US4873118A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Oxygen glow treating of ZnO electrode for thin film silicon solar cell
Assignee: Atlantic Richfield Co
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Filing: 1988-11-18
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Granted: 1989-10-10
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Expires: 2008-11-18
Abstract
Abstract An improved method for making solar cells of the type wherein a thin film silicon hydrogen alloy structure is deposited upon a transparent zinc oxide conductive film. Before deposition of the TFS film, the zinc oxide film is treated with a glow discharge comprising oxygen.
Inventors
- 👤 Eric Elias
- 👤 Karl E. Knapp
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:39
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/138; C; C23; C23C; C23C16/00; C23C16/22; C23C16/24; C23C16/30; C23C16/40; C23C16/407; C23C16/56; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
66 words
In a process for production of a photoconductive device wherein a first conductive layer comprising ZnO is applied to a substrate, and a thin film silicon hydrogen alloy is applied to said first conductive layer, the improvement comprising: after applying said first conductive layer comprising ZnO to said substrate, treating said first conductive layer with a glow discharge in a gas containing a source of oxygen.
Claim 2
Dependent Claim
66 words
In a process for production of a photoconductive device wherein a first conductive layer comprising ZnO is applied to a substrate, and a thin film silicon hydrogen alloy is applied to said first conductive layer, the improvement comprising: after applying said first conductive layer comprising ZnO to said substrate, treating said first conductive layer with a glow discharge in a gas containing a source of oxygen.
Claim 3
Dependent Claim
41 words
The improved process of claim further including, after treating of said first conductive layer with a glow discharge in a gas containing source of oxygen, and without breaking vacuum, applying said thin film silicon hydrogen alloy by glow discharge in silane.
Claim 4
Dependent Claim
11 words
The improved process of claim 1 wherein said gas comprises oxygen.
Claim 5
Dependent Claim
18 words
The improved process of claim 1 wherein said gas comprises a mixture of oxygen and an inert gas.
Claim 6
Dependent Claim
19 words
The improved process of claim 4 wherein said inert gas includes one or more of argon, helium or nitrogen.
Claim 7
Dependent Claim
11 words
The improved process of claim 1 wherein said gas comprises air.
Claim 8
Dependent Claim
85 words
A process for making a photovoltaic device comprising: depositing a film of zinc oxide onto a substrate to form a first current collecting contact, treating said zinc oxide film with a glow discharge in a gas containing a source of oxygen, depositing on said zinc oxide film at least one film of silicon containing one or more of hydrogen and a conductivity modifying dopant, to form a photovoltaic structure, and depositing on said photovoltaic structure a conductive film to form a second current collecting contact.
Claim 9
Dependent Claim
85 words
A process for making a photovoltaic device comprising: depositing a film of zinc oxide onto a substrate to form a first current collecting contact, treating said zinc oxide film with a glow discharge in a gas containing a source of oxygen, depositing on said zinc oxide film at least one film of silicon containing one or more of hydrogen and a conductivity modifying dopant, to form a photovoltaic structure, and depositing on said photovoltaic structure a conductive film to form a second current collecting contact.
Claim 10
Dependent Claim
10 words
The process of claim 7 wherein said gas comprises oxygen.
Claim 11
Dependent Claim
17 words
The process of claim 7 wherein said gas comprises a mixture of oxygen and an inert gas.
Claim 12
Dependent Claim
18 words
The process of claim 9 wherein said insert gas includes one or more of argon, helium or nitrogen.
Claim 13
Dependent Claim
28 words
The process of claim 7 wherein said zinc oxide film is deposited by chemical vapor deposition from diethyl zinc, diborane and water vapor in an inert carrier gas.
Claim 14
Dependent Claim
17 words
The process of claim 7 wherein said second current collecting film comprises a conductive zinc oxide film.
Claim 15
Dependent Claim
10 words
The process of claim 7 wherein said gas comprises air.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-09 | 1993-04-10 | 1993-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-09 | 1997-04-10 | 1997-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-09 | 2001-04-10 | 2001-10-10 | $7700.00 | Window Closed / Lapsed |