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US5248658A
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Method of manufacturing a superconducting oxide pattern by laser sublimation
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1991-09-23
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Granted: 1993-09-28
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Expires: 2011-09-23
Abstract
Abstract A superconducting ceramic film is deposited on a substrate by sputtering. In virtue of the low thermal conductivity of ceramic, a laser beam is irradiated to the ceramic film in order to remove the irradiated portion by sublimation and produce a pattern on the ceramic film.
Inventors
- 👤 Shumpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:15
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; H01; H01F; H01F41/00; H01F41/02; H01F41/04; H01F41/048; H01F6/00; H01F6/06; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/731; Y10S505/732
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
45 words
A method of making a high-temperature superconductor device by laser scribing comprising the steps of: forming a superconducting ceramic layer on a surface; directing pulses of a laser beam into a zone of the superconducting ceramic layer to remove a portion thereof by laser sublimation.
Claim 2
Independent Claim
45 words
A method of making a high-temperature superconductor device by laser scribing comprising the steps of: forming a superconducting ceramic layer on a surface; directing pulses of a laser beam into a zone of the superconducting ceramic layer to remove a portion thereof by laser sublimation.
Claim 3
Dependent Claim
14 words
A method as claimed in claim 1 wherein said laser is an excimer laser.
Claim 4
Dependent Claim
18 words
A method as claimed in claim 2 wherein said excimer laser is a KrF or KrCl excimer laser.
Claim 5
Independent Claim
45 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a superconducting ceramic layer on a surface and irradiating and subliming a portion of said ceramic layer with a sequence of pulses of a laser beam to remove the irradiated portion of said ceramic layer.
Claim 6
Independent Claim
45 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a superconducting ceramic layer on a surface and irradiating and subliming a portion of said ceramic layer with a sequence of pulses of a laser beam to remove the irradiated portion of said ceramic layer.
Claim 7
Dependent Claim
17 words
The method of claim 4 wherein said superconducting ceramic layer is deposited on said surface by sputtering.
Claim 8
Dependent Claim
21 words
The method of claim 4 wherein said pulses are irradiated to a portion of said ceramic layer tracing a line thereon.
Claim 9
Dependent Claim
31 words
The method of claim 4 wherein said surface is the periphery of a cylinder and said laser beam is irradiated to a helix on said periphery to form a superconducting coil.
Claim 10
Dependent Claim
38 words
The method of claim 7 wherein said cylinder is turning around its axis during said irradiating step while the irradiation position of said laser beam is only shifted in the axial direction with respect t o said cylinder.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-27 | 1997-03-29 | 1997-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-27 | 2001-03-29 | 2001-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-27 | 2005-03-29 | 2005-09-28 | $7700.00 | Window Closed / Lapsed |