Method for the formation of tin barrier layer with preferential (111) crystallographic orientation

Claim 2

A process for forming, over a silicon surface, a titanium nitride barrier layer having a surface of (111) crystallographic orientation which comprises: a) depositing from about 50 to about 1000 Angstroms of a first titanium layer over a silicon surface; b) depositing from about 700 to about 1000 Angstroms of a titanium nitride layer over said first titanium layer; c) depositing from about 300 to about 400 Angstroms of a second titanium layer over said titanium nitride layer; and d) annealing the structure in the presence of a nitrogen-bearing gas, and in the absence of an oxygen-bearing gas to form titanium nitride having a surface of (111) crystallographic orientation from said second titanium layer; e) whereby said resulting titanium nitride barrier layer, comprising said deposited titanium nitride intermediate layer and sad titanium nitride formed by annealing said second titanium layer in an atmosphere of nitrogen, has a surface of (111) crystallographic orientation and a sufficient thickness to provide protection of the underlying silicon against spiking by aluminum subsequently formed over said titanium nitride barrier layer.

Claim 3

The process of claim 1 wherein said step of depositing a layer of titanium nitride over said first layer of titanium further comprises sputtering said layer of titanium nitride over said first layer of titanium.

Claim 4

The process of claim 2 which further includes the formation of titanium silicide by reaction of said first titanium layer with said underlying silicon surface to form a titanium silicide electrical contact between said silicon surface and said titanium nitride.

Claim 5

The process of claim 3 including the further step of forming an aluminum layer over said (111) oriented titanium nitride surface, whereby said aluminum layer will assume the (111) crystallographic orientation of said titanium nitride surface thereunder, resulting in an aluminum layer having enhanced resistance to electromigration.

Claim 6

The process of claim 1 wherein said step of annealing said structure further comprises annealing said structure at a temperature ranging from about 300° C. to about 900° C.

Claim 7

The process of claim 1 wherein said step of annealing said structure further comprises annealing said structure in an annealing chamber maintained at a pressure within a range of from about 100 milliTorr to about 800 Torr.

Claim 8

The process of claim 1 wherein said annealing step is carried out in an annealing chamber while flowing one or more nitrogen-bearing gases into said chamber at a rate of from about 500 to about 10,000 sccm.

Claim 9

The process of claim 7 wherein said step of annealing said structure further comprises annealing said structure under rapid anneal conditions where the structure is ramped up to an annealing temperature ranging from about 300° C. to about 900° C. at a rate of from about 5° C. per second to about 150° C. per second, and then maintaining said structure at said temperature for a period ranging from about 5 to about 180 seconds.

Claim 10

The process of claim 7 wherein said step of annealing said structure further comprises annealing said structure under rapid anneal conditions where the structure is ramped up to an annealing temperature ranging from about 500° C. to about 800° C. at a rate of from about 30° C. per second to about 80° C. per second, and then maintaining said structure at said temperature for a period ranging from about 20 to about 60 seconds.

Claim 11

The process of claim 7 wherein said annealing step comprises: a) first annealing said structure under rapid anneal conditions where the structure is ramped up to a first annealing temperature ranging from about 300° C. to about 695° C. at a rate of from about 5° C. per second to about 150° C. per second, and maintaining said structure at said first annealing temperature for a period ranging from about 5 to about 180 seconds; and b) then raising said annealing temperature up to from about 800° C. to about 900° C. after said initial anneal for an additional time period of from about 5 to about 180 seconds to convert the less stable titanium silicide formed in the first annealing step to a more stable phase.

Claim 12

The process of claim 1 wherein said annealing step is carried out after said deposition of said second layer of titanium without exposing said second layer of titanium to an oxygen-bearing gas between said deposition and annealing steps.

Claim 13

The process of claim 2 wherein said step of sputtering said titanium nitride layer over said first layer of titanium is carried out without exposing said first layer of titanium to an oxygen-bearing gas before said layer of titanium nitride is sputtered thereon.

Claim 14

The process of claim 1 wherein said step of depositing said second layer of titanium over said layer of titanium nitride is carried out without exposing said layer of titanium nitride to an oxygen-bearing gas before said second layer of titanium is deposited thereon.

Claim 15

A process for forming, over a silicon surface, a titanium nitride barrier layer having a surface of (111) crystallographic orientation which comprises: a) depositing from about 50 to about 1000 Angstroms of a first titanium layer over a silicon surface; b) sputtering from about 700 to about 1000 Angstroms of an intermediate titanium nitride layer over said first titanium layer; c) depositing from about 300 to about 400 Angstroms of a second titanium layer over said intermediate titanium nitride layer; and d) annealing the structure in the presence of a nitrogen-bearing gas, and in the absence of an oxygen-bearing gas to form titanium silicide from said first titanium layer over said silicon surface and to form titanium nitride having a surface of (111) crystallographic orientation from said second titanium layer; whereby said resulting titanium nitride barrier layer, comprising said sputtered titanium nitride intermediate layer and said titanium nitride formed by annealing said second titanium layer in an atmosphere of nitrogen, has a surface of (111) crystallographic orientation and a sufficient thickness to provide protection of the underlying silicon against spiking by aluminum subsequently formed over said titanium nitride barrier layer.

Claim 16

A process for forming, over a silicon surface, a titanium nitride barrier layer having a surface of (111) crystallographic orientation which comprises: a) depositing from about 50 to about 1000 Angstroms of a first titanium layer over a silicon surface; b) sputtering from about 700 to about 1000 Angstroms of an intermediate titanium nitride layer over said first titanium layer; c) depositing from about 300 to about 400 Angstroms of a second titanium layer over said intermediate titanium nitride layer; and d) annealing the structure in the presence of a nitrogen-bearing gas, and in the absence of an oxygen-bearing gas to form titanium silicide from said first titanium layer over said silicon surface and to form titanium nitride having a surface of (111) crystallographic orientation from said second titanium layer; whereby said resulting titanium nitride barrier layer, comprising said sputtered titanium nitride intermediate layer and said titanium nitride formed by annealing said second titanium layer in an atmosphere of nitrogen, has a surface of (111) crystallographic orientation and a sufficient thickness to provide protection of the underlying silicon against spiking by aluminum subsequently formed over said titanium nitride barrier layer.

Claim 17

The process of claim 14 wherein said step of annealing said structure further comprises annealing said structure in an annealing chamber maintained at a pressure of from about 100 milliTorr to about 800 Torr under rapid anneal conditions where the structure is ramped up to an annealing temperature ranging from about 300° C. to about 900° C. at a rate of from about 5° C. per second to about 150° C. per second, and then maintaining said structure at said temperature for a period ranging from about 5 to about 180 seconds.

Claim 18

The process of claim 14 including the further step of forming an aluminum layer over said (111) oriented titanium nitride surface, whereby said aluminum layer will assume the (111) crystallographic orientation of said titanium nitride surface thereunder, resulting in an aluminum layer having enhanced resistance to electromigration.

Claim 19

A process for forming, over a silicon surface, a titanium nitride barrier layer having a surface of (111) crystallographic orientation which comprises: a) depositing from about 50 to about 1000 Angstroms of a first titanium layer over a silicon surface; b) sputtering from about 700 to about 1000 Angstroms of an intermediate titanium nitride layer over said first titanium layer; c) depositing from about 300 to about 400 Angstroms of a second titanium layer over said intermediate titanium nitride layer; d) annealing the structure in the presence of a nitrogen-bearing gas, and in the absence of an oxygen-bearing gas in an annealing chamber maintained at a pressure of from about 100 milliTorr to about 800 Torr to form titanium silicide from said first titanium layer over said silicon surface and to form titanium nitride having a surface of (111) crystallographic orientation from said second titanium layer by: i) heating said structure up to an annealing temperature ranging from said about 600° C. to about 695° C. at a rate of from about 5° C. per second to about 150° C. per second; ii) maintaining said structure at said temperature for a period ranging from about 50 to about 180 seconds; iii) raising said annealing temperature up to from about 800° C. to about 900° C. after said initial anneal; and iv) maintaining said structure at said temperature for an additional time period of from about 5 to about 180 seconds to convert the less stable titanium silicide formed in said first annealing step to a more stable phase; whereby said resulting titanium nitride barrier layer, comprising said intermediate sputtered titanium nitride layer and said titanium nitride formed by annealing said second titanium layer in an atmosphere of nitrogen, has a surface of (111) crystallographic orientation and a sufficient thickness to provide protection of the underlying silicon against spiking by aluminum subsequently formed over said titanium nitride barrier layer; and e) forming an aluminum layer over said (111) oriented titanium nitride surface, whereby said aluminum layer will assume the (111) crystallographic orientation of said titanium nitride surface thereunder, resulting in an aluminum layer having enhanced resistance to electromigration.

Claim 20

A process for forming, over a silicon surface, a titanium nitride barrier layer having a surface of (111) crystallographic orientation which comprises: a) depositing from about 50 to about 1000 Angstroms of a first titanium layer over a silicon surface; b) sputtering from about 700 to about 1000 Angstroms of an intermediate titanium nitride layer over said first titanium layer; c) depositing from about 300 to about 400 Angstroms of a second titanium layer over said intermediate titanium nitride layer; d) annealing the structure in the presence of a nitrogen-bearing gas, and in the absence of an oxygen-bearing gas in an annealing chamber maintained at a pressure of from about 100 milliTorr to about 800 Torr to form titanium silicide from said first titanium layer over said silicon surface and to form titanium nitride having a surface of (111) crystallographic orientation from said second titanium layer by: i) heating said structure up to an annealing temperature ranging from said about 600° C. to about 695° C. at a rate of from about 5° C. per second to about 150° C. per second; ii) maintaining said structure at said temperature for a period ranging from about 50 to about 180 seconds; iii) raising said annealing temperature up to from about 800° C. to about 900° C. after said initial anneal; and iv) maintaining said structure at said temperature for an additional time period of from about 5 to about 180 seconds to convert the less stable titanium silicide formed in said first annealing step to a more stable phase; whereby said resulting titanium nitride barrier layer, comprising said intermediate sputtered titanium nitride layer and said titanium nitride formed by annealing said second titanium layer in an atmosphere of nitrogen, has a surface of (111) crystallographic orientation and a sufficient thickness to provide protection of the underlying silicon against spiking by aluminum subsequently formed over said titanium nitride barrier layer; and e) forming an aluminum layer over said (111) oriented titanium nitride surface, whereby said aluminum layer will assume the (111) crystallographic orientation of said titanium nitride surface thereunder, resulting in an aluminum layer having enhanced resistance to electromigration.