US4396459A
Expired / Lapsed
US
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Method and solution for etching indium antimonide
Assignee: United States Department of the Air Force
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Filing: 1982-09-16
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Granted: 1983-08-02
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Expires: 2002-09-16
Abstract
Abstract A method for delineating defects in the <111> surface of an indium antimonide crystal wafer by treating said surface with a 5 percent solution of iodine in N,N-dimethylacetamide to form triangularly shaped etch pits in the defect area.
Inventors
- 👤 Paul E. Herning
- 👤 Edward Y. Sutcliffe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:23
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646; H10P50/648
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
20 words
A solution for etching the <111> surface of an indium antimonide crystalline wafer comprising a mixture of iodine and N,N-dimethylacetamide.
Claim 2
Dependent Claim
20 words
A solution for etching the <111> surface of an indium antimonide crystalline wafer comprising a mixture of iodine and N,N-dimethylacetamide.
Claim 3
Dependent Claim
24 words
A solution in accordance with claim 1 wherein said solution comprises about 5 parts by weight of iodine with the balance substantially all N,N-dimethylacetamide.
Claim 4
Independent Claim
50 words
A method for delineating the crystal lattice defects in the <111> surface of an indium antimonide crystalline wafer which comprises the steps of treating said surface with a single solution comprised of a mixture of iodine and N,N-dimethylacetamide whereby triangularly shaped etch pits are formed to delineate areas of defect.
Claim 5
Independent Claim
50 words
A method for delineating the crystal lattice defects in the <111> surface of an indium antimonide crystalline wafer which comprises the steps of treating said surface with a single solution comprised of a mixture of iodine and N,N-dimethylacetamide whereby triangularly shaped etch pits are formed to delineate areas of defect.
Claim 6
Dependent Claim
22 words
A method in accordance with claim 3 wherein said surface is treated for a period of about 20 minutes at room temperature.
Claim 7
Dependent Claim
25 words
A method in accordance with claim 4 wherein said mixture consists essentially of about 5 parts by weight iodine and the balance substantially all N,N-dimethylacetamide.
References Cited (Backward Citations)
US3143447A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-08-01 | 1987-01-31 | 1987-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-08-01 | 1991-01-31 | 1991-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-08-01 | 1995-01-31 | 1995-08-02 | $7700.00 | Window Closed / Lapsed |