US4800152A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Negative resist compositions
Assignee: International Business Machines Corp
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Filing: 1987-03-16
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Granted: 1989-01-24
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Expires: 2007-03-16
Abstract
Abstract Heat stable, negative resist compositions are provided for use, particularly in deep ultraviolet light X-ray and electron beams. The composition comprises an acid generating onium salt photoinitiator, a source of polyfunctional activated aromatic rings and a source of polyfunctional carbonium ions, with at least one of said sources being a polymer.
Inventors
- 👤 Robert D. Allen
- 👤 Jean M. J. Frechet
- 👤 Robert J. Twieg
- 👤 Carlton G. Willson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 22:07
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/027; G03F7/028; G03F7/029; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/115; Y10S430/12; Y10S430/122; Y10S430/126; Y10S430/128
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
15 words
A heat stable negative resist composition comprising an onion salt photoinitiator, poly(vinylbenzyl acetate) and bisphenol-A.
Claim 2
Dependent Claim
15 words
A heat stable negative resist composition comprising an onion salt photoinitiator, poly(vinylbenzyl acetate) and bisphenol-A.
Claim 3
Dependent Claim
45 words
A heat stable negative resist composition comprising an acid generating onium salt, trisacetoxy mesitylene and a polymer which contains multiple activated aromatic rings, said polymer being chosen so that following irradiation it reacts with said triacetoxy mesitylene to form crosslinking and also to generate acid.
Claim 4
Dependent Claim
45 words
A heat stable negative resist composition comprising an acid generating onium salt, trisacetoxy mesitylene and a polymer which contains multiple activated aromatic rings, said polymer being chosen so that following irradiation it reacts with said triacetoxy mesitylene to form crosslinking and also to generate acid.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-24 | 1992-07-25 | 1993-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-24 | 1996-07-25 | 1997-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-24 | 2000-07-25 | 2001-01-24 | $7700.00 | Window Closed / Lapsed |