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Patent US5278925A successfully refreshed from Google Patents.
US5278925A
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Integrated-optic waveguide devices and method
Assignee: Texas Instruments Inc
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Filing: 1993-04-13
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Granted: 1994-01-11
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Expires: 2013-04-13
Abstract
Abstract It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane. Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.
Inventors
- 👤 Robert M. Boysel
- 👤 Gregory A. Magel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:59
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B26/00; G02B26/02; G02F; G02F1/00; G02F1/01; G02F1/011; G02F1/0136; G02F1/0142; G02F1/29; G02F1/31; G02F1/313; G02F1/3132; G02F2201/00; G02F2201/06; G02F2203/00; G02F2203/07; G02F2203/22
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
111 words
An integrated-optic device comprising: a. a lower cladding layer; b. at least one electrode located under or upon a portion of said lower cladding so as to electrostatically deflect a membrane; c. a core layer of material with a higher index of refraction than said lower cladding upon said lower cladding; d. an upper cladding layer with a lower index of refraction than said core layer formed upon said core layer, said upper cladding being selectively removable; and e. a metal layer upon said upper cladding layer, wherein said metal layer has access holes for said selected removal of said upper cladding layer, said metal layer only supported at the edges.
Claim 2
Dependent Claim
111 words
An integrated-optic device comprising: a. a lower cladding layer; b. at least one electrode located under or upon a portion of said lower cladding so as to electrostatically deflect a membrane; c. a core layer of material with a higher index of refraction than said lower cladding upon said lower cladding; d. an upper cladding layer with a lower index of refraction than said core layer formed upon said core layer, said upper cladding being selectively removable; and e. a metal layer upon said upper cladding layer, wherein said metal layer has access holes for said selected removal of said upper cladding layer, said metal layer only supported at the edges.
Claim 3
Dependent Claim
13 words
The device of claim 1 wherein said lower cladding layer is a substrate.
Claim 4
Dependent Claim
17 words
The device of claim 1 wherein said lower cladding is of a different material than said substrate.
Claim 5
Dependent Claim
22 words
The device of claim 1 wherein said upper cladding is only partially removed, so said membrane is supported by remaining upper cladding.
Claim 6
Dependent Claim
29 words
The device of claim 1 wherein said metal layer forms supports, thereby allowing all of said upper cladding to be removed, so said metal layer is supported by metal.
Claim 7
Dependent Claim
15 words
The device of claim 1 wherein said core contains a channel waveguide traversing its length.
Claim 8
Dependent Claim
12 words
The device of claim 6 wherein said device constitutes an on/off switch.
Claim 9
Dependent Claim
42 words
The device of claim 6 wherein said upper cladding is removed with varying lateral extent along the length such that the width of the area where the spacer is removed is larger at one end of the device than at the other.
Claim 10
Dependent Claim
12 words
The device of claim 8 wherein said device constitutes a variable attenuator.
Claim 11
Dependent Claim
12 words
The device of claim 8 wherein said device constitutes an adjustable polarizer.
Claim 12
Dependent Claim
12 words
The device of claim 6 wherein said device constitutes a switchable polarizer.
Claim 13
Dependent Claim
32 words
The device of claim 1 wherein said core contains two channel waveguides traversing its length such that said waveguides come into close proximity to one another within the length of the device.
Claim 14
Dependent Claim
13 words
The device of claim 12 wherein said device constitutes a switchable directional coupler.
Claim 15
Dependent Claim
25 words
The device of claim 1 wherein said device also contains a buffer layer of lower refractive index than the core layer upon said core layer.
Claim 16
Dependent Claim
12 words
The device of claim 1 wherein said device constitutes an on/off switch.
Claim 17
Dependent Claim
42 words
The device of claim 1 wherein said upper cladding is removed with varying lateral extent along the length such that the width of the area where the spacer is removed is larger at one end of the device than at the other.
Claim 18
Dependent Claim
12 words
The device of claim 16 wherein said device constitutes a variable attenuator.
Claim 19
Dependent Claim
12 words
The device of claim 16 wherein said device constitutes an adjustable polarizer.
Claim 20
Dependent Claim
12 words
The device of claim 1 wherein said device constitutes a switchable polarizer.
Claim 21
Dependent Claim
18 words
The device of claim 1 wherein said core has a periodic spatial modulation of the effective refractive index.
Claim 22
Dependent Claim
13 words
The device of claim 20 wherein said device constitutes a switchable mode converter.
Claim 23
Dependent Claim
13 words
The device of claim 20 wherein said device constitutes a switchable Bragg reflector.
Claim 24
Dependent Claim
47 words
The device of claim 1 wherein there are a plurality of said electrodes, and wherein said metal layer is supported in such as manner as to form a series of membrane devices which are operable simultaneously to constitute a periodic spatial modulation of the effective refractive index.
Claim 25
Dependent Claim
13 words
The device of claim 23 wherein said device constitutes a switchable mode converter.
Claim 26
Dependent Claim
13 words
The device of claim 23 wherein said device constitutes a switchable Bragg reflector.
References Cited (Backward Citations)
US5000774A
Cited
US5178728A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-10 | 1997-07-12 | 1998-01-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-10 | 2001-07-12 | 2002-01-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-10 | 2005-07-12 | 2006-01-11 | $7700.00 | Window Closed / Lapsed |