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US5254141A Expired / Lapsed US ⏱️ 0.0 years remaining

Industrial diamond coating and method of manufacturing the same

Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1991-05-22
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Granted: 1993-10-19
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Expires: 2011-05-22
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Abstract

Abstract An industrial diamond coating on an object and a method of manufacturing the same are described. A diamond coating is first formed on a substrate other than the object to be coated. The diamond coating is then joined to the object by means of an adhesive. One of features of an industrial diamond coating of the present invention is heat resistance. This feature can be realized by subjecting a diamond coating to etching in order to eliminate carbon in the form other than diamond structure from the coating followed by filling void spaces occurring in the coating after the elimination with a heat resistant material. The substrate may be removed from the diamond film which is already fixed to the object to provide a hard surface for the object.

Inventors

  • 👤 Shunpei Yamazaki
  • 👤 Masaya Kadono

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 20:04
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/01; C23C16/277; C23C16/56; Y; Y10; Y10T; Y10T428/00; Y10T428/30

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 173 words
A coated article comprising: an article having at least one surface; and an industrial diamond coating provided on said surface where said coating comprises a number of CVD formed diamond crystals wherein spaces between the crystals are filled with a heat resistant, adhesive material which joins the diamond crystals to said one surface, said article formed by the steps comprising: forming said diamond crystals by CVD on a temporary substrate; attaching said substrate having said diamond crystals to said surface of the article using said adhesive material; removing said substrate from said article in order that said diamond crystals remain on said surface of the article; eliminating carbon in forms other than said diamond crystals from (a) the surface of said temporary substrate prior to the attachment of the substrate to the surface of the article or (b) the surface of said article after the removal of said substrate from the article; and filling void spaces occurring on the surface of said article with said adhesive material to form said industrial diamond coating.
Claim 2
Dependent Claim 173 words
A coated article comprising: an article having at least one surface; and an industrial diamond coating provided on said surface where said coating comprises a number of CVD formed diamond crystals wherein spaces between the crystals are filled with a heat resistant, adhesive material which joins the diamond crystals to said one surface, said article formed by the steps comprising: forming said diamond crystals by CVD on a temporary substrate; attaching said substrate having said diamond crystals to said surface of the article using said adhesive material; removing said substrate from said article in order that said diamond crystals remain on said surface of the article; eliminating carbon in forms other than said diamond crystals from (a) the surface of said temporary substrate prior to the attachment of the substrate to the surface of the article or (b) the surface of said article after the removal of said substrate from the article; and filling void spaces occurring on the surface of said article with said adhesive material to form said industrial diamond coating.
Claim 3
Dependent Claim 19 words
A coated article as in claim 1 where said one surface is a working surface of a machine tool.
Claim 4
Dependent Claim 30 words
A coated article as in claim 1 where said diamond crystals are substantially conical in shape where the bases of the conical shaped crystals substantially face toward said one surface.
Claim 5
Dependent Claim 23 words
A coated article as in claim 1 where said heat-resistant, adhesive material is selected from the group consisting of polybenzimidazole, epoxy/phenolic, and nitride/phenolic.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-10-18 1997-04-19 1997-10-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-10-18 2001-04-19 2001-10-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-10-18 2005-04-19 2005-10-19 $7700.00 Window Closed / Lapsed

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