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US5252850A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for contouring a semiconductor, light responsive array with a prescribed physical profile

Assignee: Roper Technologies Inc
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Filing: 1992-01-27
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Granted: 1993-10-12
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Expires: 2012-01-27
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Abstract

Abstract Large area semiconductor wafers such as CCDs typically have a non-flat profile. A vacuum chuck is used to generate a vacuum under the chip to reduce the curvature to conform to the flat profile of the substrate surface through which the vacuum is generated. Other than flat final profiles are useful also.

Inventors

  • 👤 William V. Schempp

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 11:59
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/78

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 61 words
Apparatus for mounting a semiconductor chip having an array of imaging cells for capturing an image incident thereto, said apparatus comprising a mounting assembly having a surface for juxtaposition with said chip, said mounting assembly including holes extending therethrough and communicating with said surface for permitting the formation of a vacuum therethrough for conforming a non planar chip to said surface.
Claim 2
Dependent Claim 61 words
Apparatus for mounting a semiconductor chip having an array of imaging cells for capturing an image incident thereto, said apparatus comprising a mounting assembly having a surface for juxtaposition with said chip, said mounting assembly including holes extending therethrough and communicating with said surface for permitting the formation of a vacuum therethrough for conforming a non planar chip to said surface.
Claim 3
Dependent Claim 26 words
Apparatus as set forth in claim 1 wherein said surface is flat, said surface being coated with an adhesive for securing said chip to said surface.
Claim 4
Dependent Claim 18 words
Apparatus as set forth in claim 2 wherein said mounting assembly comprises a rigid substrate for said chip.
Claim 5
Dependent Claim 20 words
Apparatus as set forth in claim 1 wherein said surface has a nonplanar profile different from that of said chip.
Claim 6
Dependent Claim 18 words
Apparatus as set forth in claim 4 wherein said mounting assembly comprises a rigid substrate for said chip.

References Cited (Backward Citations)

US3588018A Cited
US4884124A Cited
US4942454A Cited
US4962416A Cited
US4975765A Cited
US5072289A Cited
US5172301A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-10-11 1997-04-12 1997-10-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-10-11 2001-04-12 2001-10-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-10-11 2005-04-12 2005-10-12 $7700.00 Window Closed / Lapsed

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