US5238781A
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Photosensitive compositions based on polyphenols and acetals
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1992-02-27
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Granted: 1993-08-24
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Expires: 2012-02-27
Abstract
Abstract Photosensitive compositions comprising a) at least one solid film-forming polyphenol, b) at least one compound of formula I ##STR1## wherein n is 2, 3 or 4, Ar is an n-valent benzene or naphthalene radical or a divalent radical of formula II ##STR2## Q is a direct bond, --O--, --SO--, --SO 2 --, --CH 2 --, --C(CH 3 )(phenyl)- or --C(CH 3 ) 2 --, each of R 1 and R 2 , independently of the other, is C 1 -C 8 alkyl, or phenyl or naphthyl each of which is unsubstituted or substituted by C 1 -C 4 alkyl, or R 1 and R 2 together are 1,2-phenylene or --[C(R')(R")] m --, each of R' and R", independently of the other, is hydrogen, C 1 -C 4 alkyl or phenyl and m is 2, 3 or 4, and c) at least one compound that forms an acid under actinic radiation are described. Those compositions are used as negative resists, especially for producing printing plates, printed circuits and integrated circuits.
Inventors
- 👤 Ulrich Schadeli
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:48
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0045; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/11; Y10S430/128
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
151 words
A photosensitive composition comprising a) at least one solid film-forming polyphenol, b) at least one compound of formula I ##STR14## wherein n is 2, 3 or 4, Ar is an n-valent benzene or naphthalene radical or a divalent radical of formula II ##STR15## Q is a direct bond, --O--, --SO--, --SO 2 --, --CH 2 --, --C(CH 3 )(phenyl)-- or --C(CH 3 ) 2 --, each of R 1 and R 2 , independently of the other, is C 1 -C 8 alkyl, or phenyl or naphthyl each of which is unsubstituted or substituted by C 1 -C 4 alkyl, or R 1 and R 2 together are 1,2-phenylene or --[C(R')(R")] m --, each of R' and R", independently of the other, is hydrogen, C 1 -C 4 alkyl or phenyl and m is 2, 3 or 4, and c) at least one compound that forms an acid under actinic radiation.
Claim 2
Dependent Claim
151 words
A photosensitive composition comprising a) at least one solid film-forming polyphenol, b) at least one compound of formula I ##STR14## wherein n is 2, 3 or 4, Ar is an n-valent benzene or naphthalene radical or a divalent radical of formula II ##STR15## Q is a direct bond, --O--, --SO--, --SO 2 --, --CH 2 --, --C(CH 3 )(phenyl)-- or --C(CH 3 ) 2 --, each of R 1 and R 2 , independently of the other, is C 1 -C 8 alkyl, or phenyl or naphthyl each of which is unsubstituted or substituted by C 1 -C 4 alkyl, or R 1 and R 2 together are 1,2-phenylene or --[C(R')(R")] m --, each of R' and R", independently of the other, is hydrogen, C 1 -C 4 alkyl or phenyl and m is 2, 3 or 4, and c) at least one compound that forms an acid under actinic radiation.
Claim 3
Dependent Claim
16 words
A composition according to claim 1, wherein n is 2 and Ar is 1,3-phenylene or 1,4-phenylene.
Claim 4
Dependent Claim
10 words
A composition according to claim 2 wherein Ar is 1,4-phenylene.
Claim 5
Dependent Claim
19 words
A composition according to claim 1, wherein R 1 and R 2 in formula I have the same meaning.
Claim 6
Dependent Claim
22 words
A composition according to claim 4 wherein R 1 and R 2 are the same and are C 1 -C 4 alkyl.
Claim 7
Dependent Claim
35 words
A composition according to claim 1, wherein R 1 and R 2 in formula I are together 1,2-phenylene or --[C(R')(R")] m -- wherein R' and R" are independently H or methyl and m=2 or 3.
Claim 8
Dependent Claim
29 words
A composition according to claim 6 wherein R 1 and R 2 are --[C(R')(R")] m -- wherein R' and R" are independently H or methyl, and m=2 or 3.
Claim 9
Dependent Claim
25 words
A composition according to claim 1, wherein component b) is present in an amount of from 5 to 50% by weight, based on component a).
Claim 10
Dependent Claim
23 words
A composition according to claim 8 wherein the amount of component b) is from 10 to 30% by weight, based on component a).
Claim 11
Dependent Claim
18 words
A composition according to claim 1, comprising as further component d) a solvent or a mixture of solvents.
Claim 12
Dependent Claim
59 words
A composition according to claim 1, wherein component a) is a homo- or co-polymer having structural repeating units of formula III ##STR16## wherein R is hydrogen or methyl, and each of R 3 , R 4 and R 5 , independently of the others, is hydrogen, C 1 -C 4 alkyl, C 1 -C 4 alkoxy, halogen or methylol.
Claim 13
Dependent Claim
12 words
A composition according to claim 1, wherein component a) is a novolak.
Claim 14
Dependent Claim
15 words
A composition according to claim 12 wherein component a) is a phenol or cresol novolak.
Claim 15
Dependent Claim
12 words
A composition according to claim 1, wherein component a) is a poly(p-hydroxystyrene).
Claim 16
Dependent Claim
136 words
A composition according to claim 1, wherein component c) is a compound of formula V (Ar.sub.1).sub.q (R.sub.7).sub.r (R.sub.8).sub.s S.sup.⊕ X.sup.⊖(V), wherein Ar 1 is phenyl, naphthyl or phenyl--COCH 2 -- each of which is unsubstituted or substituted by halogen, C 1 -C 4 alkyl, C 1 -C 4 alkoxy, --OH or by nitro or mixture thereof R 7 is C 1 -C 6 alkyl or C 3 -C 7 cycloalkyl and R 8 is tetrahydrothienyl, tetrahydrofuryl or hexanydropyrryl, q is 0, 1, 2 or 3, r is 0, 1 or 2 and s is 0 or 1, the sum of q+r+s being 3, and X.sup.⊖ is a chloride, bromide or iodide anion, BF 4 .sup.⊖, PF 6 .sup.⊖, AsF 6 .sup.⊖, SbF 6 .sup.⊖, FSO.sup.⊖ or the anion of an organic sulfonic acid or carboxylic acid.
Claim 17
Dependent Claim
59 words
A composition according to claim 15, wherein Ar 1 is phenyl, q is the number 3, r and s are zero and X.sup.⊖ is SbF 6 .sup.⊖, AsF 6 .sup.⊖, PF 6 .sup.⊖ or the anion of an aliphatic, partially fluorinated aliphatic or perfluorinated aliphatic sulfonic acid or of an aromatic, partially fluorinated aromatic or perfluorinated aromatic sulfonic acid.
Claim 18
Dependent Claim
35 words
A composition according to claim 16 wherein X - is the anion of an aliphatic, partially fluorinated aliphatic or perfluorinated aliphatic sulfonic acid or of an aromatic, partially fluorinated aromatic or perfluorinated aromatic sulfonic acid.
Claim 19
Dependent Claim
72 words
A composition according to claim 15, wherein Ar 1 is phenyl, q is the number 3, r and s are zero and X.sup.⊕ is CF 3 SO 3 .sup.⊕, C 2 F 5 SO 3 .sup.⊕, n-C 3 F 7 SO 3 .sup.⊕, n-C 4 F 9 SO 3 .sup.⊕, n-C 6 F 13 SO 3 .sup.⊕, n-C 8 F 17 SO 3 .sup.⊕ or C 6 F 5 SO 3 .sup.⊕.
Claim 20
Dependent Claim
14 words
A composition according to claim 15, wherein component c) is phenacyl-p-methylbenzenesulfonate or triphenylsulfonium trifluoromethanesulfonate.
Claim 21
Dependent Claim
12 words
A composition according to claim 19 wherein component c) is triphenylsulfonium trifluoromethanesulfonate.
Claim 22
Dependent Claim
25 words
A composition according to claim 1, wherein component c) is present in an amount of from 1 to 30% by weight, based on components a)+b).
Claim 23
Dependent Claim
23 words
A composition according to claim 21 wherein the amount of component c) is from 1 to 10% by weight, based on components a)+b).
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |