Abstract A GaAs monocrystal film was grown by use of a process which comprises introducing a gaseous compound containing a component element desired to be grown into a vacuum tank, and submitting the compound to reaction on a base to thereby grow a semiconductor crystal each one molecular layer. Triethylgallium (TEG) and arsine (AsH 3 ) are used as the gaseous compound. One gas is introduced into the vaccum tank and then discharged after the passage of a predetermined time, and the other gas is introduced thereinto and then discharged after the passage of a predetermined time whereby a crystal for one molecular layer grows. By use of TEG as a gallium source, reaction progresses even when a temperature of the base is below 300° C., and a GaAs monocrystal film which is extremely less in lattice failure and impurities was obtained.
A method for growing a GaAs single crystal film on a base plate by introducing gases containing a crystal component element into a growing vessel evacuated to a vacuum from the outside, the method comprising evacuating said growing vessel to a predetermined pressure of 10 -7 to 10 -8 Pascals while introducing triethyl gallium (TEG) into said growing vessel for a 0.5 to 10 seconds under a pressure of 10 -1 to 10 -7 Pa, evacuating said vessel, introducing arsine (AsH 3 ) into said growing vessel for 2 to 200 seconds under a pressure of 10 -1 to 10 -7 Pa to thereby repeat a cycle for growing at least substantially one molecular layer, and thereby growing a GaAs single crystal film of a desired thickness, without the presence of carbon, with the accuracy of a single molecular layer.
Claim 2
Independent Claim
140 words
A method for growing a GaAs single crystal film on a base plate by introducing gases containing a crystal component element into a growing vessel evacuated to a vacuum from the outside, the method comprising evacuating said growing vessel to a predetermined pressure of 10 -7 to 10 -8 Pascals while introducing triethyl gallium (TEG) into said growing vessel for a 0.5 to 10 seconds under a pressure of 10 -1 to 10 -7 Pa, evacuating said vessel, introducing arsine (AsH 3 ) into said growing vessel for 2 to 200 seconds under a pressure of 10 -1 to 10 -7 Pa to thereby repeat a cycle for growing at least substantially one molecular layer, and thereby growing a GaAs single crystal film of a desired thickness, without the presence of carbon, with the accuracy of a single molecular layer.
Claim 3
Dependent Claim
22 words
The process as set forth in claim 1, wherein a heating source comprises an infrared lamp provided externally of the growing tank.
Claim 4
Dependent Claim
19 words
The process as set forth in claim 1, wherein the GaAs layer obtained has a (111) B crystal surface.
Claim 5
Dependent Claim
19 words
A process according to claim 1, wherein each of said monocrystalline GaAs film layers is less than 3.2 Å.
Claim 6
Dependent Claim
22 words
A process according to claim 1, wherein said GaAs film has an impurity density, undoped, of 10 17 cm -3 or less.