US5178728A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated-optic waveguide devices and method
Assignee: Texas Instruments Inc
•
Filing: 1991-03-28
•
Granted: 1993-01-12
•
Expires: 2011-03-28
Abstract
Abstract It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane. Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.
Inventors
- 👤 Robert M. Boysel
- 👤 Gregory A. Magel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:36
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B26/00; G02B26/02; G02F; G02F1/00; G02F1/01; G02F1/011; G02F1/0136; G02F1/0142; G02F1/29; G02F1/31; G02F1/313; G02F1/3132; G02F2201/00; G02F2201/06; G02F2203/00; G02F2203/07; G02F2203/22
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
71 words
A method of manufacturing an integrated-optic device comprising: a. defining an electrode in a substrate; b. forming a lower cladding upon said substrate; c. forming a waveguide core upon said lower cladding; d. forming a spacer layer upon said core; e. covering said spacer layer with a metal film; f. patterning said film with an array of access holes; and g. etching to remove some or all of said spacer layer.
Claim 2
Independent Claim
71 words
A method of manufacturing an integrated-optic device comprising: a. defining an electrode in a substrate; b. forming a lower cladding upon said substrate; c. forming a waveguide core upon said lower cladding; d. forming a spacer layer upon said core; e. covering said spacer layer with a metal film; f. patterning said film with an array of access holes; and g. etching to remove some or all of said spacer layer.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein said defining step comprises implanting an electrode.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein said defining step comprises diffusing an electrode.
Claim 5
Dependent Claim
18 words
The method of claim 1 wherein said defining step comprises etching said substrate and patterning it with metal.
Claim 6
Dependent Claim
18 words
The method of claim 1 wherein said forming a lower cladding step comprises thermal oxidation of said substrate.
Claim 7
Dependent Claim
24 words
The method of claim 1 wherein said forming a waveguide core step comprises low pressure chemical vapor deposition of Si 3 N 4 .
Claim 8
Dependent Claim
13 words
The method of claim 1 wherein said covering step comprises sputtering said metal.
Claim 9
Dependent Claim
13 words
The method of claim 1 wherein said covering step comprises evaporating said metal.
Claim 10
Dependent Claim
17 words
The method of claim 1 wherein said etching to remove said spacer step comprises a plasma etch.
Claim 11
Dependent Claim
19 words
The method of claim 1 wherein said forming a waveguide core step includes forming a ridge in said core.
Claim 12
Dependent Claim
20 words
The method of claim 1 wherein said forming a waveguide core step includes forming a buffer layer upon said core.
Claim 13
Dependent Claim
38 words
The method of claim 1 wherein said forming a waveguide core step includes forming a region of material that does not etch during said etching step leaving a small protrusion into the region where said spacer is removed.
Claim 14
Dependent Claim
27 words
The method of claim 1 wherein said forming a spacer layer step includes patterning said spacer so as to cause said covering step to form metal posts.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-12 | 1996-07-13 | 1997-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-12 | 2000-07-13 | 2001-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-12 | 2004-07-13 | 2005-01-12 | $7700.00 | Window Closed / Lapsed |