US5047117A
Expired / Lapsed
US
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Method of forming a narrow self-aligned, annular opening in a masking layer
Assignee: Micron Technology Inc
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Filing: 1990-09-26
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Granted: 1991-09-10
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Expires: 2010-09-26
Abstract
Abstract A process for forming within a masking layer a self-aligned annular opening having a width that is substantially narrower than the space width that can be created directly using the maximum resolution of available photolithography. The process involves the following steps: creation of a mask island using conventional photomasking and etching techniques, the perimeter of said island defining the inner perimeter of the perimetric annular opening; blanket deposition of a spacer layer, the thickness of which is equal to the desired width of the annular opening; a blanket deposition of a thick protective layer that is independently etchable over the spacer layer; planarization of the protection layer to or below the top of the spacer layer; and isotropically etching the exposed spacer layer to form a narrow annular opening exposing the substrate. At this point the exposed substrate may be trenched in order to isolate the area definedd by the island, or it may be fabricated in some other configuration. This method of forming an annular opening within a mask region results in a narrow annular opening that is self-aligned with the mask island and the non-etched spacer layer. Subsequent trench fabrication has the self-alignment features of the narrow annular opening. Both the position and width of the narrow annular opening, and therefore the trench, are highly predictable and the method requires minimum masking steps. The narrowness of the annular opening also maximizes die space.
Inventors
- 👤 Martin C. Roberts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 08:08
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/10; H10W10/13; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/693; H10P50/695; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10W10/01; H10W10/011; H10W10/012; H10W10/0121; H10W10/061; H10W10/181; H10W10/021; H10W10/20; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
246 words
A process for creating an etch mask having an annular opening, said annular opening having a width that is less than the resolution limit of the employed photolithographic process, said process for creating comprising the following sequence of steps; (a) creation of a mask island on substrate, said island perimeter defining the inner perimeter of the annular opening; (b) blanket deposition of a spacer layer over the substrate and said island, the spacer layer being etchable with a significant degree of selectivity over said island, the spacer layer having a given thickness which substantially corresponds to a desired width of the annular opening; (c) blanket deposition of a protective layer over the spacer layer, the protective layer and the spacer layer being distinctly etchable with respect to each other; (d) planarization of the protective layer to a level at or below the top of the spacer layer to expose a portion of the spacer layer, the spacer layer at a distance from the island greater than said given thickness remaining covered by the protective layer; and (e) etching the exposed spacer layer to create said annular opening in said etch mask, said annular opening having an inner perimeter self aligned to the island perimeter and having an outer perimeter self aligned to the remaining protective layer and covered spacer layer, said annular ring having said desired width, and said etching exposing the substrate adjacent to the annular ring, the exposed substrate equal to said desired width.
Claim 2
Dependent Claim
246 words
A process for creating an etch mask having an annular opening, said annular opening having a width that is less than the resolution limit of the employed photolithographic process, said process for creating comprising the following sequence of steps; (a) creation of a mask island on substrate, said island perimeter defining the inner perimeter of the annular opening; (b) blanket deposition of a spacer layer over the substrate and said island, the spacer layer being etchable with a significant degree of selectivity over said island, the spacer layer having a given thickness which substantially corresponds to a desired width of the annular opening; (c) blanket deposition of a protective layer over the spacer layer, the protective layer and the spacer layer being distinctly etchable with respect to each other; (d) planarization of the protective layer to a level at or below the top of the spacer layer to expose a portion of the spacer layer, the spacer layer at a distance from the island greater than said given thickness remaining covered by the protective layer; and (e) etching the exposed spacer layer to create said annular opening in said etch mask, said annular opening having an inner perimeter self aligned to the island perimeter and having an outer perimeter self aligned to the remaining protective layer and covered spacer layer, said annular ring having said desired width, and said etching exposing the substrate adjacent to the annular ring, the exposed substrate equal to said desired width.
Claim 3
Dependent Claim
44 words
The process of claim 1, wherein said creation of said mask island comprises the following sequence of steps: (a) depositing a base layer on the substrate; (b) patterning the base layer with photoresist; and (c) anisotropically etching the base layer to create an island.
Claim 4
Dependent Claim
96 words
The process of claim 1, wherein said creation of a mask island comprises the following sequence of steps: (a) oxidizing the substrate; (b) depositing a nitride layer on said oxidized substrate; (c) depositing a base layer on the nitride layer; (d) patterning the base layer with photoresist (e) a first anisotropic etching of the base layer according to said patterning; (f) a second anisotropic etching of the nitride layer according to said patterning, said first and second etchings creating a mask island of said nitride, said base layer, and oxidized substrate; and (g) reoxidizing the substrate.
Claim 5
Dependent Claim
27 words
The process of claim 3, wherein the substrate is exposed by overetching the reoxidized substrate after the spacer layer etching described in step (e) of claim 1.
Claim 6
Dependent Claim
38 words
The process of claim wherein planarization is accomplished by the following sequence of steps: (a) depositing a planarized layer of photoresist resin over said protective layer; and (b) etching of the photoresist resin layer and the protective layer.
Claim 7
Dependent Claim
22 words
The process of claim 5, wherein etching of the photoresist resin and the protective layer is accomplished with an isotropic plasma etch.
Claim 8
Dependent Claim
14 words
The process of claim 1, wherein the planarization is accomplished by a mechanical etch.
Claim 9
Dependent Claim
12 words
The process of claim 1 wherein said spacer layer is etched isotropically.
Claim 10
Dependent Claim
11 words
The process of claim 1 wherein the spacer layer is polysilicon.
Claim 11
Dependent Claim
11 words
The process of claim 1 wherein the protective layer is oxide.
Claim 12
Dependent Claim
12 words
The process of claim 2 wherein the base layer is silicon dioxide.
Claim 13
Dependent Claim
12 words
The process of claim 3 wherein the base layer is silicon dioxide.
Claim 14
Dependent Claim
12 words
The process of claim 1 wherein the polysilicon is deposited by LPCVD.
Claim 15
Dependent Claim
12 words
The process of claim 1 wherein oxidation is accomplished with elevated temperature.
Claim 16
Dependent Claim
12 words
The process of claim 1 wherein the nitride is deposited by LPCVD.
Claim 17
Dependent Claim
14 words
The process of claim 1 wherein the protective oxide layer is deposited by LPCVD.
Claim 18
Dependent Claim
14 words
The process of claim 1 wherein the protective oxide layer is deposited by TEOS.
Claim 19
Dependent Claim
28 words
The process of claim 1, further comprising (a) etching trenches in the exposed substrate; (b) etching away of said island after trench formation; and (c) oxidizing the trench.
Claim 20
Dependent Claim
11 words
The process of claim 18, wherein said trench etching is anisotropic.
Claim 21
Dependent Claim
11 words
The process of claim 18, wherein said island etching is isotropic.
Claim 22
Dependent Claim
16 words
The process of claim 18, wherein said said oxidation comprises thermally growing oxide from the sidewalls.
Claim 23
Dependent Claim
14 words
The process of claim 19, wherein said oxidation comprises depositing oxide in the trench.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-09 | 1995-03-11 | 1995-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-09 | 1999-03-11 | 1999-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-09 | 2003-03-11 | 2003-09-10 | $7700.00 | Window Closed / Lapsed |