US4960751A
Expired / Lapsed
US
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Electric circuit having superconducting multilayered structure and manufacturing method for same
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-03-29
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Granted: 1990-10-02
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Expires: 2008-03-29
Abstract
Abstract An electric circuit is provided on a semiconductor substrate with a superconducting film. The surfaces being in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting film is not degraded.
Inventors
- 👤 Shumpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 12:52
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/80; H10N60/85; H10N60/855; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4484; H10D; H10D64/00; H10D64/60; H10D64/608; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0576; H10N60/0632; H10N60/0661; H10N60/0688; H10N60/0716; H10W20/01; H10W20/031; H10W20/064; H10W70/00; H10W70/60; H10W70/62; H10W70/66; H10W70/668; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9265; Y10S428/93; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/703; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
75 words
A superconducting pattern formed on a substrate coated with an insulating film made of an oxide, characterized in that said pattern is made of a copper oxide superconducting ceramic comprising rare earth and alkaline earth elements and that said pattern is prevented by an intervening non-oxide film, selected from the group comprising silicon nitride, aluminum nitride, titantium nitride, silicon carbide, titanium carbide, diamond-like carbon and diamond from being in direct contact with said insulating film.
Claim 2
Dependent Claim
75 words
A superconducting pattern formed on a substrate coated with an insulating film made of an oxide, characterized in that said pattern is made of a copper oxide superconducting ceramic comprising rare earth and alkaline earth elements and that said pattern is prevented by an intervening non-oxide film, selected from the group comprising silicon nitride, aluminum nitride, titantium nitride, silicon carbide, titanium carbide, diamond-like carbon and diamond from being in direct contact with said insulating film.
Claim 3
Dependent Claim
13 words
The superconducting pattern of claim 1 wherein said substrate is a ceramic substrate.
Claim 4
Dependent Claim
16 words
The superconducting pattern of claim 2 wherein said superconducting pattern is directly formed on said substrate.
Claim 5
Dependent Claim
12 words
The pattern of claim 1 wherein said substrate is a semiconductor substrate.
Claim 6
Dependent Claim
13 words
The pattern of claim 4 wherein said semiconductor substrate contains a semiconductor device.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-01 | 1994-04-02 | 1994-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-01 | 1998-04-02 | 1998-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-01 | 2002-04-02 | 2002-10-02 | $7700.00 | Window Closed / Lapsed |