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US5295220A
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Process for the production of a thin film optical waveguide of TiO2
Assignee: Schott AG
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Filing: 1992-11-16
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Granted: 1994-03-15
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Expires: 2012-11-16
Abstract
Abstract A process is disclosed for the production of an optical thin film waveguide of TiO 2 with an attenuation of <5 dB/cm on a planar inorganic substrate wherein the thin film waveguide is produced by a microwave plasma CVD process (PCVD).
Inventors
- 👤 Martin Heming
- 👤 Roland Hochhaus
- 👤 Jurgen Otto
- 👤 Volker Paquet
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:07
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/405; C23C16/44; C23C16/50; C23C16/511; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/132
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
51 words
A process for the production of an optical waveguide comprising a planar inorganic substrate coated with a TiO 2 film, said process comprising coating said planar inorganic substrate with said TiO 2 film by a microwave plasma CVD process (PCVD), wherein the resultant optical waveguide exhibits an attenuation of <5 dB/cm.
Claim 2
Dependent Claim
51 words
A process for the production of an optical waveguide comprising a planar inorganic substrate coated with a TiO 2 film, said process comprising coating said planar inorganic substrate with said TiO 2 film by a microwave plasma CVD process (PCVD), wherein the resultant optical waveguide exhibits an attenuation of <5 dB/cm.
Claim 3
Dependent Claim
23 words
A process according to claim 1, wherein said TiO 2 film is produced by means of a microwave plasma impulse CVD process (PICVD).
Claim 4
Dependent Claim
17 words
A process according to claim 1, wherein microwaves are utilized at a frequency range of 0.3-10 GHz.
Claim 5
Dependent Claim
34 words
A process according to claim 1, wherein the surface of said inorganic substrate is cleaned, prior to being coated with said TiO 2 film, by a treatment with an O 2 -containing microwave plasma.
Claim 6
Dependent Claim
17 words
A process according to claim 2, wherein microwaves are utilized at a frequency range of 0.3-10 GHz.
Claim 7
Dependent Claim
34 words
A process according to claim 2, wherein the surface of said inorganic substrate is cleaned, prior to being coated with said TiO 2 film, by a treatment with an O 2 -containing microwave plasma.
Claim 8
Dependent Claim
17 words
A process according to claim 6, wherein microwaves are utilized at a frequency range of 0.3-10 GHz.
Claim 9
Dependent Claim
21 words
A process according to claim 1, further comprising heating said substrate during the coating step to a temperature of 60°-300° C.
Claim 10
Dependent Claim
19 words
A process according to claim 1, wherein the resultant optical waveguide exhibits an attenuation of less than 3 dB/cm.
Claim 11
Dependent Claim
17 words
A process according to claim 1, wherein said TiO 2 film has a thickness of 0.1-0.3 μm.
Claim 12
Dependent Claim
26 words
A process according to claim 2, wherein the pulse duration of the microwave pulses is 0.5-2 ms and the intervals between microwave pulses is 10-100 ms.
Claim 13
Dependent Claim
26 words
A process according to claim 1, wherein the source of Ti utilized in the microwave plasma CVD process is a titanium halide or an organotitanium compound.
Claim 14
Dependent Claim
48 words
A process according to claim 1, wherein said TiO 2 film contains up to 5% of at least one other metal oxide selected from the group consisting of ZnO, Nd 2 O 5 , Ta 2 O 5 , ZrO 2 , HfO 2 and SiO 2 .
Claim 15
Dependent Claim
32 words
An optical waveguide comprising a planar inorganic substrate coated with a TiO 2 film having a thickness of 0.1-0.3 μm, wherein said optical waveguide exhibits an attenuation of less than 5 dB/cm.
Claim 16
Dependent Claim
32 words
An optical waveguide comprising a planar inorganic substrate coated with a TiO 2 film having a thickness of 0.1-0.3 μm, wherein said optical waveguide exhibits an attenuation of less than 5 dB/cm.
Claim 17
Dependent Claim
17 words
An waveguide according to claim 14, wherein said waveguide exhibits an attenuation of less than 3 dB/cm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-03-14 | 1997-09-13 | 1998-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-14 | 2001-09-13 | 2002-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-14 | 2005-09-13 | 2006-03-15 | $7700.00 | Window Closed / Lapsed |