US5264725A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Low-current polysilicon fuse
Assignee: Micron Technology Inc
•
Filing: 1992-12-07
•
Granted: 1993-11-23
•
Expires: 2012-12-07
Abstract
Abstract A submicron-width fuse element is disclosed that protects peripheral DRAM chip devices from low current failures below the range of metal fuse elements. In a specific application, the fuse elements are used to protect a DRAM chip from dielectric failure of voltage supply filtering capacitors. A low cross-section and length allows minimum space for the element.
Inventors
- 👤 Patrick J. Mullarkey
- 👤 Kurt D. Beigel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:47
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 2
Dependent Claim
138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 3
Dependent Claim
153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor, wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 in Å height and, wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 4
Dependent Claim
153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 1.5 μm width, 0.63 μm height, and 90 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor, wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 in Å height and, wherein a low but destructive current of about 24 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 5
Dependent Claim
138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 6
Dependent Claim
138 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a peripheral noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and electrical device consist of a top layer of polysilicon, a middle layer of tungsten silicide, and a bottom layer of silicon oxide, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 7
Dependent Claim
153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 Å in height, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
Claim 8
Dependent Claim
153 words
In an integrated circuit semiconductor chip, a low-current, interrupting, polysilicon fuse for protecting a chip peripheral, noise-filtering capacitor comprising: a. a first electrical conducting means connecting to the capacitor; b. a reduced cross-section fuse element of about 2.5 μm length, 0.6 μm width, 0.63 μm height, and 50 ohms resistance, planar with the capacitor connecting to the first conducting means; and c. a second fuse conducting means connecting to the fuse element and connecting by a plurality of contacts to a power supply conductor wherein the fuse element, fuse conducting means, and capacitor consist of a top layer of polysilicon about 1800 Å in height, a middle layer of tungsten silicide about 1200 Å in height, and a bottom layer of silicon oxide about 3300 Å in height, and wherein a low but destructive current of about 38 milliamps within the capacitor causes current interruption by the fuse element, thereby preventing chip failure.
References Cited (Backward Citations)
US4210875A
Cited
US4413272A
Cited
US4518981A
Cited
US4598462A
Cited
US4796075A
Cited
US4647340A
Cited
US4823181A
Cited
US4935801A
Cited
US5018532A
Cited
US5059555A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |