Patent US5252294A successfully refreshed from Google Patents.
US5252294A
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Micromechanical structure
Assignee: Airbus Defence and Space GmbH
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Filing: 1992-02-03
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Granted: 1993-10-12
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Expires: 2012-02-03
Abstract
Abstract A micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.
Inventors
- 👤 Walter Kroy
- 👤 Helmut Seidel
- 👤 Eduard Dette
- 👤 Max Koniger
- 👤 Peter Deimel
- 👤 Florian Binder
- 👤 Reinhold Hilpert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 16:25
CPC Classifications
B; B01; B01L; B01L3/00; B01L3/50; B01L3/508; B01L3/5085; B01L3/50851; B01J; B01J19/00; B01J19/0093; B01L3/502; B01L3/5027; B01L3/50853; G; G01; G01N; G01N21/00; G01N21/17; G01N21/25; G01N21/255; G01N35/00; H; H10; H10N; H10N39/00; B01J2219/00; B01J2219/00781; B01J2219/00819; B01J2219/00835; B01L2200/00; B01L2200/12; B01L2300/00; B01L2300/06; B01L2300/0627; B01L2300/0645; B01L2300/0654; B01L2300/08; B01L2300/0809; B01L2300/0816; B01L2300/0819; B01L2400/00; B01L2400/06; B01L2400/0633; B01L3/5025; G01N1/00; G01N1/28; G01N21/55; G01N21/552; G01N2201/00; G01N2201/06; G01N2201/062; G01N2201/0622; G01N27/00; G01N27/26; G01N27/403; G01N27/414; G01N27/4145; G01N35/10; G01N35/1079
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
151 words
A micromechanical structure for investigation of sample substances in a targeted manner, comprising a masked-formed, etched structure with a plurality of depressions formed in an array that is made of at least one of a group of semiconductive materials, glass, ceramic, diamond, and carbon, the masked-formed, etched structure including a bottom structure, which has a plurality of depressions formed in an array, and a lid structure, which has a plurality of humps formed in an array, the lid and bottom structures being formed so the plurality of depressions and humps are at corresponding positions and have a same geometry, and so that when the lid structure is combined with the bottom structure, the plurality of corresponding depressions and humps are in alignment and form a plurality of microcontainments for containing one or more sample substances for evaluation and/or documentation of possible changes in one or more properties of the sample substances.
Claim 2
Dependent Claim
151 words
A micromechanical structure for investigation of sample substances in a targeted manner, comprising a masked-formed, etched structure with a plurality of depressions formed in an array that is made of at least one of a group of semiconductive materials, glass, ceramic, diamond, and carbon, the masked-formed, etched structure including a bottom structure, which has a plurality of depressions formed in an array, and a lid structure, which has a plurality of humps formed in an array, the lid and bottom structures being formed so the plurality of depressions and humps are at corresponding positions and have a same geometry, and so that when the lid structure is combined with the bottom structure, the plurality of corresponding depressions and humps are in alignment and form a plurality of microcontainments for containing one or more sample substances for evaluation and/or documentation of possible changes in one or more properties of the sample substances.
Claim 3
Dependent Claim
17 words
The micromechanical structure recited in claim 1, wherein the lid and bottom structures comprise the same material.
Claim 4
Dependent Claim
21 words
The micromechanical structure recited in claim 1, wherein the lid and bottom structures comprise silicon or another microcrystalline material or glass.
Claim 5
Dependent Claim
33 words
The micromechanical structure recited in claim 1, wherein the plurality of depressions are of defined form, size, arrangement, and distribution, and are in a surface of the bottom structure facing the lid structure.
Claim 6
Dependent Claim
18 words
The micromechanical structure recited in claim 4, wherein the lid structure fits hermetically tight on the bottom structure.
Claim 7
Dependent Claim
19 words
The micromechanical structure recited in claim 4, wherein the plurality of depressions are arranged in a predetermined spiral pattern.
Claim 8
Dependent Claim
49 words
The micromechanical structure recited in claim 4, wherein the lid structure has openings arranged in a same array as the depressions in the bottom structure, with the openings being capable of being closed, and wherein the lid structure further includes measuring and evaluating means for connection to computer means.
Claim 9
Dependent Claim
32 words
The micromechanical structure recited in claim 7, wherein the measuring and evaluating means are selected from the group consisting of optical, opto-electronic, electronic, piezoelectric, ferritic, magnetic, capacitive, ohmic or other measuring devices.
Claim 10
Dependent Claim
30 words
The micromechanical structure recited in claim 8, wherein the measuring and evaluating means are for individual measurements and evaluations of the individual contents of each of the plurality of depressions.
Claim 11
Dependent Claim
34 words
The micromechanical structure recited in claim 4, wherein a light waveguide distributes light into the plurality of depressions through the lid and bottom structures to evaluate changes in decoupled light by measuring transmitted intensity.
Claim 12
Dependent Claim
32 words
The micromechanical structure recited in claim 4, wherein the masked-formed, etched structure further comprises a detector for measuring external influences on the content of the individual depressions of the plurality of depressions.
Claim 13
Dependent Claim
40 words
The micromechanical structure recited in claim 1, wherein the arrangement of the plurality of depressions is provided in the array in matrix form, so that the matrix can be scanned by automatic filling or discharge and/or mixing and/or diluting/dosing means.
Claim 14
Dependent Claim
45 words
The micromechanical structure recited in claim 12, wherein the masked-formed, etched structure further comprises a plurality of microvalves which form a matrix which can be scanned in accordance with a predetermined program, the microvalves being arranged in the same array as the plurality of depressions.
Claim 15
Dependent Claim
36 words
The micromechanical structure recited in claim 1, wherein at least one depression of the plurality of depressions comprises a bio-sensor and/or biological-chemical sensor which includes a transistor containing a source and drain with a gate control.
Claim 16
Dependent Claim
32 words
The micromechanical structure recited in claim 1, wherein several of the masked-formed, etched structures are fixed onto a film carrier for transporting to a plurality of stations for automatic testing and evaluation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-11 | 1997-04-12 | 1997-10-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-11 | 2001-04-12 | 2001-10-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-11 | 2005-04-12 | 2005-10-12 | $7700.00 | Window Closed / Lapsed |