US5250375A
Expired / Lapsed
US
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Photostructuring process
Assignee: Qimonda AG
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Filing: 1991-12-20
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Granted: 1993-10-05
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Expires: 2011-12-20
Abstract
Abstract A process for producing structures in the submicron range is characterized by the following steps: a photoresist layer comprising a polymer constituent with functional groups, which are capable of reacting with primary or secondary amines, and N-blocked imide groups, a photoinitiator which releases an acid when irradiated and a suitable solvent is deposited on to a substrate; the photoresist layer is dried; the photoresist layer is exposed in an imagewise manner; the exposed photoresist layer is subjected to a temperature treatment; the photoresist layer treated in this manner is developed with an aqueous-alkaline or organic developing agent into a photoresist structure; and the photoresist structure is treated with a chemical agent containing a primary or secondary amine; a defined dark field loss, is adjusted thereby during development in the range of between 20 and 100 nm.
Inventors
- 👤 Michael Sebald
- 👤 Juergen Beck
- 👤 Rainer Leuschner
- 👤 Recai Sezi
- 👤 Siegfried Birkle
- 👤 Hellmut Ahne
- 👤 Eberhard Kuehn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 01:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; G03F7/004; G03F7/039; G03F7/405
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
155 words
A process for producing structures in the submicron range comprising the steps of: a) depositing onto a substrate a photoresist layer comprising (1) a polymer constituent having functional groups, which are capable of reacting with primary or secondary amines, and N-blocked imide groups blocked with an acid-cleavable protective group, (2) a photoinitiator which release an acid when irradiated and (3) a suitable solvent; b) drying the photoresist layer; c) exposing the photoresist layer in an imagewise manner; d) subjecting the exposed photoresist layer to a heating treatment; e) developing the treated photoresist layer with an aqueous-alkaline or organic developing agent to create a photoresist structure including resist lines; and f) treating the photoresist structure with a chemical agent containing a primary or secondary amine, so as to expand the resist liens and to produce etching resistance, wherein, during developing, a defined dark field loss takes place in a range of between 20 and 100 nm.
Claim 2
Dependent Claim
155 words
A process for producing structures in the submicron range comprising the steps of: a) depositing onto a substrate a photoresist layer comprising (1) a polymer constituent having functional groups, which are capable of reacting with primary or secondary amines, and N-blocked imide groups blocked with an acid-cleavable protective group, (2) a photoinitiator which release an acid when irradiated and (3) a suitable solvent; b) drying the photoresist layer; c) exposing the photoresist layer in an imagewise manner; d) subjecting the exposed photoresist layer to a heating treatment; e) developing the treated photoresist layer with an aqueous-alkaline or organic developing agent to create a photoresist structure including resist lines; and f) treating the photoresist structure with a chemical agent containing a primary or secondary amine, so as to expand the resist liens and to produce etching resistance, wherein, during developing, a defined dark field loss takes place in a range of between 20 and 100 nm.
Claim 3
Dependent Claim
52 words
The process according to claim 1, wherein a resist layer which is resistant to substrate etching processes is initially applied to the substrate and is baked out to become insoluble to resist solvents, and wherein the photoresist structure is etched in an anisotropic, oxygen-containing plasma after being treated with the chemical agent.
Claim 4
Dependent Claim
19 words
The process according to claim 2 wherein the polymer constituent has carboxylic acid anhydride groups as the functional groups.
Claim 5
Dependent Claim
18 words
The process according to claim 3 wherein maleic anhydride is the basis of the carboxylic acid anhydride groups.
Claim 6
Dependent Claim
19 words
The process according to claim 2 wherein the polymer constituent has imide groups blocked by a tertiary butoxycarbonyl residue.
Claim 7
Dependent Claim
19 words
The process according to claim 2 wherein the polymer constituent has imide groups blocked by a tertiary butyl residue.
Claim 8
Dependent Claim
19 words
The process according to claim 1 wherein the polymer constituent has carboxylic acid anhydride groups as the functional groups.
Claim 9
Dependent Claim
18 words
The process according to claim 7 wherein maleic anhydride is the basis of the carboxylic acid anhydride groups.
Claim 10
Dependent Claim
19 words
The process according to claim 7 wherein the polymer constituent is an N-tertiary butoxycarbonyl- or N-tertiary butyl-maleinimide/maleic anhydride copolymer.
Claim 11
Dependent Claim
26 words
The process according to claim 7 wherein the polymer constituent is a copolymer containing N-tertiary butoxycarbonyl- or N-tertiary butyl-maleinimide, maleic anhydride an styrol and/or allyl trimethylsilane.
Claim 12
Dependent Claim
19 words
The process according to claim 1 wherein the polymer constituent has imide groups blocked by a tertiary butoxycarbonyl residue.
Claim 13
Dependent Claim
15 words
The process according to claim 11 wherein the basis of the imide groups is maleinimide.
Claim 14
Dependent Claim
19 words
The process according to claim 1 wherein the polymer constituent has imide groups blocked by a tertiary butyl residue.
Claim 15
Dependent Claim
15 words
The process according to claim 13 wherein the basis of the imide groups is maleinimide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-04 | 1997-04-05 | 1997-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-04 | 2001-04-05 | 2001-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-04 | 2005-04-05 | 2005-10-05 | $7700.00 | Window Closed / Lapsed |