Patent US5274268A successfully refreshed from Google Patents.
US5274268A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electric circuit having superconducting layered structure
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1991-11-25
•
Granted: 1993-12-28
•
Expires: 2011-11-25
Abstract
Abstract An electric circuit is provided on a semiconductor substrate with a supercoducting film. The surfaces being in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting film is not degraded.
Inventors
- 👤 Shumpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:17
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4484; H10D; H10D64/00; H10D64/60; H10D64/608; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0576; H10N60/0632; H10N60/0661; H10N60/0688; H10N60/0716; H10W20/01; H10W20/031; H10W20/064; H10W70/00; H10W70/60; H10W70/62; H10W70/66; H10W70/668; Y; Y10; Y10S; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/703
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
89 words
An electronic device comprising: a semiconductor substrate; a lead made of an oxide superconducting material formed above said substrate; and an insulating layer formed in contact with at least a portion of said lead, a portion of said insulating layer located above said superconducting lead to effect insulation of the lead from other structures of the device, wherein the surface of the insulating layer which contacts said lead is made of a non-oxide insulating material, whereby said insulating layer surface is rendered substantially noninteractive with said oxide superconducting material.
Claim 2
Dependent Claim
89 words
An electronic device comprising: a semiconductor substrate; a lead made of an oxide superconducting material formed above said substrate; and an insulating layer formed in contact with at least a portion of said lead, a portion of said insulating layer located above said superconducting lead to effect insulation of the lead from other structures of the device, wherein the surface of the insulating layer which contacts said lead is made of a non-oxide insulating material, whereby said insulating layer surface is rendered substantially noninteractive with said oxide superconducting material.
Claim 3
Dependent Claim
20 words
The device of claim 1 wherein a further portion of said insulating layer is interposed between said substrate and lead.
Claim 4
Dependent Claim
25 words
The device of claim 1 wherein said insulating layer comprises a material selected from the group consisting of silicon nitride, aluminum nitride, and titanium nitride.
Claim 5
Dependent Claim
12 words
The device of claim 1 wherein said insulating layer comprises a carbide.
Claim 6
Dependent Claim
22 words
The device of claim 4 wherein said carbide comprises a material selected from the group consisting of silicon carbide and titanium carbide.
Claim 7
Dependent Claim
17 words
The device of claim 1 wherein at least one active element is formed within said semiconductor substrate.
Claim 8
Dependent Claim
18 words
The device of claim 6 wherein said active element is one of an IG-FET, bipolar transistor, and SIT.
Claim 9
Dependent Claim
11 words
The device of claim 1 wherein said semiconductor substrate comprises silicon.
Claim 10
Dependent Claim
11 words
The device of claim 1 wherein said semiconductor substrate comprises GaAs.
Claim 11
Dependent Claim
35 words
The device of claim 6 wherein said insulating layer comprises an insulating film and said superconducting lead is electrically connected with a terminal of said active element through a hole opened in said insulating film.
Claim 12
Dependent Claim
22 words
The device of claim 1 wherein insulating layer has a laminated structure comprising an oxide insulating layer and a non-oxide insulating layer.
Claim 13
Dependent Claim
85 words
The device of claim 1 wherein said oxide superconducting material is represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w where A comprises at least one element from Group IIIa of the Periodic Table, B comprises at least one element from Group IIa of the Periodic Table, and x has a value in the range from 0-1, y has a value in the range from 2-4, z has a value in the range from 1-4, and w has a value in the range from 4-10.
Claim 14
Dependent Claim
18 words
The device of claim 12 wherein said oxide superconducting material is YBa 2 Cu 3 O 6-8 .
Claim 15
Dependent Claim
85 words
The device of claim 1 wherein said oxide superconducting material is represented by a general formula: (A.sub.1-x B.sub.X).sub.y Cu.sub.z O.sub.w where A comprises at least one element from Group Vb of the Periodic Table, B comprises at least one element from Group IIa of the Periodic Table, and x has a value in the range from 0.3-1, y has a value in the range from 2-4, z has a value in the range from 1-4, and w has a value in the range from 4-10.
References Cited (Backward Citations)
JPS58141572A
Cited
JPS59208821A
Cited
JPS6270295A
Cited
JPS62171995A
Cited
US4960751A
Cited
US5001108A
Cited
US4837609A
Cited
US4940693A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-27 | 1997-06-28 | 1997-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-27 | 2001-06-28 | 2001-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-27 | 2005-06-28 | 2005-12-28 | $7700.00 | Window Closed / Lapsed |