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US4507189A Expired / Lapsed US ⏱️ 0.0 years remaining

Process of physical vapor deposition

Assignee: Sumitomo Electric Industries Ltd
•
Filing: 1981-10-30
•
Granted: 1985-03-26
•
Expires: 2001-10-30
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Abstract

Abstract The present invention relates to a process of physical vapor deposition which homogeneously and tightly coats hard compounds on the surface of cutting tools, parts requiring wear resistance or ornaments such as a watch case and the like in order to improve wear resistance, heat resistance, corrosion resistance, appearance and the like of said tools, parts or ornaments. The present invention can provide a method of physically coating a solid solution consisting of at least one compound selected from the group consisting of carbides, nitrides or oxides of metals belonging to IVb, Vb and VIb groups of the Periodic Table and/or aluminum oxide and zirconium oxide on the surface of said tools, parts or ornaments in the form of a single layer or multiple-layers, wherein the surface of said tools and the like is subjected to sputter cleaning in the atmosphere of hydrogen or the gaseous mixture of hydrogen and inert gas wherein hydrogen is present at 20% by volume or more, to homogeneously clean said surface of said tools and the like and as a result, the adhesion of the coating consisting of said compounds on said tools and the like is improved and equalized. Thus the above-mentioned properties of said tools and the like is further improved.

Inventors

  • 👤 Yoshihiko Doi
  • 👤 Yoshiki Maeda
  • 👤 Mitsunori Kobayashi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 16:19
CPC Classifications
B; B23; B23P; B23P15/00; B23P15/28; C; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/022; C23C30/00; C23C30/005

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 110 words
A process for physical vapor deposition which comprises coating at least one compound selected from the group consisting of carbides, nitrides or oxides of metals belonging to IVb, Vb and VIb groups of the Periodic Table, aluminum oxide and zirconium oxide or a solid solution consisting of said compounds on the surface of a substrate, wherein said surface prior to coating is subjected to sputter cleaning in an atmosphere of hydrogen or a gaseous mixture of hydrogen and inert gas wherein hydrogen is present at 20% by volume or more, to increase and homogenize the adhesive strength of said coating of said compound or said solid solution on said substrate.
Claim 2
Dependent Claim 110 words
A process for physical vapor deposition which comprises coating at least one compound selected from the group consisting of carbides, nitrides or oxides of metals belonging to IVb, Vb and VIb groups of the Periodic Table, aluminum oxide and zirconium oxide or a solid solution consisting of said compounds on the surface of a substrate, wherein said surface prior to coating is subjected to sputter cleaning in an atmosphere of hydrogen or a gaseous mixture of hydrogen and inert gas wherein hydrogen is present at 20% by volume or more, to increase and homogenize the adhesive strength of said coating of said compound or said solid solution on said substrate.
Claim 3
Dependent Claim 16 words
The process of physical vapor deposition according to claim 1, wherein said substrate is high-speed steel.
Claim 4
Dependent Claim 18 words
The process of physical vapor deposition according to claim 1, wherein said substrate is cemented carbide or cermet.
Claim 5
Dependent Claim 39 words
The process of physical vapor deposition according to claim 1, wherein said coating is made of carbides, nitrides and carbonitrides of titanium or a solid solution of the B-1 type thereof containing oxygen or aluminum oxide or zirconium oxide.
Claim 6
Dependent Claim 23 words
The process of physical vapor deposition according to claim 1, wherein said vapor deposition is carried out by the reactive ion plating method.
Claim 7
Dependent Claim 23 words
The process of physical vapor deposition according to claim 1, wherein said substrate is a cutting tool having an uneven surface with indentations.
Claim 8
Dependent Claim 23 words
The process of physical vapor deposition according to claim 2, wherein said substrate is a cutting tool having an uneven surface with indentations.
Claim 9
Dependent Claim 23 words
The process of physical vapor deposition according to claim 3, wherein said substrate is a cutting tool having an uneven surface with indentations.
Claim 10
Dependent Claim 23 words
The process of physical vapor deposition according to claim 4, wherein said substrate is a cutting tool having an uneven surface with indentations.
Claim 11
Dependent Claim 23 words
The process of physical vapor deposition according to claim 5, wherein said substrate is a cutting tool having an uneven surface with indentations.
Claim 12
Dependent Claim 16 words
The process of physical vapor deposition according to claim 1, wherein said coating is titanium carbide.
Claim 13
Dependent Claim 23 words
The process of physical vapor deposition according to claim 1, wherein said coating is Ti(C 0 .28 N 0 .54 O 0 .18).
Claim 14
Dependent Claim 28 words
The process according to claim 1 wherein said atmosphere contains a mixture of hydrogen and an inert gas, wherein hydrogen is present at 20% by volume or more.

References Cited (Backward Citations)

US3411938A Cited
US3915757A Cited
US4054426A Cited
JPS529688A Cited
US4082637A Cited
US4346123A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-03-25 1988-09-24 1989-03-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-03-25 1992-09-24 1993-03-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-03-25 1996-09-24 1997-03-26 $7700.00 Window Closed / Lapsed

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