US5312780A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated circuit fabrication method
Assignee: Nokia Bell Labs
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Filing: 1992-12-16
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Granted: 1994-05-17
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Expires: 2012-12-16
Abstract
Abstract A method for forming an anti-reflective coating useful in the fabrication of integrated circuits is discussed. Applicants have found that preheating semiconductor wafers prior to the application of amorphous silicon anti-reflective coatings tends to reduce undesirable particulates which may attach to the wafer. The process is illustratively performed in a Varian 3180 machine having four stations. Illustratively, the wafer may be preheated between 70° C. and 175° C. prior to and during the sputter deposition of an amorphous silicon anti-reflective coating.
Inventors
- 👤 Arun K. Nanda
- 👤 Mark J. Sundahl
- 👤 Edward J. Vajda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:30
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; Y; Y10; Y10S; Y10S148/00; Y10S148/017; Y10S148/158; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/952
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
54 words
A method of semiconductor integrated circuit fabrication comprising: sputtering an amorphous silicon anti-reflective coating upon a substrate chosen from the group consisting of aluminum, spin-on glass and silicon dioxide, by preheating said substrate to a temperature between 70° C. and 175° C. prior to said sputtering step and maintaining said temperature during said sputtering.
Claim 2
Independent Claim
54 words
A method of semiconductor integrated circuit fabrication comprising: sputtering an amorphous silicon anti-reflective coating upon a substrate chosen from the group consisting of aluminum, spin-on glass and silicon dioxide, by preheating said substrate to a temperature between 70° C. and 175° C. prior to said sputtering step and maintaining said temperature during said sputtering.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-16 | 1997-11-15 | 1998-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-16 | 2001-11-15 | 2002-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-16 | 2005-11-15 | 2006-05-17 | $7700.00 | Window Closed / Lapsed |