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Physical vapor deposition of titanium nitride on a nonconductive substrate

Assignee: Kennametal Inc
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Filing: 1992-04-01
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Granted: 1993-11-23
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Expires: 2012-04-01
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Abstract

Abstract A process for physical vapor deposition of a refractory coating such as titanium nitride on a nonconductive substrate such as a ceramic substrate and the coated substrate produced thereby. The nonconductive substrate is coated by cleaning the nonconductive substrate surfaces and then depositing a first layer of a refractory metal such as titanium metal on the nonconductive substrate by physical vapor deposition. A second layer of a refractory compound such as titanium nitride is then deposited on the first layer by physical vapor deposition to produce a coated nonconductive substrate having enhanced coating adhesion.

Inventors

  • 👤 Prem C. Jindal
  • 👤 Dennis T. Quinto

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 19:42
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/52; C04B41/53; C04B41/5338; C04B41/5346; C04B41/80; C04B41/81; C04B41/89; C04B41/91; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/022; C23C14/024; C23C14/025; C23C14/06; C23C14/0641; C23C14/14; C23C14/18; Y; Y10; Y10T; Y10T407/00; Y10T407/27; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 84 words
A tool insert coated by physical vapor deposition using an applied electrical bias comprising: (a) a nonconductive ceramic substrate; (b) a first layer of titanium deposited by physical vapor deposition on said ceramic substrate; (c) a second layer of titanium nitride adherently deposited on said first layer by physical vapor deposition; and (d) wherein said tool insert is a metal cutting insert having a flank face, a rake face and a cutting edge at the juncture of said flank face and said rake face.
Claim 2
Dependent Claim 84 words
A tool insert coated by physical vapor deposition using an applied electrical bias comprising: (a) a nonconductive ceramic substrate; (b) a first layer of titanium deposited by physical vapor deposition on said ceramic substrate; (c) a second layer of titanium nitride adherently deposited on said first layer by physical vapor deposition; and (d) wherein said tool insert is a metal cutting insert having a flank face, a rake face and a cutting edge at the juncture of said flank face and said rake face.
Claim 3
Dependent Claim 20 words
The tool insert as set forth in claim 1 wherein said titanium nitride layer is at least 2 micrometers thick.
Claim 4
Dependent Claim 33 words
The tool insert as set forth in claim 1 wherein the adhesion level of said titanium nitride layer to said ceramic substrate surfaces is at least 60 kg in the indentation adhesion test.
Claim 5
Dependent Claim 21 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 based ceramic.
Claim 6
Dependent Claim 26 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 based ceramic having SiC whiskers dispersed therein.
Claim 7
Dependent Claim 26 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 based ceramic having ZrO 2 dispersed therein.
Claim 8
Dependent Claim 25 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 based ceramic having TiC dispersed therein.
Claim 9
Dependent Claim 29 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 -based ceramic having SiC whiskers and ZrO 2 dispersed therein.
Claim 10
Dependent Claim 26 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 -based ceramic having TiC whiskers dispersed therein.
Claim 11
Dependent Claim 31 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is an Al 2 O 3 -based ceramic including magnesia and SiC whiskers and ZrO 2 dispersed therein.
Claim 12
Dependent Claim 24 words
The tool insert as set forth in claim 1 wherein said ceramic substrate is selected from the group consisting of silicon nitrides and sialons.
Claim 13
Dependent Claim 22 words
The tool insert as set forth in claim 1 wherein said ceramic substrate consists essentially of beta-prime sialon and a glassy phase.
Claim 14
Dependent Claim 24 words
The tool insert as set forth in claim 1 wherein said ceramic substrate consists essentially of alpha-prime sialon, beta-prime sialon and a glassy phase.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-11-22 1997-05-24 1997-11-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-11-22 2001-05-24 2001-11-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-11-22 2005-05-24 2005-11-23 $7700.00 Window Closed / Lapsed

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