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US5264725A Expired / Lapsed US ⏱️ 0.0 years remaining

Low-current polysilicon fuse

Assignee: Micron Technology Inc
•
Filing: 1992-12-07
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Granted: 1993-11-23
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Expires: 2012-12-07
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Abstract

Abstract A submicron-width fuse element is disclosed that protects peripheral DRAM chip devices from low current failures below the range of metal fuse elements. In a specific application, the fuse elements are used to protect a DRAM chip from dielectric failure of voltage supply filtering capacitors. A low cross-section and length allows minimum space for the element.

Inventors

  • 👤 Patrick J. Mullarkey
  • 👤 Kurt D. Beigel

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 07:47
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 2
Dependent Claim 138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 3
Dependent Claim 153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor, wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 in Å height and, wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 4
Dependent Claim 153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor, wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 in Å height and, wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 5
Dependent Claim 138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 6
Dependent Claim 138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 7
Dependent Claim 153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 Å in height, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 8
Dependent Claim 153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 Å in height, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-11-22 1997-05-24 1997-11-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-11-22 2001-05-24 2001-11-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-11-22 2005-05-24 2005-11-23 $7700.00 Window Closed / Lapsed

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