US4895615A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Monolithic fabrication techniques for front face optoelectronic couplers and/or optical components including ridge structured waveguides
Assignee: Siemens AG
•
Filing: 1989-03-03
•
Granted: 1990-01-23
•
Expires: 2009-03-03
Abstract
Abstract The invention involves a method for the monolithic fabrication of front face optoelectronic couplers and/or optical components (10) including a ridge structured waveguide (4) in which the light-coupling edges (2) of the component (10) using a mask in the desired structure are etched out of a wafer (1) of suitable material. With this method not only the light-coupling edges (2) of the component (10) but also the ridge waveguides (4) are readily fabricated in monolithic technology. To this end, the invention provides that the etched grooves (3) forming the light-coupling edges (2) with their side walls are covered with a first layer (5) of organic material which subsequently is removed outside the groove (3) so that the remaining residue at least nearly fills the etched groove (3), and that subsequently over the first a second layer (6) of organic material is applied which after appropriate treatment is used as etching mask for etching the predetermined ridge waveguide structure (4) out of the wafer (1). This method is particularly especially useful in the fabrication of MCRW (metal cladded ridge waveguide) lasers.
Inventors
- 👤 Markus Muschke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 16:28
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/01; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/136; G02B6/24; G02B6/42; H01; H01S; H01S5/00; H01S5/02; H01S5/0201; H01S5/026; H01S5/0203
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
196 words
A method for the monolithic fabrication of front face coupling of one of a group of components consisting of optoelectronic and optical components including a ridge waveguide structure in which the light-coupling edges of the component via a mask in the desired structure are etched out of a wafer of suitable material, which has been provided by at least one of a group processes consisting of an epitaxy-process, a diffusion-process and an implantation process with a sequence of layers depending on the component, the method comprising the steps of: covering etching grooves formed by either wet chemical or dry etching techniques having substantially perpendicular side walls serving as light-coupling edges of the component with suitable first layer of organic material; phototechnically removing the first layer of organic material in the region outside of the etched groove by incineration or by chemical exposure so that a remaining portion of the first layer at least substantially fills the etched groove; applying a second layer of organic material over the first layer; structuring the second layer of organic material to form a ridge waveguide etching mask, and etching the ridge waveguide structures using the mask out of the wafer.
Claim 2
Independent Claim
196 words
A method for the monolithic fabrication of front face coupling of one of a group of components consisting of optoelectronic and optical components including a ridge waveguide structure in which the light-coupling edges of the component via a mask in the desired structure are etched out of a wafer of suitable material, which has been provided by at least one of a group processes consisting of an epitaxy-process, a diffusion-process and an implantation process with a sequence of layers depending on the component, the method comprising the steps of: covering etching grooves formed by either wet chemical or dry etching techniques having substantially perpendicular side walls serving as light-coupling edges of the component with suitable first layer of organic material; phototechnically removing the first layer of organic material in the region outside of the etched groove by incineration or by chemical exposure so that a remaining portion of the first layer at least substantially fills the etched groove; applying a second layer of organic material over the first layer; structuring the second layer of organic material to form a ridge waveguide etching mask, and etching the ridge waveguide structures using the mask out of the wafer.
Claim 3
Dependent Claim
28 words
The method as stated in claim 1, wherein the wafer comprises a group of material consisting of glass, silicon, III-V semiconductor material or lithium niobate (LiNbO 3 ).
Claim 4
Dependent Claim
19 words
A method as stated in claim 1, wherein the first layer comprises a photo lacquer layer of organic material.
Claim 5
Dependent Claim
19 words
A method as stated in claim 2, wherein the first layer comprises a photo lacquer layer of organic material.
Claim 6
Independent Claim
182 words
A method for the monolithic fabrication of edge-emitting optoelectronic semiconductor components having a ridge waveguide structure, in which the light-emitting edges of the component, via a mask are etched out of a semiconductor wafer, the semiconductor wafer being a product of an epitaxial process and including a sequence of layers suitable for laser operation, the method comprising the steps of: covering etched grooves formed by etching techniques to include nearly perpendicular side walls serving as light-emitting edges of the component with a suitable first layer of photo lacquer; exposing and removing by developing the first layer of photo lacquer in a region outside an etched groove; heating the remaining portion of the first layer of photo lacquer which at least nearly fills the etched groove to a predetermined temperature to make the first layer photo-insensitive but not chemically insoluble, applying a second layer of photo lacquer over the first layer of photo lacquer; exposing and developing the second layer to form a ridge waveguide etching mask and etching the ridge waveguide structures via the mask out of the wafer of semiconductor material.
Claim 7
Independent Claim
182 words
A method for the monolithic fabrication of edge-emitting optoelectronic semiconductor components having a ridge waveguide structure, in which the light-emitting edges of the component, via a mask are etched out of a semiconductor wafer, the semiconductor wafer being a product of an epitaxial process and including a sequence of layers suitable for laser operation, the method comprising the steps of: covering etched grooves formed by etching techniques to include nearly perpendicular side walls serving as light-emitting edges of the component with a suitable first layer of photo lacquer; exposing and removing by developing the first layer of photo lacquer in a region outside an etched groove; heating the remaining portion of the first layer of photo lacquer which at least nearly fills the etched groove to a predetermined temperature to make the first layer photo-insensitive but not chemically insoluble, applying a second layer of photo lacquer over the first layer of photo lacquer; exposing and developing the second layer to form a ridge waveguide etching mask and etching the ridge waveguide structures via the mask out of the wafer of semiconductor material.
Claim 8
Dependent Claim
29 words
A method as stated in claim 1, further includes the step of passivating the wafer of semiconductor material provided with the etched groove structure and the ridge waveguide structure.
Claim 9
Dependent Claim
29 words
A method as stated in claim 2, further includes the step of passivating the wafer of semiconductor material provided with the etched groove structure and the ridge waveguide structure.
Claim 10
Dependent Claim
29 words
A method as stated in claim 5, further includes the step of passivating the wafer of semiconductor material provided with the etched groove structure and the ridge waveguide structure.
Claim 11
Dependent Claim
22 words
A method as stated in claim 1, further includes the step of providing metallization on an outer portion of the ridge waveguides.
Claim 12
Dependent Claim
22 words
A method as stated in claim 2, further includes the step of providing metallization on an outer portion of the ridge waveguides.
Claim 13
Dependent Claim
22 words
A method as stated in claim 5, further includes the step of providing metallization on an outer portion of the ridge waveguides.
Claim 14
Dependent Claim
55 words
A method as stated in claim 1, wherein a mass is provided for separating the components corresponding to parts of the wafer to be protected, providing a further groove depression etched into the bottom surface of the etched groove subsequently separating the components by mechanical action of the group including scratching, groove etching or sawing.
Claim 15
Dependent Claim
30 words
The method of claim 1, characterized in that for wet etching using a 3:1:1 etching agent of the composition 3H 2 SO 4 :1H 2 O 2 :1H 2 O.
Claim 16
Dependent Claim
30 words
The method of claim 5, characterized in that for wet etching using a 3:1:1 etching agent of the composition 3H 2 SO 4 :1H 2 O 2 :1H 2 O.
Claim 17
Dependent Claim
17 words
The method of claim 1, wherein the etching step includes a dry etching using a chlorine plasma.
Claim 18
Dependent Claim
17 words
The method of claim 5, wherein the etching step includes a dry etching using a chlorine plasma.
References Cited (Backward Citations)
JPS60187078A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-22 | 1993-07-24 | 1994-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-22 | 1997-07-24 | 1998-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-22 | 2001-07-24 | 2002-01-23 | $7700.00 | Window Closed / Lapsed |