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US5245187A
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US
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Microtip, process for preparation thereof, surface-observing apparatus and information-treating apparatus employing the same
Assignee: Canon Inc
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Filing: 1992-02-26
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Granted: 1993-09-14
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Expires: 2012-02-26
Abstract
Abstract A microtip has a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion. The microtip is produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal. A surface-observing apparatus for observing a surface of a specimen and an information-treating apparatus comprise a tip in proximity to the specimen to be observed or a recording medium, and conduct the surface observation or the writing or reading by using the tip, respectively.
Inventors
- 👤 Toshimitsu Kawase
- 👤 Osamu Takamatsu
- 👤 Katsunori Hatanaka
- 👤 Katsuhiko Shinjo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 15:28
CPC Classifications
G; G01; G01Q; G01Q70/00; G01Q70/08; G01Q70/10; B; B82; B82Y; B82Y35/00; G01Q60/00; G01Q60/10; G01Q60/16; G01Q70/14; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/863; Y10S977/875; Y10S977/878; Y10S977/879; Y10S977/888
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
45 words
A microtip having a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion, wherein the crystal faces are planes of (211), (110) and (100).
Claim 2
Dependent Claim
45 words
A microtip having a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion, wherein the crystal faces are planes of (211), (110) and (100).
Claim 3
Dependent Claim
60 words
A microtip produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal, wherein the crystal faces are planes of (211), (110) and (100).
Claim 4
Dependent Claim
60 words
A microtip produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal, wherein the crystal faces are planes of (211), (110) and (100).
Claim 5
Dependent Claim
17 words
The microtip of claim 1 or claim 2, wherein the single crystal is composed of a carbide.
Claim 6
Dependent Claim
29 words
The microtip of claim 1 or claim 2, wherein the single crystal is composed a carbide selected from the group consisting of titanium carbide, tungsten carbide, and silicon carbide.
Claim 7
Dependent Claim
15 words
The microtip of claim 2, wherein the anisotropic etching is practiced by a dry process.
Claim 8
Dependent Claim
15 words
The microtip of claim 2, wherein the anisotropic etching is practiced by a wet process.
Claim 9
Dependent Claim
104 words
A surface-observing apparatus for observing a surface of a specimen, comprising a microtip placed in proximity to the specimen to be observed, and conducting the surface observation by moving the microtip and the specimen three-dimensionally while detecting a tunnel current flowing between the microtip and the specimen, or detecting an interatomic force exerted between the microtip and the specimen, said microtip having a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion, wherein the crystal faces are planes of (211), (110) and (100).
Claim 10
Dependent Claim
104 words
A surface-observing apparatus for observing a surface of a specimen, comprising a microtip placed in proximity to the specimen to be observed, and conducting the surface observation by moving the microtip and the specimen three-dimensionally while detecting a tunnel current flowing between the microtip and the specimen, or detecting an interatomic force exerted between the microtip and the specimen, said microtip having a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion, wherein the crystal faces are planes of (211), (110) and (100).
Claim 11
Dependent Claim
100 words
An information-treating apparatus for writing information onto or reading information from a recording medium, comprising a microtip placed in proximity to the recording medium, and conducting the writing or reading by utilizing a tunnel current flowing between the microtip and the recording medium, or utilizing an interatomic force between the microtip and the recording medium, said microtip having a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion, wherein the crystal faces are planes of (211), (110) and (100).
Claim 12
Dependent Claim
100 words
An information-treating apparatus for writing information onto or reading information from a recording medium, comprising a microtip placed in proximity to the recording medium, and conducting the writing or reading by utilizing a tunnel current flowing between the microtip and the recording medium, or utilizing an interatomic force between the microtip and the recording medium, said microtip having a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion, wherein the crystal faces are planes of (211), (110) and (100).
Claim 13
Dependent Claim
120 words
A surface-observing apparatus for observing a surface of a specimen, comprising a microtip placed in proximity to the specimen to be observed, and conducting the surface observation by moving the microtip and the specimen three-dimensionally while detecting a tunnel current flowing between the microtip and the specimen, or detecting an interatomic force exerted between the microtip and the specimen, said microtip being produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal, wherein the crystal faces are planes of (211), (110) and (100).
Claim 14
Dependent Claim
120 words
A surface-observing apparatus for observing a surface of a specimen, comprising a microtip placed in proximity to the specimen to be observed, and conducting the surface observation by moving the microtip and the specimen three-dimensionally while detecting a tunnel current flowing between the microtip and the specimen, or detecting an interatomic force exerted between the microtip and the specimen, said microtip being produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal, wherein the crystal faces are planes of (211), (110) and (100).
Claim 15
Dependent Claim
117 words
An information-treating apparatus for writing information onto or reading information from a recording medium, comprising a microtip placed in proximity to the recording medium, and conducting the writing or reading by utilizing a tunnel current flowing between the microtip and the recording medium, or utilizing an interatomic force exerted between the microtip and the recording medium, said microtip being produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal, wherein the crystal faces are planes of (211), (110) and (100).
Claim 16
Dependent Claim
117 words
An information-treating apparatus for writing information onto or reading information from a recording medium, comprising a microtip placed in proximity to the recording medium, and conducting the writing or reading by utilizing a tunnel current flowing between the microtip and the recording medium, or utilizing an interatomic force exerted between the microtip and the recording medium, said microtip being produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal, wherein the crystal faces are planes of (211), (110) and (100).
References Cited (Backward Citations)
US4396459A
Cited
US4470875A
Cited
US4668865A
Cited
US4670092A
Cited
US4685996A
Cited
EP0309236A2
Cited
US5066358A
Cited
US4998016A
Cited
US4943719A
Cited
US5051379A
Cited
US5021364A
Cited
JPH03150300A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-13 | 1997-03-15 | 1997-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-13 | 2001-03-15 | 2001-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-13 | 2005-03-15 | 2005-09-14 | $7700.00 | Window Closed / Lapsed |