Method of masked two stage lithium niobate proton exchange

Claim 1

A method of fabricating an optical component in an optical waveguide, comprising the steps of: (a) masking a planar surface of an LiNbO 3 substrate with aluminum to form an exposed planar surface, having the configuration of a lens, on said substrate and treating said exposed planar surface of said LiNbO 3 substrate with molten benzoic acid at a temperature, and for a duration, sufficient to effect a first Li + /H + proton exchange within the portion of said substrate defined by the exposed planar surface in order to selectively alter refractive index of the region of said substrate defined by the exposed planar surface, said planar surface having the geometry of said lens; (b) thereafter thermally stabilizing said region by treating said region at a temperature of about 400° C. in a flow of oxygen; (c) masking a portion of said region thermally stabilized in step (b) photolithographically with an aluminum thin-film template while leaving a lens-shaped area of said region exposed through said thin-film template; and (d) treating said area in said region with molten benzoic containing about 1 mole percent dissolved lithium benzoate acid at a temperature of about 210° C. for a duration sufficient to effect a second Li + /H + proton exchange with the area of the substrate defined by said template in order to selectively alter the refractive index of said area without altering the refractive index of said portion of said region of said substrate.

Claim 2

A method of fabricating an optical component in an optical waveguide, comprising the steps of: (a) masking a planar surface of an LiNbO 3 substrate with aluminum to form an exposed planar surface, having the configuration of a lens, on said substrate and treating said exposed planar surface of said LiNbO 3 substrate with molten benzoic acid at a temperature, and for a duration, sufficient to effect a first Li + /H + proton exchange within the portion of said substrate defined by the exposed planar surface in order to selectively alter refractive index of the region of said substrate defined by the exposed planar surface, said planar surface having the geometry of said lens; (b) thereafter thermally stabilizing said region by treating said region at a temperature of about 400° C. in a flow of oxygen; (c) masking a portion of said region thermally stabilized in step (b) photolithographically with an aluminum thin-film template while leaving a lens-shaped area of said region exposed through said thin-film template; and (d) treating said area in said region with molten benzoic containing about 1 mole percent dissolved lithium benzoate acid at a temperature of about 210° C. for a duration sufficient to effect a second Li + /H + proton exchange with the area of the substrate defined by said template in order to selectively alter the refractive index of said area without altering the refractive index of said portion of said region of said substrate.