← Back to Patent Explorer
US5260926A Expired / Lapsed US ⏱️ 0.0 years remaining

Atomic force microscope with a plurality of cantilevers for recording/reproducing information

Assignee: Canon Inc
•
Filing: 1992-04-17
•
Granted: 1993-11-09
•
Expires: 2012-04-17
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members. <IMAGE>

Inventors

  • 👤 Ryo Kuroda
  • 👤 Toshihiko Miyazaki
  • 👤 Kunihiro Sakai
  • 👤 Kiyoshi Takimoto

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 15:00
CPC Classifications
G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; B; B82; B82Y; B82Y10/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/874; Y10S977/902; Y10S977/932; Y10S977/943; Y10S977/947

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 102 words
An information processor comprising: a plurality of probes disposed so as to face a recording medium containing recorded information; a plurality of elastic members supporting said plurality of probes, respectively, said elastic members being susceptible to displacement, said displacement being indicative of said recorded information; an optical scanning system for irradiating said plurality of elastic members with a light beam; and a light detecting means for detecting a reflected light from said elastic members, wherein said information processor reads said information by calculating said displacement of each of said elastic members on the basis of output signals from said light detecting means.
Claim 2
Dependent Claim 102 words
An information processor comprising: a plurality of probes disposed so as to face a recording medium containing recorded information; a plurality of elastic members supporting said plurality of probes, respectively, said elastic members being susceptible to displacement, said displacement being indicative of said recorded information; an optical scanning system for irradiating said plurality of elastic members with a light beam; and a light detecting means for detecting a reflected light from said elastic members, wherein said information processor reads said information by calculating said displacement of each of said elastic members on the basis of output signals from said light detecting means.
Claim 3
Dependent Claim 20 words
The information processor according to claim 1, further comprising means for applying a voltage between said medium and said probes.
Claim 4
Dependent Claim 21 words
The information processor according to claim 1, wherein said optical scanning system includes a laser light source and a polygonal mirror.
Claim 5
Dependent Claim 30 words
The information processor according to claim 1, wherein said probes are arranged close to said medium so that a functional force may be generated between said medium and said probes.
Claim 6
Dependent Claim 80 words
An information processor comprising a plurality of probes disposed so as to face a recording medium containing recorded information; a plurality of elastic members supporting said plurality of probes, respectively, said elastic members being susceptible to displacement, said displacement being indicative of said recorded information; and displacement detecting means for detecting said displacement of each of said elastic members so as to read said information, wherein said displacement detecting means includes plural sensing portions corresponding to the respective elastic members.
Claim 7
Dependent Claim 80 words
An information processor comprising a plurality of probes disposed so as to face a recording medium containing recorded information; a plurality of elastic members supporting said plurality of probes, respectively, said elastic members being susceptible to displacement, said displacement being indicative of said recorded information; and displacement detecting means for detecting said displacement of each of said elastic members so as to read said information, wherein said displacement detecting means includes plural sensing portions corresponding to the respective elastic members.
Claim 8
Dependent Claim 15 words
The information processor according to claim 1 or 5, further comprising a signal processing circuit.
Claim 9
Dependent Claim 31 words
The information processor according to claim 1 or 5, wherein each of said elastic members is a cantilever made of a laminate of an Si substrate and an SiO 2 layer.
Claim 10
Dependent Claim 20 words
The information processor according to claim 5, wherein said displacement detecting means is integrated with each of said elastic members.
Claim 11
Dependent Claim 31 words
The information processor according to claim 5, wherein said displacement detecting means includes a light source, an optical waveguide, a waveguide type optical path modulating element and a light detecting element.
Claim 12
Dependent Claim 15 words
The information processor according to claim 9, wherein said light source is a semiconductor laser.
Claim 13
Dependent Claim 15 words
The information processor according to claim 9, wherein said light detecting element is a photodiode.
Claim 14
Dependent Claim 20 words
The information processor according to claim 5, further comprising means for applying a voltage between said medium and said probes.
Claim 15
Dependent Claim 30 words
The information processor according to claim 5, wherein the probes are arranged close to said medium so that a functional force may be generated between said medium and said probes.
Claim 16
Dependent Claim 14 words
The information processor according to claim 5, wherein said sensing portions comprise deflection sensors.
Claim 17
Dependent Claim 25 words
The information processor according to claim 5, wherein said displacement detecting means is a means in which a plurality of optical members are optically integrated.
Claim 18
Dependent Claim 38 words
The information processor according to claim 5, wherein each said sensing portion comprises a piezoelectric material sandwiched between a pair of electrodes and detects deflection as an electric potential difference generated by the deflection of the piezoelectric material.
Claim 19
Dependent Claim 17 words
The information processor according to claim 16, wherein each said sensing portion has a piezoelectric unimorph structure.

References Cited (Backward Citations)

US5155715A Cited
US5051379A Cited
US5144128A Cited
US5065103A Cited
US5187367A Cited
JPH04115103A Cited
US5166520A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-11-08 1997-05-10 1997-11-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-11-08 2001-05-10 2001-11-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-11-08 2005-05-10 2005-11-09 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag