US5232866A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Isolated films using an air dielectric
Assignee: International Business Machines Corp
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Filing: 1991-10-23
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Granted: 1993-08-03
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Expires: 2011-10-23
Abstract
Abstract A method for isolating a film from a substrate 50 includes the steps of: providing an N+ layer 52 on the substrate 50; forming an insulation layer 54 onto the N+ doped layer 52; etching a pair of trenches 56, 58 through the insulation layer 52 to thereby form an isolation region 60 of insulation material; laterally etching a cavity 62 underneath the isolation region; and, forming a film 64 onto the isolation region.
Inventors
- 👤 Klaus D. Beyer
- 👤 Victor J. Silvestri
- 👤 Andrie S. Yapsir
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:43
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/021; H10W10/20; H10W20/00; H10W20/01; H10W20/071; H10W20/072; H10W20/40; H10W20/45; H10W20/46
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
135 words
A method for isolating a film from a substrate comprising the steps of: a) providing an insulation layer of an insulation material on the substrate; b) etching i) insulation material along two sides of a desired region of said insulation layer and ii) a portion of the substrate beneath said desired region to thereby form an air cavity, said cavity completely separating said desired region of said insulation layer from the substrate beneath and from insulation material adjacent to said two sides of said desired region; and, c) forming the film onto said desired region of said insulation layer, wherein said desired region of said insulation layer forms a bridge under said film and thereby supports said film so that said film is isolated from the substrate by said desired region and said air cavity.
Claim 2
Independent Claim
135 words
A method for isolating a film from a substrate comprising the steps of: a) providing an insulation layer of an insulation material on the substrate; b) etching i) insulation material along two sides of a desired region of said insulation layer and ii) a portion of the substrate beneath said desired region to thereby form an air cavity, said cavity completely separating said desired region of said insulation layer from the substrate beneath and from insulation material adjacent to said two sides of said desired region; and, c) forming the film onto said desired region of said insulation layer, wherein said desired region of said insulation layer forms a bridge under said film and thereby supports said film so that said film is isolated from the substrate by said desired region and said air cavity.
Claim 3
Dependent Claim
112 words
A method for isolating a film from a substrate according to claim 1, further wherein the step of etching further comprises etching i) insulation material along two sides of a plurality of desired regions, respectively, and ii) a portion of the substrate beneath said plurality of desired regions, respectively, to thereby form a plurality of air cavities, respectively, said cavities completely separating said plurality of desired regions of said insulation layer from the substrate beneath and from insulation material adjacent to said respective two sides of said plurality of desired regions, and further wherein the step of forming the film further comprises forming the film onto said plurality of desired regions, respectively.
Claim 4
Dependent Claim
24 words
A method for isolating a film from a substrate according to claim 1 or 2, wherein said film is comprises of an electrical conductor.
Claim 5
Dependent Claim
26 words
A method for isolating a film from a substrate according to claim 1 or 2, wherein said etching step is comprises of a dry plasma etch.
Claim 6
Independent Claim
156 words
A method for isolating a film from a substrate comprising the steps of: a) providing a selective etch layer on the substrate having a characteristic etch response different from that of the substrate; b) forming an insulation layer of an insulation material onto said selective etch layer; c) forming a pair of trenches in said insulation layer, said pair of trenches further being in contact with said selective etch layer, thereby defining an isolation region in said insulation layer positioned between the trenches; d) laterally etching said selective etch layer under said isolation region to thereby form an air cavity, said air cavity being defined by the trenches and the etched selective etch layer underneath said isolation region; and, e) forming the film onto said isolation region, wherein said isolation region forms a bridge underneath the film for support thereof and the film is isolated from the substrate by said isolation region and said air cavity.
Claim 7
Independent Claim
156 words
A method for isolating a film from a substrate comprising the steps of: a) providing a selective etch layer on the substrate having a characteristic etch response different from that of the substrate; b) forming an insulation layer of an insulation material onto said selective etch layer; c) forming a pair of trenches in said insulation layer, said pair of trenches further being in contact with said selective etch layer, thereby defining an isolation region in said insulation layer positioned between the trenches; d) laterally etching said selective etch layer under said isolation region to thereby form an air cavity, said air cavity being defined by the trenches and the etched selective etch layer underneath said isolation region; and, e) forming the film onto said isolation region, wherein said isolation region forms a bridge underneath the film for support thereof and the film is isolated from the substrate by said isolation region and said air cavity.
Claim 8
Dependent Claim
123 words
A method for isolating a film from a substrate according to claim 5, further wherein the step of forming a pair of trenches further comprises forming a plurality of pairs of trenches, thereby defining a plurality of isolation regions, respectively, and wherein the step of laterally etching said selective etch layer further comprises laterally etching said selective etch layer under said plurality of isolation regions, respectively, to thereby form a plurality of air cavities, respectively, said cavities completely separating said plurality of isolation regions from the substrate beneath and from insulation material adjacent to respective trench sides of said plurality of isolation regions, and wherein the step of forming the film further comprises forming the film onto said plurality of isolation regions, respectively.
Claim 9
Dependent Claim
26 words
A method for isolating a film from a substrate according to claim 5 or 6, wherein said etching step is comprised of a dry plasma etch.
Claim 10
Dependent Claim
24 words
A method for isolating a film form a substrate according to claim 5 or 6, wherein said insulation material is comprised of an oxide.
Claim 11
Dependent Claim
24 words
A method for isolating a film from a substrate according to claim 5 or 6, wherein said film is comprised of an electrical conductor.
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