US4957900A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a superconducting pattern by light irradiation
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-03-28
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Granted: 1990-09-18
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Expires: 2008-03-28
Abstract
Abstract A superconducting ceramic film is deposited on a substrate sputtering. In virtue of the low thermal conductivity of ceramic, a laser beam is radiated to the ceramic film in order to remove the irradiated portion by sublimation and produce a pattern on the ceramic film.
Inventors
- 👤 Shumpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:09
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; H01; H01F; H01F41/00; H01F41/02; H01F41/04; H01F41/048; H01F6/00; H01F6/06; H10N60/0296; H10N60/0408; H10N60/0521; H10N60/0576; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9265; Y10S428/93; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/703; Y10S505/704; Y10S505/705; Y10S505/725; Y10S505/728; Y10S505/73; Y10S505/731; Y10S505/742; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24926
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
67 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a copper oxide-based superconducting ceramic precursor layer on a surface, said surface formed of a material having a thermal coefficient of expansion of 50%-150% of that of said ceramic layer, irradiating and subliming a portion of the ceramic layer with light to remove the irradiated portion, and thermally annealing the remaining ceramic layer to render it superconducting.
Claim 2
Independent Claim
67 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a copper oxide-based superconducting ceramic precursor layer on a surface, said surface formed of a material having a thermal coefficient of expansion of 50%-150% of that of said ceramic layer, irradiating and subliming a portion of the ceramic layer with light to remove the irradiated portion, and thermally annealing the remaining ceramic layer to render it superconducting.
Claim 3
Independent Claim
67 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a copper oxide-based superconducting ceramic precursor layer on a surface, said surface formed of a material having a thermal coefficient of expansion of 50%-150% of that of said ceramic layer, thermally annealing the ceramic layer to render it superconducting, and irradiating and subliming a portion of the superconducting ceramic layer with light to remove the irradiated portion.
Claim 4
Independent Claim
67 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a copper oxide-based superconducting ceramic precursor layer on a surface, said surface formed of a material having a thermal coefficient of expansion of 50%-150% of that of said ceramic layer, thermally annealing the ceramic layer to render it superconducting, and irradiating and subliming a portion of the superconducting ceramic layer with light to remove the irradiated portion.
Claim 5
Independent Claim
73 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a copper oxide-based superconducting ceramic precursor layer on a surface, said surface formed of a material having a thermal coefficient of expansion of 50%-150% of that of said ceramic layer, thermally annealing the ceramic layer to render it superconducting, irradiating and subliming a portion of the superconducting ceramic layer with light to remove the irradiated portion, and thermally annealing the remaining ceramic layer.
Claim 6
Independent Claim
73 words
A method of manufacturing a superconducting ceramic pattern comprising: forming a copper oxide-based superconducting ceramic precursor layer on a surface, said surface formed of a material having a thermal coefficient of expansion of 50%-150% of that of said ceramic layer, thermally annealing the ceramic layer to render it superconducting, irradiating and subliming a portion of the superconducting ceramic layer with light to remove the irradiated portion, and thermally annealing the remaining ceramic layer.
Claim 7
Independent Claim
21 words
The method of claims 1, 2, or 3 wherein said superconducting ceramic precursor layer is deposited on said surface by sputtering.
Claim 8
Independent Claim
15 words
The method of claims 1, 2, or 3 wherein said light is a laser beam.
Claim 9
Dependent Claim
16 words
The method of claim 5 wherein said light is a sequence of pulses of laser beam.
Claim 10
Dependent Claim
22 words
The method of claim 6 wherein said pulses are radiated to a portion of said ceramic layer tracing a line prescribed thereon.
Claim 11
Independent Claim
34 words
The method of claims 1, 2, or 3 wherein said surface is the periphery of a cylinder and said light is radiated to a helix prescribed on said periphery to form a superconducting coil.
Claim 12
Dependent Claim
36 words
The method of claim 8 wherein said cylinder is turning around its axis during said irradiating step while the radiation position of said light is only shifted in the axial direction with respect to said cylinder.
Claim 13
Independent Claim
15 words
The method of claims 1, 2, or 3 wherein said substrate is made of YSZ.
Claim 14
Dependent Claim
16 words
The method of claim 1, where said thermally annealing step is conducted in an oxidizing atmosphere.
Claim 15
Dependent Claim
16 words
The method of claim 2, where said thermally annealing step is conducted in an oxidizing atmosphere.
Claim 16
Dependent Claim
16 words
The method of claim 3, where said thermally annealing steps are conducted in an oxidizing atmosphere.
References Cited (Backward Citations)
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