generated on said piezoelectric film; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode, wherein when said detection means detects an abnormal deformation amount of said cantilever, the use of said probe electrode is stopped.
Claim 2
Independent Claim
130 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information from the recording medium, comprising: a substrate; a cantilever which is displaceable and is formed by etching said substrate; a probe electrode supported on a free end of said cantilever; a piezoelectric film formed on said cantilever by film formation; detection means for detecting deformation amount of said cantilever on the basis of a charge amount generated on said piezoelectric film; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode, wherein when said detection means detects an abnormal deformation amount of said cantilever, the use of said probe electrode is stopped.
Claim 3
Dependent Claim
16 words
An apparatus according to claim 1, wherein a plurality of cantilevers are formed on said substrate.
Claim 4
Dependent Claim
27 words
An apparatus according to claim 1, wherein said cantilever can be deformed in three-dimensions to cause said probe electrode supported by said cantilever to deform in three-dimensions.
Claim 5
Dependent Claim
16 words
An apparatus according to claim 1, wherein said cantilever includes a displacement element for displacing itself.
Claim 6
Dependent Claim
32 words
An apparatus according to claim 1, wherein said means for effecting at least one of recording and reproduction includes means for applying a voltage between said probe electrode and the recording medium.
Claim 7
Dependent Claim
30 words
An apparatus according to claim 5, further comprising means for detecting current flowing between said probe electrode and the recording medium when voltage is applied by said voltage applying means.
Claim 8
Dependent Claim
14 words
An apparatus according to claim 6, wherein the detected current is a tunneling current.
Claim 9
Dependent Claim
97 words
A probe unit for effecting at least one of input of information and retrieval of information, comprising: a substrate; a cantilever which is formed by etching said substrate and is displaceable; a probe electrode supported on a free end of said cantilever; and a piezoelectric film, formed on said cantilever by film formation, for detecting displacement amount of said cantilever, wherein a plurality of piezoelectric films are arranged along a direction perpendicular to a longitudinal direction of said cantilever, and said displacement amount is detected on the basis of a charge amount generated in said piezoelectric films.
Claim 10
Dependent Claim
97 words
A probe unit for effecting at least one of input of information and retrieval of information, comprising: a substrate; a cantilever which is formed by etching said substrate and is displaceable; a probe electrode supported on a free end of said cantilever; and a piezoelectric film, formed on said cantilever by film formation, for detecting displacement amount of said cantilever, wherein a plurality of piezoelectric films are arranged along a direction perpendicular to a longitudinal direction of said cantilever, and said displacement amount is detected on the basis of a charge amount generated in said piezoelectric films.
Claim 11
Dependent Claim
26 words
A probe unit according to claim 8, wherein said cantilever is deformed in three-dimensions to cause said probe supported by said cantilever to deform in three-dimensions.
Claim 12
Independent Claim
139 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information from the recording medium, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end of said cantilever; a piezoelectric film formed on said cantilever by film formation; detection means for detecting displacement amount of said cantilever on the basis of a charge amount generated in said piezoelectric film and for outputting an output corresponding to said displacement; correction means for correcting said displacement amount of said cantilever on the basis of said output of said detection means; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode.
Claim 13
Independent Claim
139 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information from the recording medium, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end of said cantilever; a piezoelectric film formed on said cantilever by film formation; detection means for detecting displacement amount of said cantilever on the basis of a charge amount generated in said piezoelectric film and for outputting an output corresponding to said displacement; correction means for correcting said displacement amount of said cantilever on the basis of said output of said detection means; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode.
Claim 14
Independent Claim
129 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information from the recording medium, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end of said cantilever; a piezoresistance element formed on said cantilever by film formation; detection means for detecting deformation amount of said cantilever on the basis of resistance change of said piezoresistance element; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode, wherein when said detection means detects an abnormal deformation amount of said cantilever, the use of said probe electrode is stopped.
Claim 15
Independent Claim
129 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information from the recording medium, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end of said cantilever; a piezoresistance element formed on said cantilever by film formation; detection means for detecting deformation amount of said cantilever on the basis of resistance change of said piezoresistance element; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode, wherein when said detection means detects an abnormal deformation amount of said cantilever, the use of said probe electrode is stopped.
Claim 16
Dependent Claim
16 words
An apparatus according to claim 11, wherein a plurality of cantilevers are formed on said substrate.
Claim 17
Dependent Claim
27 words
An apparatus according to claim 11, wherein said cantilever can be deformed in three-dimensions to cause said probe electrode supported by said cantilever to deform in three-dimensions.
Claim 18
Dependent Claim
16 words
An apparatus according to claim 11, wherein said cantilever includes a displacement element for displacing itself.
Claim 19
Dependent Claim
36 words
An apparatus according to claim 11, wherein said means for effecting at least one of recording of information and reproduction of information includes means for applying a voltage between said probe electrode and the recording medium.
Claim 20
Dependent Claim
30 words
An apparatus according to claim 15, further comprising means for detecting current flowing between said probe electrode and the recording medium when voltage is applied by said voltage applying means.
Claim 21
Dependent Claim
14 words
An apparatus according to claim 16, wherein the detected current is a tunneling current.
Claim 22
Dependent Claim
96 words
A probe unit for effecting at least one of input of information and retrieved of information, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end of said cantilever; and a piezoresistance element, formed on said cantilever by film formation, for detecting displacement amount of said cantilever, wherein a plurality of piezoresistance elements are arranged along a direction perpendicular to a longitudinal direction of said cantilever and said displacement amount is detected on the basis of resistance change of said piezoresistive elements.
Claim 23
Dependent Claim
96 words
A probe unit for effecting at least one of input of information and retrieved of information, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end of said cantilever; and a piezoresistance element, formed on said cantilever by film formation, for detecting displacement amount of said cantilever, wherein a plurality of piezoresistance elements are arranged along a direction perpendicular to a longitudinal direction of said cantilever and said displacement amount is detected on the basis of resistance change of said piezoresistive elements.
Claim 24
Dependent Claim
27 words
A probe unit according to claim 18, wherein said cantilever is deformed in three-dimensions to cause said probe electrode supported by said cantilever to deform in three-dimensions.
Claim 25
Independent Claim
140 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information form the recording medium, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end side of said cantilever; a piezoresistance element formed on said cantilever by film formation; detection means for detecting displacement amount of said cantilever on the basis of resistance change of said piezoresistance element and for outputting an output corresponding to the amount of said displacement; correction means for correcting said displacement of said cantilever on the basis of said output of said detection means; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode.
Claim 26
Independent Claim
140 words
An apparatus for effecting at least one of recording of information on a recording medium and reproduction of information form the recording medium, comprising: a substrate; a cantilever which is formed by etching said substrate and which is displaceable; a probe electrode supported on a free end side of said cantilever; a piezoresistance element formed on said cantilever by film formation; detection means for detecting displacement amount of said cantilever on the basis of resistance change of said piezoresistance element and for outputting an output corresponding to the amount of said displacement; correction means for correcting said displacement of said cantilever on the basis of said output of said detection means; and means for effecting at least one of recording of information on the recording medium and reproduction of information from the recording medium by use of said probe electrode.
References Cited (Backward Citations)
US3632900A
Cited
US4404601A
Cited
US4663555A
Cited
US4764818A
Cited
JPS62281138A
Cited
US4831614A
Cited
EP0247219A1
Cited
EP0272935A2
Cited
US4841191A
Cited
US4962480A
Cited
US5162653A
Cited
JPH0238904A
Cited
EP0360975A2
Cited
US4998016A
Cited
US5053995A
Cited
US5015850A
Cited
US5142424A
Cited
US4992659A
Cited
US5010296A
Cited
US5031463A
Cited
US5255259A
Cited
US5115664A
Cited
US5168159A
Cited
US5260926A
Cited
US5161149A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-16 | 1997-11-15 | 1998-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-16 | 2001-11-15 | 2002-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-16 | 2005-11-15 | 2006-05-17 | $7700.00 | Window Closed / Lapsed |