US4737426A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cyclic acetals or ketals of beta-keto esters or amides
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1986-05-05
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Granted: 1988-04-12
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Expires: 2006-05-05
Abstract
Abstract Compounds of formula I ##STR1## in conjunction with compounds that donate acid when exposed to actinic radiation, are suitable for use as positive photoresists. In formula I, R 1 and R 2 are hydrogen, alkyl, aryl, cycloalkyl, aralkyl or alkaryl, R 3 to R 8 are hydrogen or lower alkyl, X is --O-- or --NR 9 --, where R 9 is hydrogen or C 1 -C 4 alkyl, n is 0 or 1, m is 2, 3 or 4 and Q is an organic radical of valency m. The photoresists are suitable for making printing forms, printed circuits, integrated circuits or silver-free photographic films.
Inventors
- 👤 Martin Roth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:07
CPC Classifications
C; C07; C07D; C07D319/00; C07D319/04; C07D319/06; C07D317/00; C07D317/08; C07D317/10; C07D317/14; C07D317/30; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045; G03F7/022
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
145 words
A process for producing a positive image which comprises (a) coating a substrate with a photosensitive composition which comprises (i) a compound of formula I ##STR16## wherein R 1 and R 2 are each independently of the other hydrogen, C 1 -C 8 -alkyl, phenyl, naphthyl, C 5 -C 7 -cycloalkyl, C 7 -C 14 -aralkyl or C 7 -C 14 -alkaryl, or said alkyl, said phenyl, said napthyl, said cycloalkyl, said aralkyl or said alkaryl substituted by one to three members selected from the group consisting of halogen, hydroxy, alkoxy, nitro, cyano and amino, R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are each independently hydrogen or C 1 -C 4 -alkyl, X is --O-- or --NR 9 -- where R 9 is hydrogen or C 1 -C 4 -alkyl, n is 0 or 1,
Claim 2
Dependent Claim
145 words
A process for producing a positive image which comprises (a) coating a substrate with a photosensitive composition which comprises (i) a compound of formula I ##STR16## wherein R 1 and R 2 are each independently of the other hydrogen, C 1 -C 8 -alkyl, phenyl, naphthyl, C 5 -C 7 -cycloalkyl, C 7 -C 14 -aralkyl or C 7 -C 14 -alkaryl, or said alkyl, said phenyl, said napthyl, said cycloalkyl, said aralkyl or said alkaryl substituted by one to three members selected from the group consisting of halogen, hydroxy, alkoxy, nitro, cyano and amino, R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are each independently hydrogen or C 1 -C 4 -alkyl, X is --O-- or --NR 9 -- where R 9 is hydrogen or C 1 -C 4 -alkyl, n is 0 or 1,
Claim 3
Dependent Claim
123 words
m is 2, 3 or 4, and Q is an aliphatic, cycloaliphatic, aromatic, araliphatic or 5- or 6-membered heterocyclic radical of valency m, with the proviso that where several ester or amide radicals are present in the molecule, the groups R 1 to R 9 within the scope of the above definitions are the same or different, and where n is 0, both carbon atoms are linked direct to each other to form a 5-membered dioxolane ring, (ii) an effective amount of a photosensitive compound which releases an acid upon exposure to actinic radiation, (b) exposing the coated substrate to actinic radiation in a predetermined pattern through a photomask, and (c) developing the positive image by removing the exposed areas with a developer.
Claim 4
Dependent Claim
123 words
m is 2, 3 or 4, and Q is an aliphatic, cycloaliphatic, aromatic, araliphatic or 5- or 6-membered heterocyclic radical of valency m, with the proviso that where several ester or amide radicals are present in the molecule, the groups R 1 to R 9 within the scope of the above definitions are the same or different, and where n is 0, both carbon atoms are linked direct to each other to form a 5-membered dioxolane ring, (ii) an effective amount of a photosensitive compound which releases an acid upon exposure to actinic radiation, (b) exposing the coated substrate to actinic radiation in a predetermined pattern through a photomask, and (c) developing the positive image by removing the exposed areas with a developer.
Claim 5
Dependent Claim
18 words
A process according to claim 1 wherein the photosensitive composition of step (a) additionally contains (iii) a binder.
Claim 6
Dependent Claim
77 words
A process according to claim 1 where in the compound of formula I of step (a) R 1 and R 2 are each independently of the other hydrogen, C 1 -C 4 -alkyl or phenyl, R 3 , R 4 , R 5 and R 6 are each independently hydrogen or methyl, X is --O-- or --NH--, n is 0, m is 2 or 3, and Q is an aliphatic, cycloaliphatic or araliphatic radical of valency m.
Claim 7
Dependent Claim
76 words
A process according to claim 1 where in the compound of formula I of step (a) R 1 and R 2 are independently of the other hydrogen, methyl or phenyl, R 3 , R 4 , R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0, m is 2, and Q is a divalent radical which is selected from the group consisting of C 2 -C 18 -alkylene, xylylene and hexahydroxylylene.
Claim 8
Dependent Claim
69 words
A process according to claim 1 where in the compound of formula I of step (a) R 1 and R 2 are each independently of the other hydrogen, methyl or phenyl, R 3 , R 4 , R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0, m is 3, and Q is derived from trimethylolpropane or glycerol after removal of the alcohol groups.
Claim 9
Dependent Claim
67 words
A process according to claim 1 where in the compound of formula I of step (a) R 1 and R 2 are each independently of the other hydrogen, methyl or phenyl, R 3 , R 4 , R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0, m is 4, and Q is derived from pentaerythritol after removal of the alcohol groups.
Claim 10
Dependent Claim
19 words
A process according to claim 1 where in the compound of formula I of step (a) n is 0.
Claim 11
Dependent Claim
21 words
A process according to claim 1 where in the compound of formula I of step (a) m is 2 or 3.
Claim 12
Dependent Claim
30 words
A process according to claim 1 where in the compound of formula I of step (a) R 1 is methyl and each of R 2 to R 8 is hydrogen.
Claim 13
Dependent Claim
19 words
A process according to claim 1 where in the compound of formula I of step (a) X is --O--.
Claim 14
Dependent Claim
11 words
A positive image prepared according to the process of claim 1.
References Cited (Backward Citations)
US3515552A
Cited
US3536489A
Cited
US3954475A
Cited
US3987037A
Cited
US3779778A
Cited
US3991033A
Cited
US4101323A
Cited
US4189323A
Cited
US4247611A
Cited
US4250247A
Cited
US4248957A
Cited
US4258121A
Cited
US4356252A
Cited
US4339567A
Cited
US4411823A
Cited
US4383025A
Cited
US4398014A
Cited
US4371605A
Cited
US4506006A
Cited
US4510290A
Cited
GB2120263A
Cited
US4505858A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-12 | 1991-10-12 | 1992-04-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-12 | 1995-10-12 | 1996-04-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-12 | 1999-10-12 | 2000-04-12 | $7700.00 | Window Closed / Lapsed |