US5254218A
Expired / Lapsed
US
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Masking layer having narrow isolated spacings and the method for forming said masking layer and the method for forming narrow isolated trenches defined by said masking layer
Assignee: Micron Technology Inc
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Filing: 1992-04-22
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Granted: 1993-10-19
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Expires: 2012-04-22
Abstract
Abstract A process for forming within a masking layer self-aligned narrow isolated spacings having a width that is substantially narrower than the space width that can be created directly using the maximum resolution of available photolithography and the process for utilizing said masking layer to form narrow isolated trenches in a semiconductor substrate. The process involves the following steps: creation of a mask island using conventional photomasking and etching techniques, opposing sides of said island defining the inner walls of the narrow isolated spacings; blanket deposition of a spacer layer, the thickness of which is equal to the desired width of the narrow isolated spacings; blanket deposition of a thick protective layer that is independently etchable over the spacer layer; planarization of the protective layer to or below the top of the spacer layer; masking at least a width equal to the thickness of the spacer layer at two opposing ends of the mask island; and isotropically etching the unmasked spacer layer to form the narrow isolated spacings. Said process thereby creating the masking layer having self-aligned narrow isolated spacings exposing the substrate. At this point the mask protecting the opposing end of the mask island may be removed and the exposed substrate may be etched to form narrow isolated trenches.
Inventors
- 👤 Ceredig Roberts
- 👤 Alan Reinberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:03
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/693; H10P50/695; H10P14/00; H10P14/60; H10P14/61; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/10; H10W10/13; Y; Y10; Y10S; Y10S148/00; Y10S148/05; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
365 words
A process for creating an etch mask having isolated spacings, said isolated spacings, said process for creating the etch mask comprising the following steps: a) creating a mask island on starting substrate, said island having a first pair of opposing exterior walls and a second pair of opposing exterior walls; b) blanket depositing a spacer layer overlying said starting substrate and said mask island, said spacer layer being etchable with a significant degree of selectivity over said mask island, said spacer layer having a given thickness which substantially corresponds to a desired width of the isolated spacings, said spacer layer having a first pair of opposing ends and a second pair of opposing ends, said first pair of opposing ends adjacent to said first pair of opposing exterior walls and said second pair of opposing ends adjacent to said second pair of opposing exterior walls, said first and second pairs of opposing ends having a width equal to the given thickness; c) blanket depositing a protective layer overlying said spacer layer, said spacer layer capable of being distinctly etchable over said protective layer; d) removing at least a portion of said protective layer to a level at or below an initial top surface of said spacer layer to expose a first portion of said spacer layer, a second portion of the spacer layer at a distance from the island greater than said given thickness remaining covered by a remaining portion of said protective layer; e) masking said first pair of opposing ends, said second pair of opposing ends and said first portion of said spacer layer interposed between said second pair of opposing ends remaining exposed; and f) removing said spacer layer remaining exposed subsequent to said masking said first pair of opposing ends to create the etch mask having the isolated spacings, each of the isolated spacings having an inner wall and an outer wall, each of said inner walls self aligned to one of said opposing walls of said second pair of opposing walls, and said outer walls self aligned to said remaining portion of said protective layer and said second portion of said spacer layer, said isolated spacings having said desired width.
Claim 2
Dependent Claim
365 words
A process for creating an etch mask having isolated spacings, said isolated spacings, said process for creating the etch mask comprising the following steps: a) creating a mask island on starting substrate, said island having a first pair of opposing exterior walls and a second pair of opposing exterior walls; b) blanket depositing a spacer layer overlying said starting substrate and said mask island, said spacer layer being etchable with a significant degree of selectivity over said mask island, said spacer layer having a given thickness which substantially corresponds to a desired width of the isolated spacings, said spacer layer having a first pair of opposing ends and a second pair of opposing ends, said first pair of opposing ends adjacent to said first pair of opposing exterior walls and said second pair of opposing ends adjacent to said second pair of opposing exterior walls, said first and second pairs of opposing ends having a width equal to the given thickness; c) blanket depositing a protective layer overlying said spacer layer, said spacer layer capable of being distinctly etchable over said protective layer; d) removing at least a portion of said protective layer to a level at or below an initial top surface of said spacer layer to expose a first portion of said spacer layer, a second portion of the spacer layer at a distance from the island greater than said given thickness remaining covered by a remaining portion of said protective layer; e) masking said first pair of opposing ends, said second pair of opposing ends and said first portion of said spacer layer interposed between said second pair of opposing ends remaining exposed; and f) removing said spacer layer remaining exposed subsequent to said masking said first pair of opposing ends to create the etch mask having the isolated spacings, each of the isolated spacings having an inner wall and an outer wall, each of said inner walls self aligned to one of said opposing walls of said second pair of opposing walls, and said outer walls self aligned to said remaining portion of said protective layer and said second portion of said spacer layer, said isolated spacings having said desired width.
Claim 3
Dependent Claim
71 words
The process as specified in claim 1, further comprising exposing said starting substrate in exposed areas defined by the etch mask, each of said exposed areas self aligned to one of said opposing walls of said second pair of opposing walls and each of said exposed area self-aligned to said remaining portion of said protective layer and said second portion of said spacer layer, said exposed areas having said desired width.
Claim 4
Dependent Claim
70 words
The process of claim 2, further comprising etching said starting substrate in said exposed areas to form isolated trenches in said starting substrate, said etch mask providing a pattern for said etching such that said isolated trenches have a width substantially equal to the given thickness of said spacer layer, said etching terminated in order to eliminate etching of said starting substrate underlying said second portion of said spacer layer.
Claim 5
Dependent Claim
15 words
The process of claim 3, further comprising oxidizing at least said isolated trenches with oxide
Claim 6
Dependent Claim
18 words
The process of claim 4, wherein said oxidizing comprises thermally growing oxide from sidewalls of said isolated trenches.
Claim 7
Dependent Claim
15 words
The process of claim 4, wherein said oxidizing comprises depositing oxide in said isolated trenches.
Claim 8
Dependent Claim
21 words
The process of claim 4, further comprising removing excess portions of said oxide while retaining said oxide in said isolated trenches.
Claim 9
Dependent Claim
28 words
The process as specified in claim 7, wherein said removing said excess portions of said oxide further comprises: a) planarizing said oxide; and b) dipping off said oxide.
Claim 10
Dependent Claim
43 words
The process as specified in claim 1, further comprising fabricating a plurality of mask islands according to steps a)-f) of claim 1, said fabricating creating a total of said isolated spacings equal to twice a total of said mask islands of said plurality.
Claim 11
Dependent Claim
44 words
The process of claim 1, wherein said creating said mask island further comprises the following steps: a) depositing a base layer overlying said starting substrate; b) patterning said base layer with photoresist; and c) anisotropically etching said base layer to create said mask island.
Claim 12
Dependent Claim
125 words
The process of claim 1, wherein said creating said mask island further comprises the following steps: a) oxidizing said starting substrate to form a thin oxidized layer of substrate overlying said starting substrate; b) depositing a nitride layer overlying said oxidized layer of substrate; c) depositing a base layer overlying said nitride layer; d) patterning the base layer with photoresist; e) a first anisotropic etching of said base layer according to said patterning; f) a second anisotropic etching of said nitride layer according to said patterning, said first and second etchings creating a mask island of said nitride and said base layer; and g) reoxidizing said starting substrate to replenish any portions of said oxidized layer of substrate removed during said first and second etchings.
Claim 13
Dependent Claim
64 words
The process of claim 11, further comprising exposing said starting substrate in areas defined by the etch mask by overetching said oxidized substrate to form exposed areas, each of said exposed areas self aligned to one of said opposing walls of said second pair of opposing walls and to said remaining portion of said protective layer and said second portion of said spacer layer.
Claim 14
Dependent Claim
17 words
The process of claim 11, wherein said oxidizing further comprises elevating a temperature of said starting substrate.
Claim 15
Dependent Claim
23 words
The process of claim 11, where said depositing said nitride layer further comprises depositing said nitride by a low pressure chemical vapor deposition.
Claim 16
Dependent Claim
13 words
The process of claim 11, wherein said patterning further comprises depositing a photoresist.
Claim 17
Dependent Claim
12 words
The process of claim 11, wherein said base layer is silicon dioxide.
Claim 18
Dependent Claim
61 words
The process of claim 1, wherein said removing at least a portion of said protective layer further comprises: a) depositing a planarized layer of photoresist resin overlying said protective layer; and b) etching said photoresist resin layer and said protective layer, and etch rate of said photoresist resin layer and an etch rate of said protective layer being substantially the same.
Claim 19
Dependent Claim
30 words
The process of claim 17, wherein removing at least a portion of said protective layer further comprises etching said photoresist resin and said protective layer using an isotropic plasma etch.
Claim 20
Dependent Claim
24 words
The process of claim 1, wherein said removing at least a portion of said protective layer further comprises planarizing at least said protective layer.
Claim 21
Dependent Claim
18 words
The process of claim 1, wherein said removing said spacer layer further comprises etching said spacer layer isotopically.
Claim 22
Dependent Claim
12 words
The process of claim 1, wherein said spacer layer is polycrystalline silicon.
Claim 23
Dependent Claim
12 words
The process of claim 1, wherein said protective layer is an oxide.
Claim 24
Dependent Claim
24 words
The process of claim 1, wherein said depositing said spacer layer further comprises depositing said spacer layer by a low pressure chemical vapor deposition.
Claim 25
Dependent Claim
24 words
The process of claim 1, wherein said depositing said protective layer further comprises depositing said protective layer by a low pressure chemical vapor deposition.
Claim 26
Dependent Claim
22 words
The process of claim 1, wherein said depositing said protective layer further comprising depositing said protective layer by tetra ethyl ortho silicate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-18 | 1997-04-19 | 1997-10-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-18 | 2001-04-19 | 2001-10-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-18 | 2005-04-19 | 2005-10-19 | $7700.00 | Window Closed / Lapsed |